scholarly journals Analysis on Three‐Dimensional Gate Edge Roughness of Gate‐All‐Around Devices

2021 ◽  
Vol 30 (5) ◽  
pp. 861-865
Author(s):  
SUN Shuang ◽  
LI Ming ◽  
ZHANG Baotong ◽  
LI Xiaokang ◽  
CAI Qifeng ◽  
...  
Keyword(s):  
Three Dimensional ◽  
Edge Roughness ◽  
Gate Edge

scholarly journals Impact of Gate Edge Roughness Variability on FinFET and Gate-All-Around Nanowire FET

2019 ◽  
Vol 40 (4) ◽  
pp. 510-513 ◽  
Author(s):  
G. Espineira ◽  
D. Nagy ◽  
G. Indalecio ◽  
A. J. Garcia-Loureiro ◽  
K. Kalna ◽  
...  
Keyword(s):  
Edge Roughness ◽  
Gate Edge

scholarly journals Impact of Leading Edge Roughness in Cavitation Simulations around a Twisted Foil

Fluids ◽  
2020 ◽  
Vol 5 (4) ◽  
pp. 243
Author(s):  
Abolfazl Asnaghi ◽  
Rickard E. Bensow
Keyword(s):  
Three Dimensional ◽  
Leading Edge ◽  
Flow Structures ◽  
Vortical Structures ◽  
Vorticity Distribution ◽  
Eddy Simulation ◽  
Roughness Elements ◽  
Edge Roughness ◽  
Large Eddy ◽  
Implicit Large Eddy Simulation

The simulation of fully turbulent, three-dimensional, cavitating flow over Delft twisted foil is conducted by an implicit large eddy simulation (LES) approach in both smooth and tripped conditions, the latter by including leading-edge roughness. The analysis investigates the importance of representing the roughness elements on the flow structures in the cavitation prediction. The results include detailed comparisons of cavitation pattern, vorticity distribution, and force predictions with the experimental measurements. It is noted that the presence of roughness generates very small cavitating vortical structures which interact with the main sheet cavity developing over the foil to later form a cloud cavity. Very similar to the experimental observation, these interactions create a streaky sheet cavity interface which cannot be captured in the smooth condition, influencing both the richness of structures in the detached cloudy cavitation as well as the extent and transport of vapour. It is further found to have a direct impact on the pressure distribution, especially in the mid-chord region where the shed cloud cavity collapses.

Resist Materials Providing Small Line-Edge Roughness

1999 ◽  
Vol 584 ◽  
Author(s):  
Hideo Namatsu ◽  
Toru Yamaguchi ◽  
Kenji Kurihara
Keyword(s):  
Polymer Matrix ◽  
Three Dimensional ◽  
Line Edge Roughness ◽  
Hydrogen Silsesquioxane ◽  
Surrounding Matrix ◽  
Polymer Aggregates ◽  
Edge Roughness ◽  
Practical Tool ◽  
Cross Linker ◽  
Produce Line

AbstractOur research focuses on the line-edge roughness of resist patterns and how to reduce it in order to establish nanolithography as a practical tool. Commercially available e-beam resists exhibit a line-edge roughness of 3 nm (σ) or more. It is caused mainly by polymer aggregates in the resist. During development, they are extracted through dissolution of the surrounding polymer matrix. That is, the aggregates themselves dissolve more slowly than the surrounding matrix; and those that remain embedded in the resist produce line-edge roughness. To reduce the roughness, the effect of the aggregates must be suppressed. One way of doing this is to use a resist containing small aggregates. A good candidate is hydrogen silsesquioxane, which has a three-dimensional framework. Another way is to use a resist in which the aggregates are linked together, which makes them difficult to extract during development. A good example is an acrylate-type resist with a cross-linker mixed in.

scholarly journals Three-Dimensional Observation of Edge-Roughness on Poly-Si/TiN Stacked Gate Using Three-Dimensional STEM

2009 ◽  
Vol 15 (S2) ◽  
pp. 634-635
Author(s):  
S Ono ◽  
M Yamane ◽  
A Katakami ◽  
J Yugami ◽  
M Koguchi ◽  
...  
Keyword(s):  
Three Dimensional ◽  
Edge Roughness

Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

scholarly journals True 3D Nanometrology: 3D-Probing with a Cantilever-Based Sensor

Sensors ◽  
2021 ◽  
Vol 22 (1) ◽  
pp. 314
Author(s):  
Jan Thiesler ◽  
Thomas Ahbe ◽  
Rainer Tutsch ◽  
Gaoliang Dai
Keyword(s):  
Three Dimensional ◽  
Critical Dimension ◽  
Selectivity Ratio ◽  
Line Edge Roughness ◽  
Long Term Stability ◽  
Atomic Force ◽  
Edge Roughness ◽  
Spatial Dimensions ◽  
Optical Lever

State of the art three-dimensional atomic force microscopes (3D-AFM) cannot measure three spatial dimensions separately from each other. A 3D-AFM-head with true 3D-probing capabilities is presented in this paper. It detects the so-called 3D-Nanoprobes CD-tip displacement with a differential interferometer and an optical lever. The 3D-Nanoprobe was specifically developed for tactile 3D-probing and is applied for critical dimension (CD) measurements. A calibrated 3D-Nanoprobe shows a selectivity ratio of 50:1 on average for each of the spatial directions x, y, and z. Typical stiffness values are kx = 1.722 ± 0.083 N/m, ky = 1.511 ± 0.034 N/m, and kz = 1.64 ± 0.16 N/m resulting in a quasi-isotropic ratio of the stiffness of 1.1:0.9:1.0 in x:y:z, respectively. The probing repeatability of the developed true 3D-AFM shows a standard deviation of 0.18 nm, 0.31 nm, and 0.83 nm for x, y, and z, respectively. Two CD-line samples type IVPS100-PTB, which were perpendicularly mounted to each other, were used to test the performance of the developed true 3D-AFM: repeatability, long-term stability, pitch, and line edge roughness and linewidth roughness (LER/LWR), showing promising results.

scholarly journals A Multi-Method Simulation Toolbox to Study Performance and Variability of Nanowire FETs

Materials ◽  
2019 ◽  
Vol 12 (15) ◽  
pp. 2391 ◽  
Author(s):  
Natalia Seoane ◽  
Daniel Nagy ◽  
Guillermo Indalecio ◽  
Gabriel Espiñeira ◽  
Karol Kalna ◽  
...  
Keyword(s):  
Field Effect Transistor ◽  
Three Dimensional ◽  
Gate Length ◽  
Line Edge Roughness ◽  
Voltage Standard ◽  
A Value ◽  
Edge Roughness ◽  
Effect Transistor ◽  
Study Performance ◽  
The Ideal

An in-house-built three-dimensional multi-method semi-classical/classical toolbox has been developed to characterise the performance, scalability, and variability of state-of-the-art semiconductor devices. To demonstrate capabilities of the toolbox, a 10 nm gate length Si gate-all-around field-effect transistor is selected as a benchmark device. The device exhibits an off-current (I OFF) of 0 . 03 μA/μm, and an on-current (I ON) of 1770 μA/μm, with the I ON / I OFF ratio 6 . 63 × 10 4, a value 27 % larger than that of a 10 . 7 nm gate length Si FinFET. The device SS is 71 mV/dec, no far from the ideal limit of 60 mV/dec. The threshold voltage standard deviation due to statistical combination of four sources of variability (line- and gate-edge roughness, metal grain granularity, and random dopants) is 55 . 5 mV, a value noticeably larger than that of the equivalent FinFET (30 mV). Finally, using a fluctuation sensitivity map, we establish which regions of the device are the most sensitive to the line-edge roughness and the metal grain granularity variability effects. The on-current of the device is strongly affected by any line-edge roughness taking place near the source-gate junction or by metal grains localised between the middle of the gate and the proximity of the gate-source junction.

The Impact of Real Geometries on Three-Dimensional Separations in Compressors

2011 ◽  
Vol 134 (2) ◽  
Author(s):  
Martin N. Goodhand ◽  
Robert J. Miller
Keyword(s):  
Three Dimensional ◽  
Leading Edge ◽  
Suction Surface ◽  
Blade Loading ◽  
Flow Parameters ◽  
Surface Transition ◽  
Edge Roughness ◽  
Large Growth ◽  
Edge Quality ◽  
The Impact

This paper considers the effect of small variations in leading edge geometry, leading edge roughness, leading edge fillet, and blade fillet geometry on the three-dimensional separations found in compressor blade rows. The detrimental effects of these separations have historically been predicted by correlations based on global flow parameters, such as blade loading, inlet boundary layer skew, etc., and thus ignoring small deviations such as those highlighted above. In this paper it is shown that this may not be the case and that certain, engine representative geometry deviations can have an effect equivalent to an increase in blade loading of 10%. Experiments were performed at the stator hub of a low-speed, single-stage compressor. The results show that any deviation which causes suction surface transition to move to the leading edge over the first 30% of span will cause a large growth in the size of the hub separation, doubling its impact on loss. The geometry deviations that caused this, and are thus of greatest concern to a designer, are changes in leading edge quality and roughness around the leading edge, which are characteristic of an eroded blade.

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