25 nm pitch comparison between a traceable x-ray diffractometer and a metrological atomic force microscope

2011 ◽  
Vol 23 (1) ◽  
pp. 015002 ◽  
Author(s):  
Ichiko Misumi ◽  
Jun-ichiro Kitta ◽  
Hiroyuki Fujimoto ◽  
Satoshi Gonda ◽  
Yasushi Azuma ◽  
...  
Keyword(s):  
Atomic Force Microscope ◽  
X Ray ◽  
Atomic Force

Anin situatomic force microscope for normal-incidence nanofocus X-ray experiments

2016 ◽  
Vol 23 (5) ◽  
pp. 1110-1117 ◽  
Author(s):  
M. V. Vitorino ◽  
Y. Fuchs ◽  
T. Dane ◽  
M. S. Rodrigues ◽  
M. Rosenthal ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Force Microscope ◽  
High Speed ◽  
Normal Incidence ◽  
Organic Thin Film ◽  
X Ray ◽  
Atomic Force ◽  
Synchrotron Beamlines

A compact high-speed X-ray atomic force microscope has been developed forin situuse in normal-incidence X-ray experiments on synchrotron beamlines, allowing for simultaneous characterization of samples in direct space with nanometric lateral resolution while employing nanofocused X-ray beams. In the present work the instrument is used to observe radiation damage effects produced by an intense X-ray nanobeam on a semiconducting organic thin film. The formation of micrometric holes induced by the beam occurring on a timescale of seconds is characterized.

scholarly journals Morphological Analysis of Fabricated 5.0 μM Interdigitated Electrode (IDE)

2021 ◽  
Vol 2129 (1) ◽  
pp. 012100
Author(s):  
M N A Uda ◽  
Subash C B Gopinath ◽  
Uda Hashim ◽  
M N Afnan Uda ◽  
N A Parmin ◽  
...  
Keyword(s):  
Atomic Force Microscope ◽  
Morphological Analysis ◽  
Energy Dispersive ◽  
Interdigitated Electrode ◽  
X Ray ◽  
Atomic Force

Abstract The aim of this research is to study the morphological analysis of fabricated Interdigitated Electrode (IDE). This device electrode was physically characterized using 3D nano profiler, scanning electrode microscope (SEM), Energy-dispersive X-ray spectroscopy (EDX) and Atomic Force Microscope (AFM). Based on this analysis, IDE pattern was analyzed thoroughly based on the IDE pattern specifications with 5 μM finger gap and this research significantly will stand as a platform quantify the biomolecules in further analysis.

scholarly journals X-ray microscopy of living multicellular organisms with the Prague Asterix Iodine Laser System

2003 ◽  
Vol 21 (4) ◽  
pp. 511-516 ◽  
Author(s):  
T. DESAI ◽  
D. BATANI ◽  
A. BERNARDINELLO ◽  
G. POLETTI ◽  
F. ORSINI ◽  
...  
Keyword(s):  
Caenorhabditis Elegans ◽  
Atomic Force Microscope ◽  
Laser System ◽  
Laser Wavelength ◽  
X Rays ◽  
Contact Mode ◽  
Iodine Laser ◽  
X Ray ◽  
Atomic Force ◽  
Multicellular Organisms

Soft X-ray contact microscopy (SXCM) experiments have been performed using the Prague Asterix Iodine Laser System (PALS). Laser wavelength and pulse duration were λ = 1.314 μm and τ (FWHM) = 450 ps, respectively. Pulsed X rays were generated using teflon, gold, and molybdenum targets with laser intensities I ≥ 1014 W/cm2. Experiments have been performed on the nematodes Caenorhabditis elegans. Images were recorded on PMMA photo resists and analyzed using an atomic force microscope operating in contact mode. Our preliminary results indicate the suitability of the SXCM for multicellular specimens.

X-ray holographic microscopy by means of photoresist recording and atomic-force microscope readout

1996 ◽  
Vol 13 (9) ◽  
pp. 1788 ◽  
Author(s):  
Steve Lindaas ◽  
Chris Jacobsen ◽  
Alex Kalinovsky ◽  
Malcolm Howells
Keyword(s):  
Atomic Force Microscope ◽  
X Ray ◽  
Atomic Force ◽  
Holographic Microscopy

scholarly journals Local detection of X-ray spectroscopies with an in-situ Atomic Force Microscope

2008 ◽  
Vol 3 (12) ◽  
pp. P12004-P12004 ◽  
Author(s):  
M S Rodrigues ◽  
O Dhez ◽  
S Le Denmat ◽  
J Chevrier ◽  
R Felici ◽  
...  
Keyword(s):  
Atomic Force Microscope ◽  
X Ray ◽  
Atomic Force ◽  
Local Detection

Study on Nano-SiO2 Measured by Atomic Force Microscope

2011 ◽  
Vol 399-401 ◽  
pp. 2130-2133
Author(s):  
Zhang Jing ◽  
Qi Zhi Cao ◽  
Jian Ying Li
Keyword(s):  
Atomic Force Microscope ◽  
Physical Mechanism ◽  
Structural Evolution ◽  
Particle Growth ◽  
Experimental Results ◽  
Particle Sizes ◽  
X Ray Diffraction ◽  
X Ray ◽  
Atomic Force ◽  
Different Temperatures

The morphology and structural evolution of nano-SiO2powers obtained by pressuring samples and sintering in muffle at different temperatures were studied by X-ray diffraction (XRD) and atomic force microscope (AFM). The experimental results show that the particle sizes of nano-SiO2increase with temperature rising, and it meets the physical mechanism of particle growth.

Comparison of Etch Pit Shapes on Off-Oriented 4H-SiC Using Different Halogen Gases

2013 ◽  
Vol 740-742 ◽  
pp. 589-592
Author(s):  
Tomoaki Hatayama ◽  
Tetsuya Tamura ◽  
Hiroshi Yano ◽  
Takashi Fuyuki
Keyword(s):  
Atomic Force Microscope ◽  
Atomic Force Microscope Image ◽  
Mixed Gas ◽  
Cross Sectional ◽  
X Ray ◽  
Microscope Image ◽  
Etch Pit ◽  
Atomic Force ◽  
Dislocation Type ◽  
The Cross

An etch pit shape of off-angled 4H-SiC Si-face formed by different halogen gases such as chlorine trifluoride (ClF3) and a mixed gas (O2+Cl2) of oxygen and chlorine in nitrogen (N2) ambience has been studied. One kind of etch pit with the crooked hexagon was formed at etching temperature under 500oC. The angle of etch pit measured by the cross-sectional atomic force microscope image was about 10o from the [11-20] view. A dislocation type of the etch pit was discussed in comparison with the etch pit shape and an X-ray topography image.

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