Characteristics of an Amorphous Carbon Layer as a Diffusion Barrier for an Advanced Copper Interconnect

2019 ◽  
Vol 12 (2) ◽  
pp. 3104-3113 ◽  
Author(s):  
Byeong-Seon An ◽  
Yena Kwon ◽  
Jin-Su Oh ◽  
Changmin Lee ◽  
Seongheum Choi ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Diffusion Barrier ◽  
Carbon Layer ◽  
Copper Interconnect ◽  
Amorphous Carbon Layer

High-Temperature Scanning Tunneling Microscopy Study of the Ordering Transition of an Amorphous Carbon Layer into Graphene on Ruthenium(0001)

ACS Nano ◽  
2012 ◽  
Vol 7 (1) ◽  
pp. 154-164 ◽  
Author(s):  
Sebastian Günther ◽  
Sebastian Dänhardt ◽  
Martin Ehrensperger ◽  
Patrick Zeller ◽  
Stefan Schmitt ◽  
...  
Keyword(s):  
High Temperature ◽  
Amorphous Carbon ◽  
Microscopy Study ◽  
Carbon Layer ◽  
Scanning Tunneling ◽  
Tunneling Microscopy ◽  
Temperature Scanning ◽  
Ordering Transition ◽  
Amorphous Carbon Layer ◽  
Scanning Tunneling Microscopy Study

Amorphous carbon layer contributing Li storage capacity to Nb2O5@C nanosheets

RSC Advances ◽  
2015 ◽  
Vol 5 (45) ◽  
pp. 36104-36107 ◽  
Author(s):  
Lei Wang ◽  
Boyang Ruan ◽  
Jiantie Xu ◽  
Hua Kun Liu ◽  
Jianmin Ma
Keyword(s):  
Amorphous Carbon ◽  
Storage Capacity ◽  
High Capacity ◽  
Carbon Layer ◽  
Large Capacity ◽  
Li Storage ◽  
Amorphous Carbon Layer

The high-capacity of Nb2O5 nanosheets has been successfully realized through introducing amorphous carbon layers, which have been demonstrated to have a large capacity owing to the existence of defects on amorphous carbon layers.

Diamond-like amorphous carbon layer film by an inductively coupled plasma system for next generation etching hard mask

2018 ◽  
Vol 663 ◽  
pp. 21-24 ◽  
Author(s):  
Se Jun Park ◽  
Dohyung Kim ◽  
Seungmoo Lee ◽  
Yongjoon Ha ◽  
Mingyoo Lim ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Inductively Coupled Plasma ◽  
Carbon Layer ◽  
Next Generation ◽  
Plasma System ◽  
Layer Film ◽  
Hard Mask ◽  
Inductively Coupled ◽  
Amorphous Carbon Layer

Defect Structure of Diamond Film at the Interface with Amorphous Carbon

1992 ◽  
Vol 270 ◽  
Author(s):  
Li Chang
Keyword(s):  
Amorphous Carbon ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Amorphous Layer ◽  
Carbon Layer ◽  
Silicon Substrates ◽  
Plasma Chemical Vapor Deposition ◽  
Diamond Crystals ◽  
Transmission Electron ◽  
Amorphous Carbon Layer

ABSTRACTDiamond films prepared by microwave plasma chemical vapor deposition, using a gas mixture of methane and hydrogen with ethanol, were formed on silicon substrates. Highresolution transmission electron microscopy was employed to characterize the microstructure at interface regions. It was found that the diamond crystals were grown on an amorphous carbon layer. Twins and stacking faults were observed at the regions interfaced with the amorphous carbon layer, suggesting that the defects may already exist in the nucleation stage and at the very first stage of growth. Also, some diamond nuclei embedded in the amorphous layer were observed.

Formation of a highly doped ultra-thin amorphous carbon layer by ion bombardment of graphene

2018 ◽  
Vol 29 (30) ◽  
pp. 305302 ◽  
Author(s):  
Paweł Piotr Michałowski ◽  
Iwona Pasternak ◽  
Paweł Ciepielewski ◽  
Francisco Guinea ◽  
Włodek Strupiński
Keyword(s):  
Amorphous Carbon ◽  
Ion Bombardment ◽  
Carbon Layer ◽  
Amorphous Carbon Layer

Graphitic Disks or Polygons? Faceting of Graphite Disks

1998 ◽  
Vol 4 (S2) ◽  
pp. 708-709
Author(s):  
A. Krishnan ◽  
E. Dujardin ◽  
T.W. Ebbesen ◽  
M.M.J. Treacy
Keyword(s):  
Amorphous Carbon ◽  
Carbon Layer ◽  
Nucleation And Growth ◽  
Growth Mechanisms ◽  
Additional Insight ◽  
Structural Peculiarities ◽  
Carbon Soot ◽  
20 Nm ◽  
Insight Into ◽  
Amorphous Carbon Layer

The recent discovery of graphite cones [1,2] has raised some interesting questions about the nucleation and growth of curved graphitic structures. Here we report the structural peculiarities of one member of the ensemble, i.e. the flat graphite disks. Unlike graphite flakes seen in carbon soot which are irregularly shaped, the disks in this sample often show regular faceting which might give us additional insight into the growth mechanisms.The samples were examined in a Hitachi H9000 NAR TEM. Samples were sonicated in high purity methanol and dispersed on a 300 mesh Cu grid coated with a 20 nm thick amorphous carbon layer. Typical disk diameters range from 0.5 to 3.0 μm, with thickness ranging from 10 nm to 50 nm.A close examination reveals that the edges of the disks are faceted and typically have 12 sides. In most cases, the edges show a long facet alternating with a shorter facet.

scholarly journals Formation of nanometer-thick delaminated amorphous carbon layer by two-step plasma processing of methacrylate-based polymer

2015 ◽  
Vol 33 (5) ◽  
pp. 051601 ◽  
Author(s):  
Dominik Metzler ◽  
Florian Weilnboeck ◽  
Sandra C. Hernández ◽  
Scott G. Walton ◽  
Robert L. Bruce ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Plasma Processing ◽  
Carbon Layer ◽  
Amorphous Carbon Layer
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