Two-dimensional atomic force microprobe trench metrology system

1991 ◽  
Vol 9 (6) ◽  
pp. 3612 ◽  
Author(s):  
D. Nyyssonen
Keyword(s):  
Two Dimensional ◽  
Atomic Force ◽  
Metrology System

scholarly journals Tip-Based Nanomachining on Thin Films: A Mini Review

2021 ◽  
Author(s):  
Shunyu Chang ◽  
Yanquan Geng ◽  
Yongda Yan
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Data Storage ◽  
Three Dimensional ◽  
Maintenance Cost ◽  
Two Dimensional ◽  
Force Microscopy ◽  
Atomic Force ◽  
Current State ◽  
Two Dimensional Materials

AbstractAs one of the most widely used nanofabrication methods, the atomic force microscopy (AFM) tip-based nanomachining technique offers important advantages, including nanoscale manipulation accuracy, low maintenance cost, and flexible experimental operation. This technique has been applied to one-, two-, and even three-dimensional nanomachining patterns on thin films made of polymers, metals, and two-dimensional materials. These structures are widely used in the fields of nanooptics, nanoelectronics, data storage, super lubrication, and so forth. Moreover, they are believed to have a wide application in other fields, and their possible industrialization may be realized in the future. In this work, the current state of the research into the use of the AFM tip-based nanomachining method in thin-film machining is presented. First, the state of the structures machined on thin films is reviewed according to the type of thin-film materials (i.e., polymers, metals, and two-dimensional materials). Second, the related applications of tip-based nanomachining to film machining are presented. Finally, the current situation of this area and its potential development direction are discussed. This review is expected to enrich the understanding of the research status of the use of the tip-based nanomachining method in thin-film machining and ultimately broaden its application.

scholarly journals Dielectric Function of AlN Grown on Si (111) by MBE

1999 ◽  
Vol 572 ◽  
Author(s):  
Stefan Zollner ◽  
Atul Konkar ◽  
R. B. Gregory ◽  
S. R. Wilson ◽  
S. A. Nikishin ◽  
...  
Keyword(s):  
Molecular Beam ◽  
Buffer Layers ◽  
Two Dimensional ◽  
X Ray Diffraction ◽  
Growth Morphology ◽  
X Ray ◽  
Force Microscopy ◽  
Atomic Force ◽  
Dimensional Growth ◽  
Peak Widths

ABSTRACTWe measured the ellipsometric response from 0.7–5.4 eV of c-axis oriented AlN on Si (111) grown by molecular beam epitaxy. We determine the film thicknesses and find that for our AlN the refractive index is about 5–10% lower than in bulk AlN single crystals. Most likely, this discrepancy is due to a low film density (compared to bulk AlN), based on measurements using Rutherford backscattering. The films were also characterized using atomic force microscopy and x-ray diffraction to study the growth morphology. We find that AlN can be grown on Si (111) without buffer layers resulting in truely two-dimensional growth, low surface roughness, and relatively narrow x-ray peak widths.

GROWTH AND SURFACE MORPHOLOGY OF {101} CLEAVAGE PLANES OF L-ARGININE TRIFLUOROACETATE CRYSTALS

2007 ◽  
Vol 14 (03) ◽  
pp. 439-444 ◽  
Author(s):  
Z. H. SUN ◽  
D. XU ◽  
G. W. YU ◽  
G. H. ZHANG ◽  
X. Q. WANG ◽  
...  
Keyword(s):  
Surface Morphology ◽  
Grown Crystal ◽  
Two Dimensional ◽  
Nonlinear Optical Material ◽  
X Ray ◽  
Cell Parameters ◽  
Force Microscopy ◽  
Atomic Force ◽  
Growth Method ◽  
Temperature Solution

Single crystals of nonlinear optical material, L-arginine trifluoroacetate (abbreviated as LATF), were grown from an aqueous solution by the low temperature solution growth method. The cell parameters of the grown crystal were determined by the X-ray powder diffraction analysis. Atomic force microscopy (AFM) was used to investigate the surface morphology of {101} cleavage faces of LATF. Straight steps and two-dimensional nuclei were observed. Liquid inclusions and impurities as defects for revealing macrosteps were demonstrated. The molecular structure and crystal structure correlative with surface morphology were discussed.

Morphology of Silver Thin Films Deposited on TiO2(110) Surfaces

1998 ◽  
Vol 05 (01) ◽  
pp. 387-392 ◽  
Author(s):  
D. Abriou ◽  
D. Gagnot ◽  
J. Jupille ◽  
F. Creuzet
Keyword(s):  
Photoelectron Spectroscopy ◽  
Room Temperature ◽  
Oxygen Vacancies ◽  
Two Dimensional ◽  
Silver Films ◽  
X Ray ◽  
Force Microscopy ◽  
Atomic Force ◽  
Silver Deposits ◽  
Silver Thin Films

The growth mode of silver films deposited at room temperature on TiO 2(110) surfaces has been examined by means of atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS) in ultrahigh vacuum (UHV) conditions, On clean vacancy-free TiO 2(110) surfaces, 0.1-nm-thick (on average) Ag deposits form a two-dimensional (2D) layer. When the thickness of the silver overlayer is increased, 3D clusters are shown to appear while the 2D film is preserved, furthermore, the influence of surface oxygen vacancies on the growth of Ag/TiO 2(110) is evidenced by well-characterized differences in the morphology of 9-nm-thick silver deposits.

Corrigendum to “Atomic force microscopy for two-dimensional materials: A tutorial review” [Opt. Commun. 406 (2018) 3–17]

2018 ◽  
Vol 421 ◽  
pp. 134
Author(s):  
Hang Zhang ◽  
Junxiang Huang ◽  
Yongwei Wang ◽  
Rui Liu ◽  
Xiulan Huai ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Two Dimensional ◽  
Force Microscopy ◽  
Atomic Force ◽  
Two Dimensional Materials

Imaging Two-dimensional Crystals of Catalase by Atomic Force Microscopy

1996 ◽  
Vol 35 (Part 1, No. 12A) ◽  
pp. 6233-6238 ◽  
Author(s):  
Satomi Ohnishi ◽  
Masahiko Hara ◽  
Taiji Furuno ◽  
Hiroyuki Sasabe
Keyword(s):  
Atomic Force Microscopy ◽  
Two Dimensional ◽  
Force Microscopy ◽  
Atomic Force

GROWTH HILLOCKS ON THE {100} FACES OF L-ARGININE PHOSPHATE MONOHYDRATE SINGLE CRYSTALS INVESTIGATED BY ATOMIC FORCE MICROSCOPY

2004 ◽  
Vol 11 (01) ◽  
pp. 71-75
Author(s):  
Y. L. GENG ◽  
D. XU ◽  
D. L. SUN ◽  
X. Q. WANG ◽  
G. H. ZHANG ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Stress Field ◽  
Single Crystals ◽  
Liquid Flow ◽  
Two Dimensional ◽  
Characteristic Structure ◽  
Force Microscopy ◽  
Atomic Force ◽  
Dislocation Sources ◽  
Extra Stress

Growth hillocks on the {100} faces of L-arginine phosphate monohydrate (LAP) single crystals grown at 25°C and at a supersaturation of 0.32 have been discussed. The typical dislocation growth hillocks are lopsided and elongate along the b direction. The dislocation sources are probably caused by the extra stress field which is introduced by the hollow cavities distributing on the steps and hillocks generated by the two-dimensional nucleus. The elongated shape is due to the characteristic structure of the LAP crystal. Apart from that, the formation of the lopsided growth hillocks is explained by the liquid flow theory.

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