scholarly journals Impact of Gate Edge Roughness Variability on FinFET and Gate-All-Around Nanowire FET

2019 ◽  
Vol 40 (4) ◽  
pp. 510-513 ◽  
Author(s):  
G. Espineira ◽  
D. Nagy ◽  
G. Indalecio ◽  
A. J. Garcia-Loureiro ◽  
K. Kalna ◽  
...  
Keyword(s):  
Edge Roughness ◽  
Gate Edge

scholarly journals Analysis on Three‐Dimensional Gate Edge Roughness of Gate‐All‐Around Devices

2021 ◽  
Vol 30 (5) ◽  
pp. 861-865
Author(s):  
SUN Shuang ◽  
LI Ming ◽  
ZHANG Baotong ◽  
LI Xiaokang ◽  
CAI Qifeng ◽  
...  
Keyword(s):  
Three Dimensional ◽  
Edge Roughness ◽  
Gate Edge

Gate edge roughness in electron beam direct write and its influence to device characteristics

2008 ◽  
Author(s):  
Kang-Hoon Choi ◽  
Rok Dittrich ◽  
Matthias Goldbach ◽  
Christoph Hohle ◽  
Katja Keil ◽  
...  
Keyword(s):  
Electron Beam ◽  
Direct Write ◽  
Edge Roughness ◽  
Gate Edge

Characterization of Line-Edge Roughness in Cu/Low-kInterconnect Pattern

2008 ◽  
Vol 47 (4) ◽  
pp. 2501-2505 ◽  
Author(s):  
Atsuko Yamaguchi ◽  
Daisuke Ryuzaki ◽  
Ken-ichi Takeda ◽  
Jiro Yamamoto ◽  
Hiroki Kawada ◽  
...  
Keyword(s):  
Line Edge Roughness ◽  
Edge Roughness

Modeling of Cutting Process with Cutter Axis Inclination

2011 ◽  
Vol 223 ◽  
pp. 66-74 ◽  
Author(s):  
Takashi Matsumura
Keyword(s):  
Tool Wear ◽  
Surface Finish ◽  
Cutting Temperature ◽  
Cutting Process ◽  
Mechanistic Models ◽  
End Mill ◽  
High Quality ◽  
Ball End Mill ◽  
Milling Operations ◽  
Edge Roughness

Multi-axis controlled machining has been increasing with the demand for high quality in mold manufacturing. The cutter axis inclination should be properly determined in the milling operations. The paper discusses the cutting process of ball end mill with the cutter axis inclination. Two mechanistic models are presented to show the effect of the cutter axis inclination on the tool wear and the surface finish. The actual cutting time during a rotation of the cutter reduces with increasing the cutter axis inclination. Then, the tool is cooled in the non-cutting time. The tool wear is suppressed with reducing the cutting temperature. The surface finish is also improved by increasing cutting velocities with the cutter axis inclination. When the cutter is inclined in the feed direction, the effect of the edge roughness on the surface finish is eliminated. The discussion based on the simulation is verified in the cutting tests for brittle materials.

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