Numerical study of heat transport in thermally isolated flow-rate microsensors
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The temperature distributions in thermally isolated cantilever based flow-rate microsensors have been numerically calculated for different gas temperatures and gas velocities. In particular, we investigate the efficiency of heat transfer to the flowing gas and corresponding directions of heat flow in the system. The above analysis is based on a solution to the energy equation under appropriate boundary conditions. The equation was discretized using a control volume procedure, based on which an equivalent circuit was devised and subsequently simulated using a circuit simulator such as SPICE.
2016 ◽
Vol 831
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pp. 83-91
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2021 ◽
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1966 ◽
Vol 11
(3)
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pp. 153-155
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2016 ◽
Vol 59
(10)
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pp. 1517-1523
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