Thermal Analysis of MEMS Actuator Performance

Author(s):  
Harita Machiraju ◽  
Bill Infantolino ◽  
Bahgat Sammakia ◽  
Michael Deeds

A MEMS based device consisting of microactuators was modeled using finite element analysis. The temperature profile of the complete package was obtained and compared to experimental measurements. Good agreement was found between the modeling and measurements. Parametric studies of potential design parameters of the chip package to decrease the power requirements to the actuators have been studied. Increasing the gap between the handle layer and the device layer of the SOI (silicon on insulator) chip from 2 to 3 microns resulted in a reduction of 10% (0.2 Watts) per beam of the actuator. A glass top chip proved to be better at reducing the power requirements for the actuators when compared to a silicon top chip. Modeling shows that relief cuts in the substrate had a larger effect on the power reduction compared to those on the top chip since the heat conduction path to the substrate is a lower resistance path. The power reduction was as high as 50% (1.1 Watts) per beam of the actuator, when the relief cut in the substrate was 50 microns.

2013 ◽  
Vol 684 ◽  
pp. 290-294
Author(s):  
Hui Lu ◽  
Li Jun Zhang ◽  
Zhan Qi Zheng ◽  
Yi Heng Zhang ◽  
Yong Qing Leng

In this paper, we report the experimental measurements of the group index of a photonic crystal waveguide based on silicon-on-insulator slab. The time-delay of the pulse is also measured, and it is in good agreement with the theoretical result calculated according to the group index with the phase-delay method, which is about 4.7ps.


1993 ◽  
Vol 66 (5) ◽  
pp. 733-741 ◽  
Author(s):  
A. N. Gent ◽  
Y-W. Chang

Abstract The stiffness of rubber-filled hinges for small rotations of the hinge plates has been determined by finite element analysis (FEA). The rubber is assumed to be linearly elastic and virtually incompressible, and the hinge is assumed to be long enough for the rubber to be in a state of plane strain, i.e., prevented from any displacement parallel to the hinge. Results have been obtained for hinges of a wide range of unstrained angle, ranging from 5° up to 360°. The calculated stiffnesses for long hinges vary by over four orders of magnitude over this range. For small angles, an approximate solution has been obtained by direct analysis—it is in good agreement with the FEA solution for hinge angles up to about 40°. Experimental measurements on several rubber-filled hinges are also reported. The measured rotational stiffnesses are in satisfactory agreement with theoretical predictions. Because a rubber-filled hinge constitutes a possible test method for bond strength, conditions are derived for bond rupture as a hinge is strained open.


1982 ◽  
Vol 9 (3) ◽  
pp. 399-412 ◽  
Author(s):  
William Chung-Ping Lau ◽  
John L. Dawe

A finite element technique based on an incremental tangent stiffness method is employed herein to analyze the behavior of welded truss connections subjected to combined tension and shear. A computer program named ELAPLAS (ELAsto-PLAStic finite element analysis) is developed to simulate the load–deformation behavior and to predict the ultimate tensile capacity of a structural tee in a welded truss joint subjected to a prescribed transverse shear load. Analytical studies were carried out to investigate the interaction of tension and shear in welded truss connections. The analytical results obtained are compared with available test data to verify the validity of the proposed finite element technique. Results of parametric studies are presented to illustrate the significance of various design parameters in welded truss connections. Such parameters as material properties, thickness variations of structural tee web and flange, and the truss configurations are investigated. As a result of the present work, simple interaction equations of combined tension and shear are developed and suggested for design office use.


Author(s):  
E. F. Joubaneh ◽  
O. R. Barry ◽  
D. C. D. Oguamanam

This paper presents experimental and numerical analyses of a vibrating sandwich beam with a tip mass. The mathematical formulation is based on higher order sandwich panel theory (HSAPT) and the governing equations of motion and boundary conditions are obtained using Hamilton’s principle. General Differential Quadrature (GDQ) is employed to solve the system governing equations of motion. Experiments are carried out to validate the proposed formulation and the results show very good agreement. Parametric studies are conducted to investigate the influence of key design parameters on the natural frequency and vibration response of the system.


2014 ◽  
Vol 8 (2) ◽  
pp. 222-230 ◽  
Author(s):  
Mohamed Najib Ribuan ◽  
◽  
Koichi Suzumori ◽  
Shuichi Wakimoto

This paper describes a new pneumatic rubber leg mechanism for omnidirectional locomotion. The new mechanism was adopted from a pneumatic balloon actuator where translation and bending motions are produced as a result of balloon deformation. It was constructed using five chambers: one on the top and centered over four bottom chambers arranged in a square. Several possible designs were simulated to achieve the optimal design using a non-linear finite element analysis that considered the design parameters and the geometrical and material non-linearity of the elements. Prototyping was then performed using a rapid and efficient silicone rubber molding fabrication process based on computer-aided design and manufacturing. The experimental results were in good agreement with the analytical results. In conclusion, we have established a new rubber leg mechanism with a high degree of freedom to realize omnidirectional locomotion for a soft robot base, delicate object conveyance, and / or microscope stage applications.


1989 ◽  
Vol 17 (2) ◽  
pp. 86-99 ◽  
Author(s):  
I. Gardner ◽  
M. Theves

Abstract During a cornering maneuver by a vehicle, high forces are exerted on the tire's footprint and in the contact zone between the tire and the rim. To optimize the design of these components, a method is presented whereby the forces at the tire-rim interface and between the tire and roadway may be predicted using finite element analysis. The cornering tire is modeled quasi-statically using a nonlinear geometric approach, with a lateral force and a slip angle applied to the spindle of the wheel to simulate the cornering loads. These values were obtained experimentally from a force and moment machine. This procedure avoids the need for a costly dynamic analysis. Good agreement was obtained with experimental results for self-aligning torque, giving confidence in the results obtained in the tire footprint and at the rim. The model allows prediction of the geometry and of the pressure distributions in the footprint, since friction and slip effects in this area were considered. The model lends itself to further refinement for improved accuracy and additional applications.


Author(s):  
Yasunori Goto ◽  
Hiroomi Eguchi ◽  
Masaru Iida

Abstract In the automotive IC using thick-film silicon on insulator (SOI) semiconductor device, if the gettering capability of a SOI wafer is inadequate, electrical characteristics degradation by metal contamination arises and the yield falls. At this time, an automotive IC was made experimentally for evaluation of the gettering capability as one of the purposes. In this IC, one of the output characteristics varied from the standard, therefore failure analysis was performed, which found trace metal elements as one of the causes. By making full use of 3D perspective, it is possible to fabricate a site-specific sample into 0.1 micrometre in thickness without missing a failure point that has very minute quantities of contaminant in a semiconductor device. Using energy dispersive X-ray, it is possible to detect trace metal contamination at levels 1E12 atoms per sq cm. that are conventionally detected only by trace element analysis.


2020 ◽  
Vol 14 ◽  
Author(s):  
Osama Bedair

Background: Modular steel buildings (MSB) are extensively used in petrochemical plants and refineries. Limited guidelines are available in the industry for analysis and design of (MSB) subject to accidental vapor cloud explosions (VCEs). Objectives: The paper presents simplified engineering model for modular steel buildings (MSB) subject to accidental vapor cloud explosions (VCEs) that are extensively used in petrochemical plants and refineries. Method: A Single degree of freedom (SDOF) dynamic model is utilized to simulate the dynamic response of primary building components. Analytical expressions are then provided to compute the dynamic load factors (DLF) for critical building elements. Recommended foundation systems are also proposed to install the modular building with minimum cost. Results: Numerical results are presented to illustrate the dynamic response of (MSB) subject to blast loading. It is shown that (DLF)=1.6 is attained at (td/t)=0.4 for front wall (W1) with (td/T)=1.25. For side walls (DLF)=1.41 and is attained at (td/t)=0.6. Conclusions: The paper presented simplified tools for analysis and design of (MSB) subject accidental vapor cloud blast explosions (VCEs). The analytical expressions can be utilized by practitioners to compute the (MSB) response and identify the design parameters. They are simple to use compared to Finite Element Analysis.


2021 ◽  
Vol 11 (13) ◽  
pp. 6094
Author(s):  
Hubdar Hussain ◽  
Xiangyu Gao ◽  
Anqi Shi

In this study, detailed finite element analysis was conducted to examine the seismic performance of square and circular hollow steel braces under axial cyclic loading. Finite element models of braces were constructed using ABAQUS finite element analysis (FEA) software and validated with experimental results from previous papers to expand the specimen’s matrix. The influences of cross-section shape, slenderness ratio, and width/diameter-to-thickness ratio on hysteretic behavior and compressive-tensile strength degradation were studied. Simulation results of parametric studies show that both square and circular hollow braces have a better cyclic performance with smaller slenderness and width/diameter-to-thickness ratios, and their compressive-tensile resistances ratio significantly decreases from cycle to cycle after the occurrence of the global buckling of braces.


Author(s):  
Fatih Güven

Gears are commonly used in transmission systems to adjust velocity and torque. An integral gear or an interference fit could be used in a gearbox. Integral gears are mostly preferred as driving gear for a compact design to reduce the weight of the system. Interference fit makes the replacement of damaged gear possible and re-use of the shaft compared to the integral shaft. However, internal pressure occurs between mating surfaces of the components mated. This internal pressure affects the stress distribution at the root and bottom land of the gear. In this case, gear parameters should be re-considered to assure gear life while reducing the size of the gear. In this study, interference fitted gear-shaft assembly was examined numerically. The effects of rim thickness, profile shifting, module and fit tolerance on bending stress occurring at the root of the gear were investigated to optimize gear design parameters. Finite element models were in good agreement with analytical solutions. Results showed that the rim thickness of the gear is the main parameter in terms of tangential stress occurring at the bottom land of the gear. Positive profile shifting reduces the tangential stress while the pitch diameter of the gear remains constant. Also, lower tolerance class could be selected to moderate stress for small rim thickness.


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