Low Thermal Budget Fabrication and Performance Comparison of MFM Capacitors With Thermal and Plasma-Enhanced Atomic Layer Deposited Hf $_{{0.45}}$ Zr $_{{0.55}}$ O $ₓ$ Ferroelectrics

2021 ◽  
pp. 1-6
Author(s):  
Dong-Qi Xiao ◽  
Bin-Bin Luo ◽  
Wen Xiong ◽  
Xiaohan Wu ◽  
David Wei Zhang ◽  
...  
Keyword(s):  
Atomic Layer ◽  
Performance Comparison ◽  
Thermal Budget ◽  
And Performance ◽  
Low Thermal Budget

Fabrication and Performance of InAlN/GaN-on-Si MOSHEMTs with LaAlO3 Gate Dielectric Using Gate-First CMOS Compatible Process at Low Thermal Budget

2014 ◽  
Vol 61 (4) ◽  
pp. 271-280 ◽  
Author(s):  
M. K. Bera ◽  
Y. Liu ◽  
L. M. Kyaw ◽  
Y. J. Ngoo ◽  
S. P. Singh ◽  
...  
Keyword(s):  
Gate Dielectric ◽  
Thermal Budget ◽  
Cmos Compatible ◽  
And Performance ◽  
Gan On Si ◽  
Low Thermal Budget

Atomic layer deposited TiN capping layer for sub-10 nm ferroelectric Hf0.5Zr0.5O2 with large remnant polarization and low thermal budget

2021 ◽  
Vol 570 ◽  
pp. 151152
Author(s):  
Chin-I Wang ◽  
Chun-Yuan Wang ◽  
Teng-Jan Chang ◽  
Yu-Sen Jiang ◽  
Jing-Jong Shyue ◽  
...  
Keyword(s):  
Remnant Polarization ◽  
Atomic Layer ◽  
Thermal Budget ◽  
Capping Layer ◽  
Low Thermal Budget ◽  
Large Remnant Polarization

Low Thermal Budget Heteroepitaxial Gallium Oxide Thin Films Enabled by Atomic Layer Deposition

2020 ◽  
Vol 12 (39) ◽  
pp. 44225-44237
Author(s):  
Elham Rafie Borujeny ◽  
Oles Sendetskyi ◽  
Michael D. Fleischauer ◽  
Kenneth C. Cadien
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Gallium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Thermal Budget ◽  
Layer Deposition ◽  
Low Thermal Budget

scholarly journals Si surface passivation by Al2O3 thin films deposited using a low thermal budget atomic layer deposition process

2013 ◽  
Vol 102 (13) ◽  
pp. 131603 ◽  
Author(s):  
G. Seguini ◽  
E. Cianci ◽  
C. Wiemer ◽  
D. Saynova ◽  
J. A. M. van Roosmalen ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Surface Passivation ◽  
Atomic Layer ◽  
Deposition Process ◽  
Thermal Budget ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition ◽  
Low Thermal Budget
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