Determination of boron and phosphorus in borophosphosilicate thin films on silicon substrates by capillary electrophoresis

ABSTRACTUsing standard deposition and micromachining techniques, silicon substrates with square and rectangular windows covered with membranes of polycrystalline silicon (polysilicon) have been fabricated. Pressure-displacement curves obtained during the bulge testing of membranes with the above geometries have been used to determine the elastic constants E and v of the polysilicon. The results obtained (E = 162± 4 GPa and v = 0.19±0.03) are in good agreement with literature values for bulk polycrystalline silicon.

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Interactions Between Al and Cr Thin Films

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100093158 ◽

1976 ◽

Vol 34 ◽

pp. 638-639

Author(s):

R. M. Anderson ◽

T. M. Reith ◽

M. J. Sullivan ◽

E. K. Brandis

Keyword(s):

Thin Films ◽

Room Temperature ◽

Vacuum System ◽

Processing Temperature ◽

Diffusion Couples ◽

Electronic Circuits ◽

Intermetallic Formation ◽

Si Substrates ◽

Aluminum Silicon

Thin films of aluminum or aluminum-silicon can be used in conjunction with thin films of chromium in integrated electronic circuits. For some applications, these films exhibit undesirable reactions; in particular, intermetallic formation below 500 C must be inhibited or prevented. The Al films, being the principal current carriers in interconnective metal applications, are usually much thicker than the Cr; so one might expect Al-rich intermetallics to form when the processing temperature goes out of control. Unfortunately, the JCPDS and the literature do not contain enough data on the Al-rich phases CrAl7 and Cr2Al11, and the determination of these data was a secondary aim of this work.To define a matrix of Cr-Al diffusion couples, Cr-Al films were deposited with two sets of variables: Al or Al-Si, and broken vacuum or single pumpdown. All films were deposited on 2-1/4-inch thermally oxidized Si substrates. A 500-Å layer of Cr was deposited at 120 Å/min on substrates at room temperature, in a vacuum system that had been pumped to 2 x 10-6 Torr. Then, with or without vacuum break, a 1000-Å layer of Al or Al-Si was deposited at 35 Å/s, with the substrates still at room temperature.

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Determination of Stoichiometry of GaAs Component in (Gaas)Ge Epitaxially Grown Thin Films by Electron Microprobe X-Ray Analysis

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100134922 ◽

1990 ◽

Vol 48 (2) ◽

pp. 264-265

Author(s):

D. R. Liu ◽

S. S. Shinozaki ◽

R. J. Baird

Keyword(s):

Thin Film ◽

Thin Films ◽

Monte Carlo Simulation ◽

Monte Carlo ◽

Compound Semiconductors ◽

Energy Dispersive Analysis ◽

X Ray ◽

Metastable Alloys ◽

Lower Voltage

The epitaxially grown (GaAs)Ge thin film has been arousing much interest because it is one of metastable alloys of III-V compound semiconductors with germanium and a possible candidate in optoelectronic applications. It is important to be able to accurately determine the composition of the film, particularly whether or not the GaAs component is in stoichiometry, but x-ray energy dispersive analysis (EDS) cannot meet this need. The thickness of the film is usually about 0.5-1.5 μm. If Kα peaks are used for quantification, the accelerating voltage must be more than 10 kV in order for these peaks to be excited. Under this voltage, the generation depth of x-ray photons approaches 1 μm, as evidenced by a Monte Carlo simulation and actual x-ray intensity measurement as discussed below. If a lower voltage is used to reduce the generation depth, their L peaks have to be used. But these L peaks actually are merged as one big hump simply because the atomic numbers of these three elements are relatively small and close together, and the EDS energy resolution is limited.

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Scanning-probe microscope analysis of optical thin films: A new analytical tool in a manufacturing environment

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100173078 ◽

1994 ◽

Vol 52 ◽

pp. 1068-1069

Author(s):

S. P. Sapers ◽

R. Clark ◽

P. Somerville

Keyword(s):

Thin Film ◽

Thin Films ◽

Thermal Control ◽

Scanning Probe Microscope ◽

Scanning Probe ◽

List Type ◽

Manufacturing Environment ◽

Physical Measurements ◽

Probe Microscope

OCLI is a leading manufacturer of thin films for optical and thermal control applications. The determination of thin film and substrate topography can be a powerful way to obtain information for deposition process design and control, and about the final thin film device properties. At OCLI we use a scanning probe microscope (SPM) in the analytical lab to obtain qualitative and quantitative data about thin film and substrate surfaces for applications in production and research and development. This manufacturing environment requires a rapid response, and a large degree of flexibility, which poses special challenges for this emerging technology. The types of information the SPM provides can be broken into three categories:(1)Imaging of surface topography for visualization purposes, especially for samples that are not SEM compatible due to size or material constraints;(2)Examination of sample surface features to make physical measurements such as surface roughness, lateral feature spacing, grain size, and surface area;(3)Determination of physical properties such as surface compliance, i.e. “hardness”, surface frictional forces, surface electrical properties.

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STEM and ELS Observation of Early Oxide Formation on the Surface of Cr Thin Films

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s1431927600001768 ◽

1980 ◽

Vol 38 ◽

pp. 412-413

Author(s):

Fumio Watari ◽

J. M. Cowley

Keyword(s):

Thin Films ◽

Optical System ◽

Room Temperature ◽

Oxide Formation ◽

Initial Nucleation ◽

Diffraction Patterns ◽

Relationship Of ◽

Multiple Twinning ◽

Moderately High Temperature

STEM coupled with the optical system was used for the investigation of the early oxidation on the surface of Cr. Cr thin films (30 – 1000Å) were prepared by evaporation onto the polished or air-cleaved NaCl substrates at room temperature and 45°C in a vacuum of 10−6 Torr with an evaporation speed 0.3Å/sec. Rather thick specimens (200 – 1000Å) with various preferred orientations were used for the investigation of the oxidation at moderately high temperature (600 − 1100°C). Selected area diffraction patterns in these specimens are usually very much complicated by the existence of the different kinds of oxides and their multiple twinning. The determination of the epitaxial orientation relationship of the oxides formed on the Cr surface was made possible by intensive use of the optical system and microdiffraction techniques. Prior to the formation of the known rhombohedral Cr2O3, a thin spinel oxide, probably analogous to γ -Al203 or γ -Fe203, was formed. Fig. 1a shows the distinct epitaxial growth of the spinel (001) as well as the rhombohedral (125) on the well-oriented Cr(001) surface. In the case of the Cr specimen with the (001) preferred orientation (Fig. 1b), the rings explainable by spinel structure appeared as well as the well defined epitaxial spots of the spinel (001). The microdif fraction from 20A areas (Fig. 2a) clearly shows the same pattern as Fig. Ia with the weaker oxide spots among the more intense Cr spots, indicating that the thickness of the oxide is much less than that of Cr. The rhombohedral Cr2O3 was nucleated preferably at the Cr(011) sites provided by the polycrystalline nature of the present specimens with the relation Cr2O3 (001)//Cr(011), and by further oxidation it grew into full coverage of the rest of the Cr surface with the orientation determined by the initial nucleation.

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Direct Determination of Glyphosate in Environmental Waters Using Capillary Electrophoresis with Electrospray Condensation Nucleation Light Scattering Detection

International Journal of Environmental & Analytical Chemistry ◽

10.1080/03067310304719 ◽

2003 ◽

Vol 83 (9) ◽

pp. 797-806 ◽

Cited By ~ 1

Author(s):

Jing You ◽

Mihkel Kaljurand ◽

John A. Koropchak

Keyword(s):

Capillary Electrophoresis ◽

Light Scattering ◽

Direct Determination ◽

Environmental Waters ◽

Light Scattering Detection ◽

Condensation Nucleation

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Finite-Element Modeling and Quantitative Measurement Using Scanning Microwave Microscopy to Characterize Dielectric Films

10.31399/asm.cp.istfa2018p0561 ◽

2018 ◽

Author(s):

K. A. Rubin ◽

W. Jolley ◽

Y. Yang

Keyword(s):

Thin Films ◽

Dielectric Film ◽

Dielectric Constants ◽

Dielectric Films ◽

Silicon Substrates ◽

Fem Modeling ◽

Dielectric Thin Films ◽

Microwave Microscopy ◽

Scanning Microwave Microscopy ◽

Low K

Abstract Scanning Microwave Impedance Microscopy (sMIM) can be used to characterize dielectric thin films and to quantitatively discern film thickness differences. FEM modeling of the sMIM response provides understanding of how to connect the measured sMIM signals to the underlying properties of the dielectric film and its substrate. Modeling shows that sMIM can be used to characterize a range of dielectric film thicknesses spanning both low-k and medium-k dielectric constants. A model system consisting of SiO2 thin films of various thickness on silicon substrates is used to illustrate the technique experimentally.

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