A Micromanipulator for Use in the Column of a Scanning Electron Microscope
Used in the secondary electron mode, the Scanning Electron Microscope (SEM) produces an image of the outside surface of a microscopic sample which looks very similar to what one might expect to see if the sample was a diffusely illuminated macroscopic object viewed with the unaided eye. Part of the familiarity of such an image is associated with the fact that one seems to look at the sample rather than through it, as in the case with the conventional electron microscope or the high resolution light microscope. A resulting limitation is the fact that an object of interest cannot be observed if it is below the outer surface. It has been shown (Gane and Bowden 1968) that useful surface hardness information can be obtained on a micro scale by observing the deformation produced when a small stylus, attached to a D'Arsonval meter movement, is brought to bear on the surface of a sample while it is in the SEM.