Growth of High-Quality Hexagonal Boron Nitride Single-Layer Films on Carburized Ni Substrates for Metal–Insulator–Metal Tunneling Devices

2020 ◽  
Vol 12 (31) ◽  
pp. 35318-35327
Author(s):  
Yanwei He ◽  
Hao Tian ◽  
Protik Das ◽  
Zhenjun Cui ◽  
Pedro Pena ◽  
...  



1995 ◽  
Vol 381 ◽  
Author(s):  
J. P. Sullivan ◽  
T. A. Friedmann ◽  
C. A. Apblett ◽  
M. P. Siegal ◽  
N. Missert ◽  
...  

AbstractAlthough films of diamond-like carbon (DLC) and hexagonal boron nitride (h-BN) have shown low dielectric constants in the range of 3 to 4, these materials have been unsuitable for use as interconnect dielectrics due to poor thermal stability and environmental degradation. These deficiencies can be addressed by depositing DLC films free of hydrogen (a-tC) and depositing the cubic phase of BN (c-BN). The dielectric characteristics of hydrogen-free DLC and c-BN that have been deposited by pulsed-laser deposition (PLD) have been evaluated using metal-insulator-metal and metal-insulator-semiconductor structures. For comparison, the dielectric characteristics of h-BN deposited by electron cyclotron resonance (ECR) were also evaluated. Despite the superior thermal and environmental stability of the a-tC and c-BN films and the attractively low deposition thermal budget (room temperature deposition for a-tC films, 400°C for c-BN films), the films exhibit dielectric constants comparable to those of bulk diamond and bulk BN, ∼ 6. Furthermore, the a-tC and c-BN films exhibit high compressive stress in the GPa range which limits their usefulness only to those applications requiring a thin dielectric layer, e.g. diffusion barriers or encapsulants.



2021 ◽  
Vol 12 (1) ◽  
Author(s):  
Hitesh Agarwal ◽  
Bernat Terrés ◽  
Lorenzo Orsini ◽  
Alberto Montanaro ◽  
Vito Sorianello ◽  
...  

AbstractElectro-absorption (EA) waveguide-coupled modulators are essential building blocks for on-chip optical communications. Compared to state-of-the-art silicon (Si) devices, graphene-based EA modulators promise smaller footprints, larger temperature stability, cost-effective integration and high speeds. However, combining high speed and large modulation efficiencies in a single graphene-based device has remained elusive so far. In this work, we overcome this fundamental trade-off by demonstrating the 2D-3D dielectric integration in a high-quality encapsulated graphene device. We integrated hafnium oxide (HfO2) and two-dimensional hexagonal boron nitride (hBN) within the insulating section of a double-layer (DL) graphene EA modulator. This combination of materials allows for a high-quality modulator device with high performances: a ~39 GHz bandwidth (BW) with a three-fold increase in modulation efficiency compared to previously reported high-speed modulators. This 2D-3D dielectric integration paves the way to a plethora of electronic and opto-electronic devices with enhanced performance and stability, while expanding the freedom for new device designs.



Crystals ◽  
2021 ◽  
Vol 11 (3) ◽  
pp. 222
Author(s):  
Pervaiz Ahmad ◽  
Mayeen Uddin Khandaker ◽  
Fida Rehman ◽  
Nawshad Muhammad ◽  
Mohammad Rashed Iqbal Faruque ◽  
...  

The interesting properties of hexagonal boron nitride (h-BN) and its potential uses in thermo-structural advanced applications have been limited or restricted by its inherent brittleness, which can easily be eliminated by its fibers (h-BN) in nanoscale dimensions. The current study is based on the synthesis of nanoscale 10B-enriched fibers of h-BN (10BNNFs) from 10B in the precursors instead of B in two-hour annealing at 900 °C and one-hour growth at 1000 °C. All of the 10BNNFs are randomly curved and highly condensed or filled from 10h-BN species with no internal space or crack. XRD peaks reported the 10h-BN phase and highly crystalline nature of the synthesized 10BNNFs. 10h-BN phase and crystalline nature of 10BNNFs are confirmed from high-intensity peaks at 1392 (cm−1) in Raman and FTIR spectroscopes.



2021 ◽  
Vol 13 (39) ◽  
pp. 47283-47292
Author(s):  
Yongliang Chen ◽  
Chi Li ◽  
Simon White ◽  
Milad Nonahal ◽  
Zai-Quan Xu ◽  
...  


Nanoscale ◽  
2021 ◽  
Author(s):  
Yifei Li ◽  
Xin Wen ◽  
Changjie Tan ◽  
Ning Li ◽  
Ruijie Li ◽  
...  

Owing to its irreplaceable roles in new functional devices, such as universal substrates and excellent layered insulators, high-quality hexagonal BN (hBN) crystals are exceedingly required in the field of two-dimensional...



Author(s):  
Yiheng Chen ◽  
Wen-Ti Guo ◽  
Zi-si Chen ◽  
Suyun Wang ◽  
Jian-Min Zhang

Abstract In recent years, the discovery of "magic angle" graphene has given new inspiration to the formation of heterojunctions. Similarly, the use of hexagonal boron nitride, known as white graphene, as a substrate for graphene devices has more aroused great interest in the graphene/hexagonal boron nitride (G/hBN) heterostructure system. Based on the first principles method of density functional theory, the band structure, density of states, Mulliken population, and differential charge density of a tightly packed model of twisted graphene/hexagonal boron nitride/graphene (G/hBN/G) sandwich structure have been studied. Through the establishment of heterostructure models TBG inserting hBN with different twisted angles, it was found that the band gap, Mulliken population, and charge density, exhibited specific evolution regulars with the rotation angle of the upper graphene, showing novel electronic properties and realizing metal-insulator phase transition. We find that the particular value of the twist angle at which the metal-insulator phase transition occurs and propose a rotational regulation mechanism with angular periodicity. Our results have guiding significance for the practical application of heterojunction electronic devices.



2019 ◽  
Vol 100 (15) ◽  
Author(s):  
Brian Shevitski ◽  
S. Matt Gilbert ◽  
Christopher T. Chen ◽  
Christoph Kastl ◽  
Edward S. Barnard ◽  
...  


2019 ◽  
Vol 7 (21) ◽  
pp. 6273-6278 ◽  
Author(s):  
Zichao Ma ◽  
Clarissa Prawoto ◽  
Zubair Ahmed ◽  
Ying Xiao ◽  
Lining Zhang ◽  
...  

Single layer etching of h-BN is achieved using a two-step remote plasma process.



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