Preparation of high-oriented molybdenum thin films using DC reactive magnetronsputtering

2017 ◽  
Vol 31 (07) ◽  
pp. 1750059 ◽  
Author(s):  
Zhengguo Shang ◽  
Dongling Li ◽  
She Yin ◽  
Shengqiang Wang
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Surface Roughness ◽  
Process Parameters ◽  
Gas Flow ◽  
Lattice Mismatch ◽  
Practical Significance ◽  
Process Time ◽  
Process Conditions ◽  
Influence Of Process Parameters

Since molybdenum (Mo) thin film has been used widely recently, it attracts plenty of attention, like it is a good candidate of back contact material for CuIn[Formula: see text]Ga[Formula: see text]Se[Formula: see text]S[Formula: see text] (CIGSeS) solar cells development; thanks to its more conductive and higher adhesive property. Besides, molybdenum thin film is an ideal material for aluminum nitride (AlN) thin film preparation and attributes to the tiny (−1.0%) lattice mismatch between Mo and AlN. As we know that the quality of Mo thin film is mainly dependent on process conditions, it brings a practical significance to study the influence of process parameters on Mo thin film properties. In this work, various sputtering conditions are employed to explore the feasibility of depositing a layer of molybdenum film with good quality by DC reactive magnetron sputtering. The influence of process parameters such as power, gas flow, substrate temperature and process time on the crystallinity and crystal orientation of Mo thin films is investigated. X-ray diffraction (XRD) measurements and atomic force microscope (AFM) are used to characterize the properties and surface roughness, respectively. According to comparative analysis on the results, process parameters are optimized. The full width at half maximum (FWHM) of the rocking curves of the (110) Mo is decreased to 2.7[Formula: see text], and the (110) Mo peaks reached [Formula: see text] counts. The grain size and the surface roughness have been measured as 20 Å and 3.8 nm, respectively, at 200[Formula: see text]C.

Phenethylammonium bismuth halides: from single crystals to bulky-organic cation promoted thin-film deposition for potential optoelectronic applications

2019 ◽  
Vol 7 (36) ◽  
pp. 20733-20741 ◽  
Author(s):  
Mehri Ghasemi ◽  
Miaoqiang Lyu ◽  
Md Roknuzzaman ◽  
Jung-Ho Yun ◽  
Mengmeng Hao ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Surface Roughness ◽  
Single Crystals ◽  
Organic Cation ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Optoelectronic Applications ◽  
Excellent Stability

The phenethylammonium cation significantly promotes the formation of fully-covered thin-films of hybrid bismuth organohalides with low surface roughness and excellent stability.

An Investigation into Surface Roughness of Burnished Hypereutectic Al-Si Alloy Based on the Taguchi Techniques

2004 ◽  
Vol 471-472 ◽  
pp. 790-794 ◽  
Author(s):  
Li Fa Han ◽  
Wei Xia ◽  
Yuan Yuan Li ◽  
Wei Ping Chen
Keyword(s):  
Mathematical Model ◽  
Surface Roughness ◽  
Process Parameters ◽  
Orthogonal Experiment ◽  
Optimum Process ◽  
Light Weight ◽  
Resistant Material ◽  
Influence Of Process Parameters ◽  
Small Surface ◽  
Burnishing Process

This paper presents an investigation on the surface roughness of burnished hypereutectic Al-Si alloy ¾ a widely used light-weight and wear resistant material in automobile, electric and aircraft industries. Based on the techniques of Taguchi, an orthogonal experiment plan with the analysis of variance (ANOVA) is performed and a second-order regressive mathematical model is established. Meanwhile, the influence of process parameters on surface roughness and its mechanism are discussed. From the experiments, it is found that burnishing process is effective to decrease surface roughness of hypereutectic Al-Si alloy components, in which, all input parameters have a significant effect on the surface roughness. To achieve a small surface roughness, the optimum process parameters are recommended.

scholarly journals Effects of LaNiO3 Seed Layer on the Microstructure and Electrical Properties of Ferroelectric BZT/PZT/BZT Thin Films

2021 ◽  
Vol 8 ◽  
Author(s):  
Jinyu Ruan ◽  
Chao Yin ◽  
Tiandong Zhang ◽  
Hao Pan
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Surface Roughness ◽  
Electrical Properties ◽  
Seed Layer ◽  
Ferroelectric Properties ◽  
Lower Surface ◽  
Multilayer Films ◽  
Multilayer Thin Films ◽  
Orientation Growth

Ferroelectric multilayer films attract great attention for a wide variation of applications. The synergistic effect by combining different functional layers induces distinctive electrical properties. In this study, ferroelectric BaZr0.2Ti0.8O3/PbZr0.52Ti0.48O3/BaZr0.2Ti0.8O3 (BZT/PZT/BZT) multilayer thin films are designed and fabricated by using the magnetron sputtering method, and a LaNiO3 (LNO) seed layer is introduced. The microstructures and electrical properties of the BZT/PZT/BZT films with and without the LNO seed layer are systematically studied. The results show that the BZT/PZT/BZT/LNO thin film exhibits much lower surface roughness and a preferred (100)-orientation growth, with the growth template and tensile stress provided by the LNO layer. Moreover, an enhanced dielectric constant, decreased dielectric loss, and improved ferroelectric properties are achieved in BZT/PZT/BZT/LNO thin films. This work reveals that the seed layer can play an important role in improving the microstructure and properties of ferroelectric multilayer films.

scholarly journals Impact of process conditions on chemical solution deposited BNKT thin film electromechanical properties

2021 ◽  
Vol 3 (10) ◽  
Author(s):  
Kyle M. Grove ◽  
Austin Fox ◽  
David P. Cann ◽  
Song Won Ko ◽  
Peter Mardilovich ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Dielectric Constant ◽  
Dielectric Loss ◽  
Pyrolysis Temperature ◽  
Piezoelectric Response ◽  
Excess Properties ◽  
Process Conditions ◽  
Chemical Solution ◽  
Ramp Rate

Abstract Phase pure perovskite (1-x)Bi1/2Na1/2TiO3 – xBi1/2K1/2TiO3 (BNKT) thin films were successfully prepared via an inverse mixing order chemical solution deposition method and the impact of process conditions on film properties were observed. Process conditions evaluated included crystallization temperature and time, ramp rate, pyrolysis temperature, and cation excess. Properties measured included crystal structure, dielectric constant, dielectric loss, piezoelectric response, and ferroelectric response. A few notable trends were observed. A subtle impact on piezoelectric response was observed in films prepared using different ramp rates: 100 C per second films (d33,f = 60 ± 5 pm/V at 1 kHz), 75 °C per second films (d33,f = 55 ± 5 pm/V) and 150 C per second films (d33,f = 50 ± 5 pm/V). Films prepared using a 75 °C per second ramp rate displayed slightly higher dielectric loss (tan δ = 0.09 at 1 kHz) than films prepared using a 100 °C per second ramp rate (tan δ = 0.07 at 1 kHz) or 150 °C per second ramp rate (tan δ = 0.05 at 1 kHz). Pyrolysis temperatures greater than 350 °C are necessary to burn off organics and maximize film dielectric constant. Dielectric constant increased from 450 ± 50 at 1 kHz to 600 ± 50 at 1 kHz by increasing pyrolysis temperature from 300 to 400 °C. Excess cation amounts (for compositional control) were also evaluated and it was found films with higher amounts of Na and K excess compared to bismuth excess displayed an increase in d33,f of about 10 pm/V compared to films prepared with equivalent Bi and Na and K excess amounts. Article highlights Impact of processing conditions on inverse mixing order chemical solution deposited bismuth based thin films. Dielectric, piezoelectric, and ferroelectric properties of thin film bismuth sodium titanate-bismuth potassium titanate thin films. Developing lead-free piezoelectric actuator materials.

Thermal Pyrolysis of Polyethylene in Fluidized Beds: Review of the Influence of Process Parameters on Product Distribution

2012 ◽  
Vol 134 (3) ◽  
Author(s):  
K. Suresh Kumar Reddy ◽  
Pravin Kannan ◽  
Ahmed Al Shoaibi ◽  
C. Srinivasakannan
Keyword(s):  
Fluidized Bed ◽  
Process Parameters ◽  
Fluidized Beds ◽  
Pyrolysis Temperature ◽  
Liquid Product ◽  
Product Distribution ◽  
Major Influence ◽  
Process Conditions ◽  
Influence Of Process Parameters ◽  
Thermal Pyrolysis

The present work is an attempt to compile and analyze the most recent literature pertaining to thermal pyrolysis of plastic waste using fluidized bed reactors. The review is short owing to the small number of work reported in the open literature in particular to the fluidized beds. Although works on pyrolysis are reported in fixed beds, autoclaves, and fluidized beds, vast majority of them address to the utilization of fluidized bed due to their advantages and large scale adaptability. The pyrolysis temperature and the residence time are reported to have major influence on the product distribution, with the increase in pyrolysis temperature favoring gas production, with significant reduction in the wax and oil. The pyrolysis gas generally contains H2, CO, CO2, CH4, C2H4, C2H6 while liquid product comprises benzene, toluene, xylene, styrene, light oil, heavy oil, and gasoline with the variations depending on process conditions. The effects of other process parameters, namely fuel feed rate, fuel composition, and fluidizing medium have been reviewed and presented.

A Study on the Effect of Process Parameters on Surface Topography of Al Thin Films on Various Substrates Using AFM

2011 ◽  
Vol 383-390 ◽  
pp. 903-908
Author(s):  
S. Shanmugan ◽  
D. Mutharasu ◽  
Z. Hassan ◽  
H. Abu. Hassan
Keyword(s):  
Thin Films ◽  
Surface Topography ◽  
Flow Rate ◽  
Gas Flow ◽  
Process Conditions ◽  
Gas Flow Rate ◽  
Glass Substrates ◽  
Sputtering Power ◽  
Large Particles ◽  
Ar Gas

Al thin films were prepared over different substrates at various process conditions using DC sputtering. The surface topography of all prepared films was examined using AFM technique. Very smooth, uniform and dense surface were observed for Al films coated over Glass substrates. The observed particle size was nano scale (20 -70 nm) for Glass substrates. Sputtering power showed immense effect on surface roughness with respective to Ar gas flow rate. Noticeable change on surface with large particles was observed in Copper substrates at various sputtering power and gas flow rate.

scholarly journals Study on Optimization of Wet Milling Process for the Development of Albendazole Containing Nanosuspension with Improved Dissolution

2020 ◽  
Vol 64 (4) ◽  
pp. 401-420
Author(s):  
Viktor Fülöp ◽  
Géza Jakab ◽  
Bence Tóth ◽  
Emese Balogh ◽  
István Antal
Keyword(s):  
Process Parameters ◽  
Dissolution Kinetics ◽  
Polymorphic Transition ◽  
Milling Process ◽  
Process Time ◽  
Wet Milling ◽  
Influence Of Process Parameters ◽  
Freundlich Equation ◽  
Milling Medium ◽  
Kinetics Of

The main objective of this work was to show the potential of the optimization of top-down wet planetary bead milling process parameters (milling speed, process time and size of the milling medium) by Design Of Experiments (DOE) approach for the development of albendazole (ABZ) containing nanosuspension with improved dissolution. In addition, the influence of process parameters (capacity of milling container, applied volume of milling beads, size of the milling medium, milling speed, milling time) on ABZ polymorphic transition has also been investigated. The optimized, milled formula yielded ~ 145.39 times reduction in mean particle size (182.200 ± 1.3130 nm) compared to unmilled dispersion, which demonstrated 13.50 times gain in mean dissolution rate value compared to the unmilled dispersion in medium at pH = 1.2. No lag time values were observed in the dissolution kinetics of the nanosuspension in comparison with the unmilled samples. Moreover, maximal mean solubility value was also improved by 1.45 times compared to the unmilled suspension, in medium at pH = 6.8, supporting the significance of the Ostwald-Freundlich equation. Diffraction pattern comparisons have indicated a polymorphic transition of albendazole to Form II, which was more pronounced in smaller container at high milling speed values and prolonged operations.

scholarly journals Subcritical Water Extraction of Chestnut Bark and Optimization of Process Parameters

Molecules ◽  
2020 ◽  
Vol 25 (12) ◽  
pp. 2774 ◽  
Author(s):  
Tanja Gagić ◽  
Željko Knez ◽  
Mojca Škerget
Keyword(s):  
Process Parameters ◽  
Subcritical Water ◽  
Extraction Process ◽  
Extraction Yield ◽  
Water Extraction ◽  
Bark Extract ◽  
Total Phenol Content ◽  
Process Conditions ◽  
Subcritical Water Extraction ◽  
Influence Of Process Parameters

The aim of the work was the optimization of the subcritical water extraction process of chestnut bark using Box–Behnken response surface methodology. The influence of process parameters, such as temperature, extraction time and solvent-solid ratio, on extraction yield, yield of the main compounds, total phenol content, total tannin content and antioxidant activity has been investigated. The identified compounds were ellagic and gallic acids, ellagitannins (vescalagin, castalagin, 1-o-galloyl castalagin, vescalin and castalin), sugars (maltose, glucose, fructose and arabinose) and sugar derivatives (5-HMF, furfural and levulinic acid). Finally, the optimal process conditions for obtaining the bark extract highly rich in ellagic acid and with satisfactory levels of total phenols and total tannins have been determined.

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