High electron mobility transistors (HEMTs) have been
developed based on InAlAs/InGaAs heterostructures on an InP
substrate, with a transconductance of about 1000 mS/mm, a
reverse breakdown voltage of more than 10 V and a unity-gain cutoff frequency is 140 GHz. In addition, HEMT transistors based
on AlGaAs/InGaAs/GaAs heterostructures on a GaAs substrate
with double gate recessing technology have been developed. This
transistors demonstrate a maximum measured transconductance
of the current-voltage characteristic of 520 mS/mm, a maximum
drain current of 670 mA/mm, and a gate-drain breakdown voltage
of 14 V and a unity-gain cut-off frequency is 120 GHz. Due to the
increased breakdown voltage, the developed transistors have been
used in monolithic integrated circuits of millimeter-wave power
amplifiers with an output power of more than 110 mW.