The influence of methane flow rate on microstructure and surface morphology of a-SiC:H thin films prepared by plasma enhanced chemical vapor deposition technique
2006 ◽
Vol 6
(11)
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pp. 3479-3482
1991 ◽
Vol 30
(Part 1, No. 8)
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pp. 1740-1741
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2010 ◽
Vol 81
(11)
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pp. 113903
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1997 ◽
Vol 36
(Part 1, No. 8)
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pp. 5187-5191
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2016 ◽
Vol 4
(16)
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pp. 3403-3414
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