Impact of gate-to-contact spacing on ESD performance of salicided deep submicron NMOS transistors

2002 ◽  
Vol 49 (12) ◽  
pp. 2183-2192 ◽  
Author(s):  
Kwang-Hoon Oh ◽  
C. Duvvury ◽  
K. Banerjee ◽  
R.W. Dutton
Author(s):  
Kim Ho Yeap ◽  
Jor Gie Liew ◽  
Siu Hong Loh ◽  
Humaira Nisar ◽  
Zairi Ismael Rizman

2000 ◽  
Vol 44 (7) ◽  
pp. 1239-1245 ◽  
Author(s):  
N. Lukyanchikova ◽  
N. Garbar ◽  
M. Petrichuk ◽  
E. Simoen ◽  
C. Claeys

2002 ◽  
Vol 49 (12) ◽  
pp. 2171-2182 ◽  
Author(s):  
Kwang-Hoon Oh ◽  
C. Duvvury ◽  
K. Banerjee ◽  
R.W. Dutton

Author(s):  
Sweta Pendyala ◽  
Dave Albert ◽  
Katherine Hawkins ◽  
Michael Tenney

Abstract Resistive gate defects are unusual and difficult to detect with conventional techniques [1] especially on advanced devices manufactured with deep submicron SOI technologies. An advanced localization technique such as Scanning Capacitance Imaging is essential for localizing these defects, which can be followed by DC probing, dC/dV, CV (Capacitance-Voltage) measurements to completely characterize the defect. This paper presents a case study demonstrating this work flow of characterization techniques.


Author(s):  
Cha-Ming Shen ◽  
Yen-Long Chang ◽  
Lian-Fon Wen ◽  
Tan-Chen Chuang ◽  
Shi-Chen Lin ◽  
...  

Abstract Highly-integrated radio frequency and mixed-mode devices that are manufactured in deep-submicron or more advanced CMOS processes are becoming more complex to analyze. The increased complexity presents us with many eccentric failure mechanisms that are uniquely different from traditional failure mechanisms found during failure analysis on digital logic applications. This paper presents a novel methodology to overcome the difficulties and discusses two case studies which demonstrate the application of the methodology. Through the case studies, the methodology was proven to be a successful approach. It is also proved how this methodology would work for such non-recognizable failures.


Sign in / Sign up

Export Citation Format

Share Document