Chemical mechanical polishing: the impact of a new technology on an industry

Author(s):  
K.A. Perry
2001 ◽  
Vol 40 (Part 2, No. 8B) ◽  
pp. L857-L860 ◽  
Author(s):  
Jea-Gun Park ◽  
Takeo Katoh ◽  
Hyung-Chul Yoo ◽  
Jin-Hyung Park

2007 ◽  
Vol 124-126 ◽  
pp. 29-32
Author(s):  
Nam Hoon Kim ◽  
Hae Young Yoo ◽  
Eui Goo Chang

The ambient and denuded trench top corner at the step of gate oxidation play an important role to generate defect. Furthermore, dislocation-free flash process is proposed, and its mechanism as well. The impact on dislocation of the other processes is also discussed. And we knew that using of dry oxidation for gate oxide has the characteristic to reduce the dislocation. Consequently, the dislocation free wafer is obtained by changing gate oxide from wet to dry in manufacturing embedded flash.


Author(s):  
Yanfeng Zhang ◽  
Haiyang Yu ◽  
Xiaoxue Tang ◽  
Xue Kong ◽  
Xing'ai Li ◽  
...  

Abstract Sapphire substrates with different orientations have wide applications due to their excellent physical, chemical and optical properties. However, the chemical mechanical polishing of sapphire is challenging due to its chemical inertness, extreme hardness and brittleness. Herein, chemical mechanical polishing of A- and C-plane sapphire was systematically studied using α-Al2O3 and silica abrasives and polishing mechanism was analyzed by X-ray photoemission spectroscopy (XPS) and nanoindentation meter. The high MRR selectivity for C-plane sapphire in α-Al2O3 slurry is the synergy of selective hydration of C-plane and stronger crystal structure of A-plane. The low MRR selectivity for C-plane sapphire in silica slurry can be attributed to the formation of Al2SiO5 on both planes which reduced the impact of strong mechanical effect of α-Al2O3 abrasives. To improve the MRR of A-plane sapphire, a new nanocomposite particle with alumina as the core and silica as the soft shell was prepared by an electrostatic self-assembly method. The new composite abrasives combined the mechanical effect of α-Al2O3 abrasives and chemical effect of silica abrasives and demonstrated substantially higher MRR for A-plane sapphire than pure alumina abrasives, pure silica abrasives and physical mixture of alumina+silica abrasives.


2008 ◽  
Vol 600-603 ◽  
pp. 827-830
Author(s):  
Kung Yen Lee ◽  
Wen Zhou Chen ◽  
Michael A. Capano

In this article, the correlation of surface morphological defects and barrier-height inhomogeneities with the electrical characteristics of defective 4H-SiC Schottky barrier diodes (SBDs) before and after chemical-mechanical polishing (CMP) is investigated. The forward characteristics, an ideality factor and a single barrier height of a SBD, remain the same after CMP, so that CMP does not affect SBD characteristics. Most barrier-height inhomogeneities are eliminated or improved after CMP. Therefore, leakage current induced by barrier-height inhomogeneities are improved by CMP as well. In addition, about 40% of SBDs with carrots inside the active areas exhibits double barriers before CMP. This excludes that carrots are a cause of barrier-height inhomogeneities. In reverse-bias mode, CMP reduces reverse leakage current at low bias and increases breakdown voltage due to the reduction of thermionic field emission and elimination of local enhanced electric fields.


2016 ◽  
Vol 1 (4) ◽  
pp. 150
Author(s):  
Veton Zejnullahi

The process of globalization, which many times is considered as new world order is affecting all spheres of modern society but also the media. In this paper specifically we will see the impact of globalization because we see changing the media access to global problems in general being listed on these processes. We will see that the greatest difficulties will have small media as such because the process is moving in the direction of creating mega media which thanks to new technology are reaching to deliver news and information at the time of their occurrence through choked the small media. So it is fair to conclude that the rapid economic development and especially the technology have made the world seem "too small" to the human eyes, because for real-time we will communicate with the world with the only one Internet connection, and also all the information are take for the development of events in the four corners of the world and direct from the places when the events happen. Even Albanian space has not left out of this process because the media in the Republic of Albania and the Republic of Kosovo are adapted to the new conditions under the influence of the globalization process. This fact is proven powerful through creating new television packages, written the websites and newspapers in their possession.


Author(s):  
Jianwei Zhou ◽  
Wei Zheng ◽  
Taekoo Lee

Abstract Multi-Chip Package (MCP) decapsulation is now becoming a rising problem. Because for traditional decapsulation method, acid can’t dissolve the top silicon die to expose the bottom die surface in MCP. It makes inspecting the bottom die in MCP is difficult. In this paper, a new MCP decapsulation technology combining mechanical polishing with chemical etching is introduced. This new technology can remove the top die quickly without damaging the bottom die using KOH and Tetra-Methyl Ammonium Hydroxide (TMAH). The technology process and relative application are presented. The factors that affect the KOH and TMAH etch rate are studied. The usage difference between the two etchant is discussed.


2019 ◽  
pp. 33-41
Author(s):  
V. L. Harutyunyan ◽  
S. V. Dokholyan ◽  
A. R. Makaryan

The presented study discusses the issues of applying the Common Customs Tariff (CCT) rates of the Eurasian Economic Union (EAEU) on rough diamonds and the impact thereof on the exports of stones cut and polished inArmeniaand then exported toRussia.Aim. The study aims to identify the possible strategies Armenian diamond cutting and polishing companies could adopt as a response to the application of the CCT rates on rough diamonds and how it would affect exports to various destinations, namely to Russia.Tasks. The authors analyze the current state of the gems and jewelry sector and substantiate the need to either integrate it into the jewelry manufacturing sector or to apply various strategies to facilitate exports to either Russia or other destinations in the medium term in response to the application of the CCT rates.Methods. This study uses general scientific methods of cognition, including analytical and methodological approaches and elements of forecasting. Possible strategies the Armenian diamond cutting and polishing companies could adopt in the medium term in response to the application of the EAEU CCT rates are determined using the analytical research method, forecasts in the context of the developments in the Armenian gem processing and jewelry market and global trends, statistical data on the imports and exports of cut and polished gems and jewelry for 2014–2018 published by the UN Comtrade Statistics.Results. Statistics on the exports of processed diamonds from 2014 to 2018 highlights the issue associated with the loss of competitiveness suffered by Armenian companies (mainly in comparison with Indian diamond cutters). The major global trends in the diamond cutting and polishing business indicate that it could be virtually impossible for Armenian cutters and polishers to compete with Indian companies in the medium term if they do not comes to investing in new technology to achieve operational efficiency. For these companies, it is important not to lose the Russian market due to an increase in the tariff rate and concentrate on the processing of gems that are larger than 1 carat. Another strategy to avoid an increase in the customs tariff rates would depend on the Armenian government’s ability to negotiate with Russia in respect of direct imports of diamond stones from Russian manufactures. Two other options for Armenian cutters involve focusing on cutting and polishing of rubies, sapphires, emeralds, etc. or integrating into the jewelry sector either by being the primary supplier or by considering this business as a channel to sell processed diamond stones by setting up their own jewelry manufacturing companies.Conclusions. With CCT going into effect in January 2021 and India’s dominant role in the diamond cutting and polishing business, Armenia needs to carefully consider all of the strategies the Armenian companies could adopt, as discussed above. As a member state of the EAEU, Armenia freely exports to Russia, however, further exports to Russia would depend on Armenia’s ability to ensure that cost-effective operations are in place, or to concentrate on the processing of precious gems rather than diamonds, or to switch to the manufacturing of jewelry items as a major export item.Practical Implication. The findings of this study could be of interest to the Ministry of Economy of the Republic of Armenia and Business Armenia that could be used in elaborating the strategy for the development of Armenian gems and jewelry sector of the economy.


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