Preparation and unique dielectric properties of nanoporous materials with well-controlled closed-nanopores
2016 ◽
Vol 18
(28)
◽
pp. 19183-19193
◽
Keyword(s):
Although general porous materials have a low dielectric constant, their uncontrollable opened porous structure results in high dielectric loss and poor barrier properties, thus limiting their application as interconnect dielectrics.