Development of a Laser Based Dual-Axial Five-Degrees-of-Freedom Measurement System for an X-Y Stage
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The One
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This paper presents a new precision multi-DOF measurement system which has been developed and implemented for the simultaneous measurement of 5DOF motion errors (two linear positions, as well as pitch, roll and yaw) of an X-Y stage. In this paper, the 3DOF laser interferometer was produced by designing the optical path from the one-degrees-of-freedom laser interferometer. The system employs two three-degree-of-freedom interferometers to detect two position errors and three angular errors of the X-Y stage. The experimental setups and measuring procedure and a systematic calculated method for the error verification are presented in the paper. The resolution of measuring the angular errors component is about 0.055 arcsec.
1988 ◽
Vol 110
(2)
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pp. 168-174
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1966 ◽
Vol 88
(3)
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pp. 283-294
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2018 ◽
Vol 15
(4)
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pp. 172988141879592
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