Rapid thermal anneal of hydrogen‐implanted metal‐silicon nitride‐silicon dioxide‐silicon structure
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1975 ◽
Vol 4
(8)
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pp. 1054-1055
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Keyword(s):
1992 ◽
Vol 96
(7)
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pp. 3029-3033
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2013 ◽
Vol 2013
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pp. 1-9
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2000 ◽
Vol 147
(4)
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pp. 1481
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