Al2O3 multi-density layer structure as a moisture permeation barrier deposited by radio frequency remote plasma atomic layer deposition

2014 ◽  
Vol 115 (7) ◽  
pp. 073502 ◽  
Author(s):  
Hyunsoo Jung ◽  
Heeyoung Jeon ◽  
Hagyoung Choi ◽  
Giyul Ham ◽  
Seokyoon Shin ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Radio Frequency ◽  
Layer Structure ◽  
Atomic Layer ◽  
Remote Plasma ◽  
Layer Deposition

Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study

2012 ◽  
Vol 30 (1) ◽  
pp. 01A115 ◽  
Author(s):  
Maarit Kariniemi ◽  
Jaakko Niinistö ◽  
Marko Vehkamäki ◽  
Marianna Kemell ◽  
Mikko Ritala ◽  
...  
Keyword(s):  
Experimental Study ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Remote Plasma ◽  
Layer Deposition ◽  
Deposition Processes

scholarly journals Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications

2012 ◽  
Vol 97 ◽  
pp. 162-165 ◽  
Author(s):  
S.M. Sultan ◽  
O.D. Clark ◽  
T.B. Masaud ◽  
Q. Fang ◽  
R. Gunn ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Remote Plasma ◽  
Layer Deposition
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