Multiscale Modeling of Heat Transfer in a Thermal Sensing Atomic Force Microscope
Keyword(s):
Gas Flow
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Thermal Sensing Atomic Force Microscope (TSAFM) systems utilize heat transfer in continuum and low-speed rarefied gas flow regimes to perform topological surface scans. Spanning flow regimes complicates the modeling required to analyze scan data. In this paper we present a hybrid Octant Flux Splitting IP-DSMC/BEM model of the steady state heat transfer from a TSFAM cantilever and compare with the uncorrected continuum solution as well as a macro model developed for this problem.
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1993 ◽
Vol 36
(8)
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pp. 2135-2145
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2012 ◽
Vol 532-533
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pp. 417-421
1983 ◽
pp. 623-648
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2013 ◽
Vol 13
(5)
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pp. 1330-1356
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2000 ◽
pp. 1033-1040
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