Structural and mechanical properties of a-axis AlN thin films growth using reactive RF magnetron sputtering plasma

2021 ◽  
Vol ahead-of-print (ahead-of-print) ◽  
Author(s):  
Anis Suhaili Bakri ◽  
Nafarizal Nayan ◽  
Chin Fhong Soon ◽  
Mohd Khairul Ahmad ◽  
Ahmad Shuhaimi Abu Bakar ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Young’S Modulus ◽  
Plasma Deposition ◽  
Young's Modulus ◽  
Rf Magnetron Sputtering ◽  
Content Type ◽  
Sputtering Deposition ◽  
Atomic Force

Purpose This paper aims to report the influence of sputtering plasma deposition time on the structural and mechanical properties of the a-axis oriented aluminium nitride (AlN) thin films. Design/methodology/approach The AlN films were prepared using RF magnetron sputtering plasma on a silicon substrate without any external heating with various deposition times. The films were characterized using X-ray diffraction (XRD), field-emission scanning electron microscope (FESEM), atomic force microscope (AFM) and nanoindentation techniques. Findings The XRD results show that the AlN thin films are highly oriented along the (100) AlN plane at various deposition times indicating the a-axis preferred orientation. All the AlN thin films exhibit hexagonal AlN with a wurtzite structure. The hardness and Young’s modulus of AlN thin films with various deposition times were measured using a nanoindenter. The measured hardness of the AlN films on Si was in the range of 14.1 to 14.7 GPa. The surface roughness and the grain size measured using the AFM revealed that both are dependent on the deposition times. Originality/value The novelty of this work lies with a comparison of hardness and Young’s modulus result obtained at different sputtering deposition temperature. This study also provides the relation of AlN thin films’ crystallinity with the hardness of the deposited films.

Mechanical Properties of Poly 3C-SiC Thin Films According to Carrier Gas (H2) Concentration

2008 ◽  
Vol 600-603 ◽  
pp. 867-870
Author(s):  
Gwiy Sang Chung ◽  
Ki Bong Han
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Mechanical Properties ◽  
Surface Roughness ◽  
Atomic Force Microscope ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Carrier Gas ◽  
Nano Indentation ◽  
Atomic Force

This paper presents the mechanical properties of 3C-SiC thin film according to 0, 7, and 10 % carrier gas (H2) concentrations using Nano-Indentation. When carrier gas (H2) concentration was 10 %, it has been proved that the mechanical properties, Young’s Modulus and Hardness, of 3C-SiC are the best of them. In the case of 10 % carrier gas (H2) concentration, Young’s Modulus and Hardness were obtained as 367 GPa and 36 GPa, respectively. When the surface roughness according to carrier gas (H2) concentrations was investigated by AFM (atomic force microscope), when carrier gas (H2) concentration was 10 %, the roughness of 3C-SiC thin was 9.92 nm, which is also the best of them. Therefore, in order to apply poly 3C-SiC thin films to MEMS applications, carrier gas (H2) concentration’s rate should increase to obtain better mechanical properties and surface roughness.

Microstructure and Mechanical Properties of Laminated Buckypaper/SiC Composite

2015 ◽  
Vol 816 ◽  
pp. 147-151
Author(s):  
Xing Li ◽  
Peng Xiao Huang ◽  
Hui Peng ◽  
Ying Zhou
Keyword(s):  
Mechanical Properties ◽  
Fracture Toughness ◽  
Magnetron Sputtering ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Rf Magnetron Sputtering ◽  
Crack Deflection ◽  
Nanoindentation Testing ◽  
Microstructure And Mechanical Properties

The laminated Buckypaper/SiC composite was prepared by RF magnetron sputtering. For comparison, the monolithic SiC was also prepared in the present study. The microstructure and morphology of the prepared samples were characterized by SEM and XRD. The Young’s modulus, hardness and stiffness of the samples were investigated by nanoindentation testing. The results showed that the Buckypaper/SiC composite had an obviously multilayered microstructure at the nanoscale. Furthermore, the fracture toughness of the laminated Buckypaper/SiC composite could be improved by crack deflection and platelet pullout mechanisms. The laminated Buckypaper/SiC composite had higher Young’s modulus and stiffness than that of the monolithic SiC. However, its hardness was lower than that of monolithic SiC.

Hardness and Young's modulus of amorphous a-SiC thin films determined by nanoindentation and bulge tests

1994 ◽  
Vol 9 (1) ◽  
pp. 96-103 ◽  
Author(s):  
M.A. El Khakani ◽  
M. Chaker ◽  
A. Jean ◽  
S. Boily ◽  
J.C. Kieffer ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Silicon Carbide ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Chemical Vapor ◽  
Free Standing ◽  
Film Composition ◽  
Sputtering Deposition ◽  
Sic Films

Due to its interesting mechanical properties, silicon carbide is an excellent material for many applications. In this paper, we report on the mechanical properties of amorphous hydrogenated or hydrogen-free silicon carbide thin films deposited by using different deposition techniques, namely plasma enhanced chemical vapor deposition (PECVD), laser ablation deposition (LAD), and triode sputtering deposition (TSD). a-SixC1−x: H PECVD, a-SiC LAD, and a-SiC TSD thin films and corresponding free-standing membranes were mechanically investigated by using nanoindentation and bulge techniques, respectively. Hardness (H), Young's modulus (E), and Poisson's ratio (v) of the studied silicon carbide thin films were determined. It is shown that for hydrogenated a-SixC1−x: H PECVD films, both hardness and Young's modulus are dependent on the film composition. The nearly stoichiometric a-SiC: H films present higher H and E values than the Si-rich a-SixC1−x: H films. For hydrogen-free a-SiC films, the hardness and Young's modulus were as high as about 30 GPa and 240 GPa, respectively. Hydrogen-free a-SiC films present both hardness and Young's modulus values higher by about 50% than those of hydrogenated a-SiC: H PECVD films. By using the FTIR absorption spectroscopy, we estimated the Si-C bond densities (NSiC) from the Si-C stretching absorption band (centered around 780 cm−1), and were thus able to correlate the observed mechanical behavior of a-SiC films to their microstructure. We indeed point out a constant-plus-linear variation of the hardness and Young's modulus upon the Si-C bond density, over the NSiC investigated range [(4–18) × 1022 bond · cm−3], regardless of the film composition or the deposition technique.

scholarly journals Characterisation of the Material and Mechanical Properties of Atomic Force Microscope Cantilevers with a Plan-View Trapezoidal Geometry

2019 ◽  
Vol 9 (13) ◽  
pp. 2604 ◽  
Author(s):  
Ashley D. Slattery ◽  
Adam J. Blanch ◽  
Cameron J. Shearer ◽  
Andrew J. Stapleton ◽  
Renee V. Goreham ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Atomic Force Microscope ◽  
Young’S Modulus ◽  
Correction Factor ◽  
Young's Modulus ◽  
Spring Constant ◽  
Beam Equation ◽  
Euler Beam ◽  
Plan View ◽  
Atomic Force

Cantilever devices have found applications in numerous scientific fields and instruments, including the atomic force microscope (AFM), and as sensors to detect a wide range of chemical and biological species. The mechanical properties, in particular, the spring constant of these devices is crucial when quantifying adhesive forces, material properties of surfaces, and in determining deposited mass for sensing applications. A key component in the spring constant of a cantilever is the plan-view shape. In recent years, the trapezoidal plan-view shape has become available since it offers certain advantages to fast-scanning AFM and can improve sensor performance in fluid environments. Euler beam equations relating cantilever stiffness to the cantilever dimensions and Young’s modulus have been proven useful and are used extensively to model cantilever mechanical behaviour and calibrate the spring constant. In this work, we derive a simple correction factor to the Euler beam equation for a beam-shaped cantilever that is applicable to any cantilever with a trapezoidal plan-view shape. This correction factor is based upon previous analytical work and simplifies the application of the previous researchers formula. A correction factor to the spring constant of an AFM cantilever is also required to calculate the torque produced by the tip when it contacts the sample surface, which is also dependent on the plan-view shape. In this work, we also derive a simple expression for the torque for triangular plan-view shaped cantilevers and show that for the current generation of trapezoidal plan-view shaped AFM cantilevers, this will be a good approximation. We shall apply both these correction factors to determine Young’s modulus for a range of trapezoidal-shaped AFM cantilevers, which are specially designed for fast-scanning. These types of AFM probes are much smaller in size when compared to standard AFM probes. In the process of analysing the mechanical properties of these cantilevers, important insights are also gained into their spring constant calibration and dimensional factors that contribute to the variability in their spring constant.

Determination of mechanical properties of FFF 3D printed material by assessing void volume fraction, cooling rate and residual thermal stresses

2019 ◽  
Vol 25 (10) ◽  
pp. 1661-1683 ◽  
Author(s):  
Rafael Quelho de Macedo ◽  
Rafael Thiago Luiz Ferreira ◽  
Kuzhichalil Jayachandran
Keyword(s):  
Mechanical Properties ◽  
Cooling Rate ◽  
Young’S Modulus ◽  
Thermal Stresses ◽  
Volume Fraction ◽  
Young's Modulus ◽  
Void Volume Fraction ◽  
Void Volume ◽  
Temperature Fields ◽  
Content Type

Purpose This paper aims to present experimental and numerical analyses of fused filament fabrication (FFF) printed parts and show how mechanical characteristics of printed ABS-MG94 (acrylonitrile butadiene styrene) are influenced by the void volume fraction, cooling rate and residual thermal stresses. Design/methodology/approach Printed specimens were experimentally tested to evaluate the mechanical properties for different printing speeds, and micrographs were taken. A thermo-mechanical finite element model, able to simulate the FFF process, was developed to calculate the temperature fields in time, cooling rate and residual thermal stresses. Finally, the experimental mechanical properties and the microstructure distribution could be explained by the temperature fields in time, cooling rate and residual thermal stresses. Findings Micrographs revealed the increase of void volume fraction with the printing speed. The variations on voids were associated to the temperature fields in time: when the temperatures remained high for longer periods, less voids were generated. The Young's Modulus of the deposited filament varied according to the cooling rate: it decreased when the cooling rate increased. The influence of the residual thermal stresses and void volume fraction on the printed parts failure was also investigated: in the worst scenarios evaluated, the void volume fraction reduced the strength in 9 per cent, while the residual thermal stresses reduced it in 3.8 per cent. Originality/value This work explains how the temperature fields can affect the void volume fraction, Young's Modulus and failure of printed parts. Experimental and numerical results are shown. The presented research can be used to choose printing parameters to achieve desired mechanical properties of FFF printed parts.

Synthesis and Characterization of Nb-Doped TiO2 Thin Films Prepared by RF Magnetron Sputtering

2015 ◽  
Vol 1117 ◽  
pp. 139-142 ◽  
Author(s):  
Marius Dobromir ◽  
Radu Paul Apetrei ◽  
A.V. Rogachev ◽  
Dmitry L. Kovalenko ◽  
Dumitru Luca
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Photoelectron Spectroscopy ◽  
Rf Magnetron Sputtering ◽  
X Ray ◽  
Force Microscopy ◽  
Glass Substrates ◽  
Atomic Force ◽  
Vis Spectroscopy ◽  
Diffraction Patterns

Amorphous Nb-doped TiO2 thin films were deposited on (100) Si and glass substrates at room temperature by RF magnetron sputtering and a mosaic-type Nb2O5-TiO2 sputtering target. To adjust the amount of the niobium dopant in the film samples, appropriate numbers of Nb2O5 pellets were placed on the circular area of the magnetron target with intensive sputtering. By adjusting the discharge conditions and the number of niobium oxide pellets, films with dopant content varying between 0 and 16.2 at.% were prepared, as demonstrated by X-ray photoelectron spectroscopy data. The X-ray diffraction patterns of the as-deposited samples showed the lack of crystalline ordering in the samples. Surfaces roughness and energy band gap values increase with dopant concentration, as showed by atomic force microscopy and UV-Vis spectroscopy measurements.

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