Manufacture of Microcantilever Sensors

Author(s):  
Andrew W. McFarland ◽  
Jonathan S. Colton ◽  
Daniel Cox ◽  
Steven Y. Liang

Mechanical micro machining is an emerging technology with many potential benefits and equally great challenges. The push to develop processes and tools capable of micro scale fabrication is a result of the widespread drive to reduce part and feature size. One important factor that contributes to the ability to machine at the microscale level is the overall size of the machine tool due to the effects of thermal, static, and dynamic stabilities. This paper explores the technical feasibility of miniaturized machine tools capable of fabricating features and parts on the micro scale in terms of depth of cut and part form accuracy. It develops a machine tool and examines its capabilities through benchmarking tests and the making of precision dies for the injection molding of microcantilever parts. The design and configuration of a miniaturized vertical machining center of overall dimension less than 300 mm on a side is presented and the component specifications discussed. The six axis machine has linear positioning resolution of 4 nm by 10 nm by 10 nm, with accuracy on the order of 0.3 μm, in the height, feed, and cross feed directions. The work volume as defined by the ranges of axes travel are 4 mm by 25 mm by 25 mm in the height, feed, and cross feed and 20 degrees in the rotational space. To quantify the performance capability of the miniaturized machine tool as a system, a series of evaluation tests were implemented based on linear and arch trajectories over a range of feed speed and depth of cut conditions. Test results suggest that micro level form accuracy and sub-micron level finish are generally achievable for parts with moderate curvature and gradient in the geometry under selected machining parameters and conditions. An injection mold was made of steel with this machine and plastic microcantilevers fabricated. Plastic microcantilevers are appropriate for sensing applications such as surface probe microscopy. The microcantilevers, made from polystyrene, were 464 to 755 μm long, 130 μm wide and only 6–9 μm thick. They showed very good uniformity, reproducibility, and appropriate mechanical response for use as sensors in surface force microscopy.

Technologies ◽  
2021 ◽  
Vol 9 (4) ◽  
pp. 69
Author(s):  
Michael Johanes ◽  
Manoj Gupta

In recent times, an alternative synthesis pathway involving severe plastic deformation for Mg-based materials has been explored involving the generation of turnings according to a set of machining parameters and cold compaction into billets followed by hot extrusion. This is known as the turning induced deformation (TID) method and has shown potential to alter the properties of resulting Mg-based materials for the better, not to mention economic benefits arising from this processing method. This work summarizes exploratory efforts involving this method for synthesis of Mg-based materials. The TID method resulted in overall superior properties compared to conventional processing methods, while two distinct parameters (high depth of cut and low cutting speed) were found to have significant positive influence on the final material properties, and as such are considered to be suitable basis on which further exploratory work in this field may be conducted.


2009 ◽  
Vol 69-70 ◽  
pp. 128-132
Author(s):  
Ming Li Zhao ◽  
Bo Zhao ◽  
Yu Qing Wang ◽  
Guo Fu Gao

The orthogonal test of surface roughness in ultrasonic polishing nano-ZrO2 ceramics was carried out in the present paper. Through the test, the influence of machining parameters on the surface roughness was investigated. The test results showed that the influence of abrasive size on surface roughness is the most remarkable, and the other important factors are the depth of cut, on/off work situation of ultrasonic generator, axial feed speed, and working table speed in turns. Furthermore, through the regressive analysis of test data, an empirical formula of surface roughness was established to select reasonable polishing parameters.


2010 ◽  
Vol 458 ◽  
pp. 331-336
Author(s):  
Wei Min Gan ◽  
Xi Lian Xie ◽  
Bo Xu ◽  
W.B. Huang

For hard machining metal materials with high rigidity,high strength or high toughness, the method of electrochemical mechanical complex machining is proposed. A NC high-speed machine tool for carving and milling is transformed into a NC electrochemical mechanical complex machine tool in which complex tool-electrodes, particular tool holders, a new rotary table, a protective flume for electrolyte and pipelines are made and assembled, so that machine tool can achieve a series of machining, such as milling, drilling, grinding and polishing by utilizing complex tool-electrode motion generated by NC. For 304 stainless steel orthogonal experiment is carried out, and five principal process parameters that are spindle rev, feed speed, voltage, pressure of electrolyte and depth of cut, are investigating in the method of NC Electrochemical Mechanical complex machining. The optimization process parameters are obtained.


Micromachines ◽  
2019 ◽  
Vol 10 (5) ◽  
pp. 312 ◽  
Author(s):  
Pablo Fook ◽  
Daniel Berger ◽  
Oltmann Riemer ◽  
Bernhard Karpuschewski

Metallic implants were the only option for both medical and dental applications for decades. However, it has been reported that patients with metal implants can show allergic reactions. Consequently, technical ceramics have become an accessible material alternative due to their combination of biocompatibility and mechanical properties. Despite the recent developments in ductile mode machining, the micro-grinding of bioceramics can cause insufficient surface and subsurface integrity due to the inherent hardness and brittleness of these materials. This work aims to determine the influence on the surface and subsurface damage (SSD) of zirconia-based ceramics ground with diamond wheels of 10 mm diameter with a diamond grain size (dg) of 75 μm within eight grinding operations using a variation of the machining parameters, i.e., peripheral speed (vc), feed speed (vf), and depth of cut (ae). In this regard, dental thread structures were machined on fully sintered zirconia (ZrO2), alumina toughened zirconia (ATZ), and zirconia toughened alumina (ZTA) bioceramics. The ground workpieces were analysed through a scanning electron microscope (SEM), X-ray diffraction (XRD), and white light interferometry (WLI) to evaluate the microstructure, residual stresses, and surface roughness, respectively. Moreover, the grinding processes were monitored through forces measurement. Based on the machining parameters tested, the results showed that low peripheral speed (vc) and low depth of cut (ae) were the main conditions investigated to achieve the optimum surface integrity and the desired low grinding forces. Finally, the methodology proposed to investigate the surface integrity of the ground workpieces was helpful to understand the zirconia-based ceramics response under micro-grinding processes, as well as to set further machining parameters for dental implant threads.


2011 ◽  
Vol 188 ◽  
pp. 542-548 ◽  
Author(s):  
Jie Liu

High-speed machining requires the support of high intelligent CAM software as well as customized machining strategies and properly selected machining parameters. Only by combining the two can the advantage of high-speed machining be made full use of. Compared to ordinary NC cutting, high-speed machining has special requirements for process strategies, CAM system and tool path. A complete tool path includes approaching/retracting tool, moving tool and tool path. Based on the above principles, a mould part is successfully processed using the PowerMILL software at the high-speed machining centre of DMG-DMU40T. The maximum hardness of the mould part is HRC50. There’s a 30 degree corner in the cavity with a transition radius of 3mm. The whole process can be divided into three stages: rough, semi-finish and finish machining and each stage involves the selection of tool path, the selection of tool, the selection of cutting parameters (including spindle speed, feed speed and depth of cut), and the application of PowerMILL specific machining methods (such as Race-line machining, rest roughing, automatic trochoidal machining, 3D offset finishing and etc).


2016 ◽  
Vol 686 ◽  
pp. 155-160
Author(s):  
Marcel Kuruc ◽  
Juraj Vagovský ◽  
Jozef Peterka

Poly-crystalline cubic boron nitride (PCBN) is one of the hardest known material. Therefore only advanced methods are able to treat such material. Advanced machining methods, proper for machining of hard and brittle materials (such as glass and ceramics) include rotary ultrasonic machining (RUM). However, high hardness of workpiece cause higher loads and it could negatively affect achievable accuracy and surface topography. Machine loads are affected by both: machined material and machining parameters. This contribution investigates influence of machining parameters, such as spindle speed, feed rate and depth of cut, on loads of machine tool during machining of PCBN by rotary ultrasonic machining.


1980 ◽  
Vol 102 (4) ◽  
pp. 297-302 ◽  
Author(s):  
R. A. Wysk ◽  
M. M. Barash ◽  
C. M. Moodie

In most metal cutting or removing facilities, the task of planning piece part operations and sequences is the responsibility of the process planner. Although this individual holds the key to the profitability of a specific product, little has been done to aid the process planner in the performance of his job. With the cost of machinery skyrocketing as the degree of automation is increasing, much emphasis has been placed on process planning or engineering. This paper outlines the responsibilities and functions carried out by the process planner. The paper is primarily concerned with automated manufacturing systems and, in particular, the planning of parts on machining centers. It demonstrates the decisions required of process planner and the lack of quantifiable data available to make logical decisions at the present time. A review of the two approaches to automated process planning, called variant and generative planning, is presented. The paper also describes some of the shortcomings of classification codes that have been used for automated process planning. The framework for a computer generative process planning scheme is demonstrated. The selection of machining parameters (feed, speed and depth of cut) are also discussed.


2021 ◽  
Author(s):  
Adeniyi Adeleke ◽  
Abou-El-Hossein Khaled ◽  
Odedeyi Peter

Abstract The desire for quality infrared lens with better surface finish has brought about the usage of brittle materials like germanium to be machined via a single point diamond turning machining process. However, achieving the required surface finish is complex if special machining techniques and approaches are not employed. In this paper, the effect of two different tool nose radius parameters on surface roughness of single point diamond turned germanium workpiece were studied and analyzed. The machining parameters selected for this experiment were feed, speed and depth of cut. Box-Behnken design was adopted to optimally create a combination of cutting parameters. Measurement of surface roughness after each run in both experiments was achieved using a Taylor Hobson PGI Dimension XL surface Profilometer. The resulting outcomes show that at most experimental runs, the surface roughness value decreased with an increase in nose radius. Mean absolute error was also used to compare the accuracy validation of the two models.


2014 ◽  
Vol 627 ◽  
pp. 54-59 ◽  
Author(s):  
R. Ravikumar ◽  
M. Mohamed Abdul Hafeez

CNC turning is one among the metal cutting process in which quality of the finished product depends mainly upon the machining parameters such as feed, speed, depth of cut, type of coolant used, types of inserts used etc. Similarly the work piece material plays an important role in metal cutting process. This study involves in indentifying the optimized parameters in CNC turning of Brass. To identify and measure the formation of burrs in the turned samples, are examined under scanning electron microscope (SEM). The optimization techniques used in this study are Response surface methodology, and Genetic algorithm. Several comparisons were made between cutting parameters with surface roughness. These optimization techniques are very helpful in indentifying the optimized control factors with high level of accuracy.


Micromachines ◽  
2021 ◽  
Vol 12 (7) ◽  
pp. 755
Author(s):  
Chen-Yang Zhao ◽  
Chi-Fai Cheung ◽  
Wen-Peng Fu

In this paper, an investigation of cutting strategy is presented for the optimization of machining parameters in the ultra-precision machining of polar microstructures, which are used for optical precision measurement. The critical machining parameters affecting the surface generation and surface quality in the machining of polar microstructures are studied. Hence, the critical ranges of machining parameters have been determined through a series of cutting simulations, as well as cutting experiments. First of all, the influence of field of view (FOV) is investigated. After that, theoretical modeling of polar microstructures is built to generate the simulated surface topography of polar microstructures. A feature point detection algorithm is built for image processing of polar microstructures. Hence, an experimental investigation of the influence of cutting tool geometry, depth of cut, and groove spacing of polar microstructures was conducted. There are transition points from which the patterns of surface generation of polar microstructures vary with the machining parameters. The optimization of machining parameters and determination of the optimized cutting strategy are undertaken in the ultra-precision machining of polar microstructures.


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