Friction Behavior of CMP Slurries Based on Novel Organic Particles

2005 ◽  
Author(s):  
Yuzhuo Li ◽  
Ning Wang
Keyword(s):  
Removal Rate ◽  
Dielectric Materials ◽  
Friction Behavior ◽  
Abrasive Particles ◽  
Added Benefit ◽  
Increasing Demand ◽  
Organic Particles ◽  
Physical And Chemical ◽  
The Impact ◽  
First Time

With the integration of copper as interconnect and low k materials as dielectric, the CMP community is facing an ever increasing demand on reducing defectivity without scarifying production throughput. One such strategy is to significantly lower the polishing pressure to below 1 psi. Such a move has placed tremendous challenges to the tool manufactures, consumable suppliers (especially the slurry vendors), and end-users. It is a challenge to remain the high throughput (MRR and selectivity) at low down force without using harsh abrasives. For the first time, we recently report the use of novel hydrophilic organic particles for metal CMP. Unlike conventional abrasive particles such silica or alumina, these unique particles are designed to specifically interact with the metal surface to be polished and significantly modify the rheological behavior of the slurry. The obvious advantage of using such particles is the reduction of defects during CMP. The consequence of using such particles is also its ability to provide unsurpassed high selectivity in removal rate for copper over barrier and dielectric materials due to their weak interaction with these particles. The added benefit for slurry that uses such particles is to allow CMP process conducted at a lower down force without compromising the throughput. In this talk, some basic physical and chemical characteristics of the particles and slurry will be first presented. The friction beavior of these new slurries in relation to conventional slurries on blanket wafers will be discussed. The impact of particle hydrophobicity on the friction behviors of the slurries will be explored.

Novel Pure Organic Particles for Copper CMP at Low Down Force

2004 ◽  
Vol 816 ◽  
Author(s):  
K. Cheemalapati ◽  
A. Chowdhury ◽  
V. Duvvuru ◽  
Yong Lin ◽  
Kwok Tang ◽  
...  
Keyword(s):  
Removal Rate ◽  
Particle Surface ◽  
Dielectric Materials ◽  
Abrasive Particles ◽  
Patterned Wafers ◽  
Copper Cmp ◽  
Low Sensitivity ◽  
Organic Particles ◽  
Physical And Chemical ◽  
First Time

AbstractIt is generally accepted that there is a minimum hardness requirement for abrasive particles to be used in CMP (Chemical Mechanical Polishing) slurries. For copper CMP, the common abrasives are various types of alumina and silica. It has also long been suspected that a softer organic based abrasive could significant reduce the defects during polishing. In this study, for the first time, we demonstrated the usefulness of an organic particle as abrasive in formulating copper CMP slurry. The unexpected consequence of using such soft hydrophilic particles is its low sensitivity of material removal rate for copper towards polishing down force and platen speed. In addition, due to its unique particle surface properties, the slurry gives high selectivity in removal rate for copper over barrier, cap, and dielectric materials. In this paper, some basic physical and chemical characteristics of the particles and slurry will be first presented. The performance of this new slurry in relation to conventional slurries on blanket and patterned wafers will be discussed.

Investigations on Machining of Monel 400 Alloys Using Electrochemical Machining with Sodium Nitrate as Electrolyte

2014 ◽  
Vol 592-594 ◽  
pp. 467-472 ◽  
Author(s):  
M. Kalaimathi ◽  
G. Venkatachalam ◽  
Neil Pradeep Makhijani ◽  
Ankit Agrawal ◽  
M. Sivakumar
Keyword(s):  
Process Parameters ◽  
Sodium Nitrate ◽  
Removal Rate ◽  
Electrochemical Machining ◽  
Research Field ◽  
Electrode Gap ◽  
Conventional Machine ◽  
Monel 400 ◽  
Physical And Chemical ◽  
The Impact

Monel 400 is a cuprous nickel alloy which is very well-known for its resistivity towards physical and chemical strength. It is probably one of the hardest and most non-corrosive materials known in industrial as well as research field. These properties have enhanced its applications in various fields such as aerospace industries, marine industries, automotive industries etc. Monel 400 alloys are too hard to machine using conventional machine tools and methods as it work hardens rapidly on its surface. Authors concluded that electrochemical machining is the choice of machining of these materials. The present work is carried out to analyze the impact of ECM process parameters such as applied voltage (V), inter-electrode gap (IEG) and electrolyte concentration (EC) on material removal rate (MRR) and surface roughness (Ra). An aqueous sodium nitrate (NaNO3) is used as basic electrolyte in the electrochemical machining of Monel 400 alloys. Response surface methodology (RSM) based central composite design (CCD) is used as experimental strategy. Effects of process parameters as well as their interactions are analysed and the process parameters are optimized.

THE IMPACT OF UKRAINE'S EXCISE DUTY POLICY ON THE TRANSFORMATION PROCESSES OF THE TOBACCO MARKET

2020 ◽  
Vol 2020 (10) ◽  
pp. 19-33
Author(s):  
Nadiia NOVYTSKA ◽  
◽  
Inna KHLIEBNIKOVA ◽  
Keyword(s):  
Structural Changes ◽  
Tax Avoidance ◽  
Transformation Process ◽  
State Regulation ◽  
Tobacco Products ◽  
Excise Duty ◽  
Increasing Demand ◽  
High Level ◽  
The Impact ◽  
Transformation Processes

The market of tobacco products in Ukraine is one of the most dynamic and competitive. It develops under the influence of certain factors that cause structural changes, therefore, the aim of the article is to conduct a comprehensive analysis of transformation processes in the market of tobacco and their alternatives in Ukraine and identify the factors that cause them. The high level of tax burden and the proliferation of alternative products with a potentially lower risk to human health, including heating tobacco products and e-cigarettes, are key factors in the market’s transformation process. Their presence leads to an increase in illicit turnover of tobacco products, which accounts for 6.37% of the market, and the gradual replacement of cigarettes with alternative products, which account for 12.95%. The presence on the market of products that are not taxed or taxed at lower rates is one of the reasons for the reduction of excise duty revenues. According to the results of 2019, the planned indicators of revenues were not met by 23.5%. Other reasons for non-fulfillment of excise duty revenues include: declining dynamics of the tobacco products market; reduction in the number of smokers; reorientation of «cheap whites» cigarette flows from Ukraine to neighboring countries; tax avoidance. Prospects for further research are identified, namely the need to develop measures for state regulation and optimization of excise duty taxation of tobacco products and their alternatives, taking into account the risks to public health and increasing demand of illegal products.

Relationship between big five personality model and abusive supervision

2019 ◽  
Vol 12 (2) ◽  
Author(s):  
Bibi Tahira ◽  
Naveed Saif ◽  
Muhammad Haroon ◽  
Sadaqat Ali
Keyword(s):  
Big Five ◽  
Abusive Supervision ◽  
State Universities ◽  
Big Five Personality ◽  
Big Five Model ◽  
The Impact ◽  
First Time ◽  
Supervisor Behavior ◽  
Moderating Role

The current study tries to understand the diverse nature of relationship between personality Big Five Model (PBFM) and student's perception of abusive supervision in higher education institutions of Khyber Pakhtoonkhwa Pakistan. Data was collected in dyads i.e. (supervisors were asked to rate their personality attributes while student were asked to rate the supervisor behavior) through adopted construct. For this purpose, data was collected from three government state universities and one Private Sector University. The focus was on MS/M.Phill and PhD student and their supervisors of the mentioned universities. After measuring normality and validity regression analysis was conducted to assess the impact of supervisor personality characteristics that leads to abusive supervision. Findings indicate interestingly that except agreeableness other four attributes of (PBFM) are play their role for abusive supervision. The results are novel in the nature as for the first time Neuroticism, openness to experience, extraversion and conscientiousness are held responsible for the abusive supervision. The study did not explore the demographic characteristics, and moderating role of organizational culture, justice and interpersonal deviances to understand the strength of relationship in more detail way. Keywords: Personality big five model, abusive supervision, HEIs

The Influence of TRIPS Compliant Patent Laws on Indian Pharmaceutical Industry

2014 ◽  
Vol 4 (1) ◽  
Author(s):  
Rupesh Rastogi ◽  
Virendra Kumar
Keyword(s):  
Pharmaceutical Industry ◽  
Patent Protection ◽  
Uruguay Round ◽  
Pharmaceutical Products ◽  
Trips Agreement ◽  
Patent Law ◽  
Patent Laws ◽  
The Impact ◽  
First Time ◽  
Indian Pharmaceutical Industry

The first legislation in India relating to patents was the Act VI of 1856. The Indian Patents and Design Act, 1911 (Act II of 1911) replaced all the previous Acts. The Act brought patent administration under the management of Controller of Patents for the first time. After Independence, it was felt that the Indian Patents & Designs Act, 1911 was not fulfilling its objective. Various comities were constituted to recommend, framing a patent law which can fulfill the requirement of Indian Industry and people. The Indian Patent Act of 1970 was enacted to achieve the above objectives. The major provisions of the act, provided for process, not the product patents in food, medicines, chemicals with a term of 14 years and 5-7 for chemicals and drugs. The Act enabled Indian citizens to access cheapest medicines in the world and paved a way for exponential growth of Indian Pharmaceutical Industry. TRIPS agreement, which is one of the important results of the Uruguay Round, mandated strong patent protection, especially for pharmaceutical products, thereby allowing the patenting of NCEs, compounds and processes. India is thereby required to meet the minimum standards under the TRIPS Agreement in relation to patents and the pharmaceutical industry. India’s patent legislation must now include provisions for availability of patents for both pharmaceutical products and processes inventions. The present paper examines the impact of change in Indian Patent law on Pharmaceutical Industry.

The impact of traditional plants and their secondary metabolites in the discovery of COVID-19 treatment

2020 ◽  
Vol 26 ◽  
Author(s):  
Shabana Bibi ◽  
Ayesha Sarfraz ◽  
Ghazala Mustafa ◽  
Zeeshan Ahmed ◽  
Muhammad Aurang Zeb ◽  
...  
Keyword(s):  
Secondary Metabolites ◽  
Test System ◽  
Chemical Information ◽  
System Type ◽  
The Family ◽  
Comprehensive Search ◽  
Coronavirus Infection ◽  
The Impact ◽  
First Time ◽  
Plant Sources

Background: Coronavirus Disease-2019 belongs to the family of viruses which cause a serious pneumonia along with fever, breathing issues and infection of lungs for the first time in China and later spread worldwide. Objective: Several studies and clinical trials have been conducted to identify potential drugs and vaccines for Coronavirus Disease-2019. The present study listed natural secondary metabolites identified from plant sources with antiviral properties and could be safer and tolerable treatment for Coronavirus Disease-2019. Methods: A comprehensive search on the reported studies was conducted using different search engine such as Google scholar, SciFinder, Sciencedirect, Medline PubMed, and Scopus for the collection of research articles based on plantderived secondary metabolites, herbal extracts, and traditional medicine for coronavirus infections. Results: Status of COVID-19 worldwide and information of important molecular targets involved in COVID-19 is described and through literature search, is highlighted that numerous plant species and their extracts possess antiviral properties and studied with respect to Coronavirus treatments. Chemical information, plant source, test system type with mechanism of action for each secondary metabolite is also mentioned in this review paper. Conclusion: The present review has listed plants that have presented antiviral potential in the previous coronavirus pandemics and their secondary metabolites which could be significant for the development of novel and a safer drug which could prevent and cure coronavirus infection worldwide.

Individual and Combined Assessment of Ser680Asn FSH Receptor and FSHβ -211 G>T Gene Polymorphisms in Ovarian Response in IVF/ICSI Program

2020 ◽  
Vol 21 ◽  
Author(s):  
Elli Anagnostou ◽  
Alexia Kafkoutsou ◽  
Despina Mavrogianni ◽  
Ekaterini Domali ◽  
Evangelia Dimitroulia ◽  
...  
Keyword(s):  
Gene Polymorphism ◽  
Gene Polymorphisms ◽  
Ovarian Response ◽  
Greek Population ◽  
Control Group ◽  
Genotype Distribution ◽  
Β Subunit ◽  
Molecular Genetic Study ◽  
The Impact ◽  
First Time

Background: Molecular biology tools, such as the detection of single nucleotide polymorphisms (SNPs), have been considered to assist to the management of the ovarian stimulation protocols. Purpose: The aim of this study was to evaluate the impact of two polymorphisms, the Asn680Ser polymorphism of the FSHR gene, and the FSH β subunit (FSHβ) gene polymorphism -211 G>T, in a Greek population of women undergoing IVF/ICSI program in our center. In addition, a control group of fertile women was studied, to verify whether there are differences in the genotype distribution between fertile and infertile population for both polymorphisms, as the FSHβ gene polymorphism -211 G>T is studied for the first time in the Greek population. Results : The FSH β-211 G>T polymorphism, studied for the first time in the Greek infertile population, appears to be quite rare. When studying the two polymorphisms separately, statistically significant differences were obtained that concerned the LH levels. Discussion: According to the combination analysis of the two polymorphisms by the number of alleles, women with 2-3 polymorphic alleles needed more days of stimulation, but there were no differences in pregnancy rates. Conclusion: This molecular genetic study helps to elucidate whether the polygenic combination of the Asn680Ser and FSH β subunit -211 G>T gene polymorphisms is of additive value in the prediction of ovarian response to exogenous gonadotropins.

THE IMPACT OF PHYSICAL AND CHEMICAL WEATHERING ON IRON SLAG FROM STANDISH, NY

2019 ◽  
Author(s):  
Maria L. Leonard ◽  
◽  
Rachel M. Kelk ◽  
Dori J. Farthing
Keyword(s):  
Chemical Weathering ◽  
Iron Slag ◽  
Physical And Chemical ◽  
The Impact

Reconstituting the International, 1918–1923

2017 ◽  
Author(s):  
Talbot C. Imlay
Keyword(s):  
Seismic Events ◽  
Great War ◽  
Bolshevik Revolution ◽  
Meaning And Purpose ◽  
Post War ◽  
The Impact ◽  
First Time ◽  
The Great War ◽  
Do So ◽  
Lengthy Process

This chapter examines the post-war efforts of European socialists to reconstitute the Socialist International. Initial efforts to cooperate culminated in an international socialist conference in Berne in February 1919 at which socialists from the two wartime camps met for the first time. In the end, however, it would take four years to reconstitute the International with the creation of the Labour and Socialist International (LSI) in 1923. That it took so long to do so is a testimony to the impact of the Great War and to the Bolshevik revolution. Together, these two seismic events compelled socialists to reconsider the meaning and purpose of socialism. The search for answers sparked prolonged debates between and within the major parties, profoundly reconfiguring the pre-war world of European socialism. One prominent stake in this lengthy process, moreover, was the nature of socialist internationalism—both its content and its functioning.

scholarly journals Autism Tsunami: the Impact of Rising Prevalence on the Societal Cost of Autism in the United States

2021 ◽  
Author(s):  
Mark Blaxill ◽  
Toby Rogers ◽  
Cynthia Nevison
Keyword(s):  
Forecast Model ◽  
The United States ◽  
Population Projections ◽  
Base Case ◽  
Prevention Strategies ◽  
Total Base ◽  
Cost Categories ◽  
The Cost ◽  
The Impact ◽  
First Time

AbstractThe cost of ASD in the U.S. is estimated using a forecast model that for the first time accounts for the true historical increase in ASD. Model inputs include ASD prevalence, census population projections, six cost categories, ten age brackets, inflation projections, and three future prevalence scenarios. Future ASD costs increase dramatically: total base-case costs of $223 (175–271) billion/year are estimated in 2020; $589 billion/year in 2030, $1.36 trillion/year in 2040, and $5.54 (4.29–6.78) trillion/year by 2060, with substantial potential savings through ASD prevention. Rising prevalence, the shift from child to adult-dominated costs, the transfer of costs from parents onto government, and the soaring total costs raise pressing policy questions and demand an urgent focus on prevention strategies.

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