Low-inertia method of control over nitrogen concentration in the PVD nitride coatings by non-self-sustained arc discharge with thermionic and hollow cathodes

Vacuum ◽  
2021 ◽  
Vol 187 ◽  
pp. 110123 ◽  
Author(s):  
O.V. Krysina ◽  
N.N. Koval ◽  
S.S. Kovalsky ◽  
V.V. Shugurov ◽  
I.V. Lopatin ◽  
...  
Keyword(s):  
Arc Discharge ◽  
Nitrogen Concentration ◽  
Hollow Cathodes ◽  
Nitride Coatings

Low-energy high-current plasma immersion implantation of nitrogen ions in plasma of non-self-sustained arc discharge with thermionic and hollow cathodes

2018 ◽  
Vol 340 ◽  
pp. 152-158 ◽  
Author(s):  
N.N. Koval ◽  
A.I. Ryabchikov ◽  
D.O. Sivin ◽  
I.V. Lopatin ◽  
O.V. Krysina ◽  
...  
Keyword(s):  
Arc Discharge ◽  
Low Energy ◽  
High Current ◽  
Hollow Cathodes ◽  
Nitrogen Ions

Preparation and characterization of thin films of carbon nitride

1995 ◽  
Vol 53 ◽  
pp. 104-105
Author(s):  
L. Wan ◽  
R. F. Egerton
Keyword(s):  
Carbon Nitride ◽  
Arc Discharge ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Reactive Sputtering ◽  
Vacuum Arc ◽  
Specimen Preparation ◽  
Bonding Structure ◽  
Electron Energy Loss

INTRODUCTION Recently, a new compound carbon nitride (CNx) has captured the attention of materials scientists, resulting from the prediction of a metastable crystal structure β-C3N4. Calculations showed that the mechanical properties of β-C3N4 are close to those of diamond. Various methods, including high pressure synthesis, ion beam deposition, chemical vapor deposition, plasma enhanced evaporation, and reactive sputtering, have been used in an attempt to make this compound. In this paper, we present the results of electron energy loss spectroscopy (EELS) analysis of composition and bonding structure of CNX films deposited by two different methods.SPECIMEN PREPARATION Specimens were prepared by arc-discharge evaporation and reactive sputtering. The apparatus for evaporation is similar to the traditional setup of vacuum arc-discharge evaporation, but working in a 0.05 torr ambient of nitrogen or ammonia. A bias was applied between the carbon source and the substrate in order to generate more ions and electrons and change their energy. During deposition, this bias causes a secondary discharge between the source and the substrate.

The Correlation of Adhesion Strength with Barrier Structure in Cu Metallization

2003 ◽  
Vol 766 ◽  
Author(s):  
A. Sekiguchi ◽  
J. Koike ◽  
K. Ueoka ◽  
J. Ye ◽  
H. Okamura ◽  
...  
Keyword(s):  
Thin Films ◽  
Adhesion Strength ◽  
Nitrogen Concentration ◽  
Scratch Test ◽  
Barrier Structure ◽  
Barrier Layers ◽  
Cu Metallization ◽  
Microstructure Observation ◽  
Sputter Deposited ◽  
Sulfur Containing

AbstractAdhesion strength in sputter-deposited Cu thin films on various types of barrier layers was investigated by scratch test. The barrier layers were Ta1-xNx with varied nitrogen concentration of 0, 0.2, 0.3, and 0.5. Microstructure observation by TEM indicated that each layer consists of mixed phases of β;-Ta, bcc-TaN0.1, hexagonal-TaN, and fcc-TaN, depending on the nitrogen concentration. A sulfur- containing amorphous phase was also present discontinuously at the Cu/barrier interfaces in all samples. Scratch test showed that delamination occurred at the Cu/barrier interface and that the overall adhesion strength increased with increasing the nitrogen concentration. A good correlation was found between the measured adhesion strength and the composing phases in the barrier layer.

Influence of Arc Discharge on Contact Resistance of AgNi Contacts for Electromagnetic Contactors

2012 ◽  
Vol E95.C (9) ◽  
pp. 1531-1534 ◽  
Author(s):  
Kiyoshi YOSHIDA ◽  
Koichiro SAWA ◽  
Kenji SUZUKI ◽  
Masaaki WATANABE
Keyword(s):  
Contact Resistance ◽  
Arc Discharge

CHARACTERISTICS OF A CARBON ARC DISCHARGE

2001 ◽  
Vol 5 (2) ◽  
pp. 10 ◽  
Author(s):  
K. Saidane ◽  
H. Lange ◽  
M. Razafinimanana ◽  
A. Huczko ◽  
C. Zedde ◽  
...  
Keyword(s):  
Arc Discharge ◽  
Carbon Arc

Decomposition and nitrogen mineralization from green manures intercropped with coffee tree

2018 ◽  
Vol 13 (1) ◽  
pp. 23
Author(s):  
Rosileyde Golçalves Siqueira Cardoso ◽  
Adriene Woods Pedrosa ◽  
Mateus Cupertino Rodrigues ◽  
Ricardo Henrique Silva Santos ◽  
Paulo Roberto Cecon ◽  
...  
Keyword(s):  
Nitrogen Mineralization ◽  
N Mineralization ◽  
Dry Matter ◽  
Nitrogen Concentration ◽  
Growth Time ◽  
Dry Matter Content ◽  
Green Manures ◽  
Coffee Tree ◽  
Jack Bean ◽  
Hyacinth Bean

The knowledge about the rate of decomposition and nitrogen mineralization of green manures provides synchronization with the higher absorption stage by the coffee tree. The rate of decomposition and nitrogen mineralization varies according to the species of green manure and with the environmental factors. The aim of the present study was to evaluate the decomposition and nitrogen mineralization of two green manures intercropped with coffee trees for three different periods. The experiment was divided into two designs for statistical analysis, one referring to the characterization of plant material (fresh mass, dry matter, dry matter content, nitrogen concentration and accumulation in the jack bean (Canavalia ensiformis) and hyacinth bean (Dolichos lablab) and another to evaluate the rate of decomposition and N mineralization of these species. The decomposition rate decreased in both species as their growth time increased in the field. The decomposition was influenced by the phenology of green manures. Nitrogen mineralization of the jack bean decreased as the growth period in the field increased and was faster than hyacinth bean only when cut at 60 days. The N mineralization was slower than mass decomposition in both species.

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