P-type Conductivity of MgZnO:(N:Ga) Thin Films Prepared by Remote Plasma In-Situ Atomic Layer Doping

ECS Journal of Solid State Science and Technology ◽

10.1149/2.030311jss ◽

2013 ◽

Vol 2 (11) ◽

pp. R249-R253 ◽

Author(s):

Jui-Fen Chien ◽

Huan-Yu Shih ◽

Hua-Yang Liao ◽

Ray-Ming Lin ◽

Jing-Jong Shyue ◽

...

Keyword(s):

Atomic Layer ◽

Remote Plasma ◽

Type Conductivity ◽

Download Full-text

Local Electronic Structures and Electrical Characteristics of Well-Controlled Nitrogen-Doped ZnO Thin Films Prepared by Remote Plasma In situ Atomic Layer Doping

ACS Applied Materials & Interfaces ◽

10.1021/am300551y ◽

2012 ◽

Vol 4 (7) ◽

pp. 3471-3475 ◽

Author(s):

Jui-Fen Chien ◽

Ching-Hsiang Chen ◽

Jing-Jong Shyue ◽

Miin-Jang Chen

Keyword(s):

Electronic Structures ◽

Atomic Layer ◽

Zno Thin Films ◽

Electrical Characteristics ◽

Remote Plasma ◽

Nitrogen Doped ◽

Download Full-text

In Situ Synchrotron X-Ray Diffraction Analysis of Phase Transformation in Epitaxial Metastable hcp Nickel Thin Films, Prepared via Plasma-Enhanced Atomic Layer Deposition

Advanced Materials Interfaces ◽

10.1002/admi.201800957 ◽

2018 ◽

Vol 5 (24) ◽

pp. 1800957 ◽

Author(s):

Pouyan Motamedi ◽

Ken Bosnick ◽

Ken Cadien ◽

James D. Hogan

Keyword(s):

Phase Transformation ◽

Atomic Layer Deposition ◽

Diffraction Analysis ◽

Atomic Layer ◽

X Ray Diffraction ◽

X Ray ◽

Nickel Thin Films ◽

Layer Deposition

Download Full-text

Growth of nitrogen-doped p-type ZnO thin films prepared by atomic layer epitaxy

Rare Metals ◽

10.1016/s1001-0521(07)60055-2 ◽

2006 ◽

Vol 25 (6) ◽

pp. 110-114 ◽

Author(s):

C LEE ◽

J LIM ◽

S PARK ◽

H KIM

Keyword(s):

Atomic Layer ◽

Atomic Layer Epitaxy ◽

Zno Thin Films ◽

Nitrogen Doped ◽

Download Full-text

Comparison of precursor infiltration into polymer thin films via atomic layer deposition and sequential vapor infiltration using in-situ quartz crystal microgravimetry

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4882654 ◽

2014 ◽

Vol 32 (4) ◽

pp. 041602 ◽

Author(s):

Richard P. Padbury ◽

Jesse S. Jur

Keyword(s):

Atomic Layer Deposition ◽

Quartz Crystal ◽

Polymer Thin Films ◽

Atomic Layer ◽

Layer Deposition ◽

Quartz Crystal Microgravimetry ◽

Vapor Infiltration

Download Full-text

Growth of p-Type Tin(II) Monoxide Thin Films by Atomic Layer Deposition from Bis(1-dimethylamino-2-methyl-2propoxy)tin and H2O

Chemistry of Materials ◽

10.1021/cm503112v ◽

2014 ◽

Vol 26 (21) ◽

pp. 6088-6091 ◽

Author(s):

Jeong Hwan Han ◽

Yoon Jang Chung ◽

Bo Keun Park ◽

Seong Keun Kim ◽

Hyo-Suk Kim ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition ◽

Download Full-text

Atomic-layer-deposited Al2O3 thin films with thin SiO2 layers grown by in situ O3 oxidation

Journal of Applied Physics ◽

10.1063/1.1769090 ◽

2004 ◽

Vol 96 (4) ◽

pp. 2323-2329 ◽

Author(s):

Seong Keun Kim ◽

Cheol Seong Hwang

Keyword(s):

Download Full-text

Energy band engineering and controlled p‐type conductivity of CuAlO2 thin films by nonisovalent Cu‐O alloying

Applied Physics Letters ◽

10.1063/1.3683499 ◽

2012 ◽

Vol 100 (6) ◽

pp. 062102 ◽

Author(s):

Z. Q. Yao ◽

B. He ◽

L. Zhang ◽

C. Q. Zhuang ◽

T. W. Ng ◽

...

Keyword(s):

Energy Band ◽

Type Conductivity ◽

Band Engineering ◽

Download Full-text

The effect of sulfur on the electrical properties of S and N co-doped ZnO thin films: experiment and first-principles calculations

Physical Chemistry Chemical Physics ◽

10.1039/c5cp02434j ◽

2015 ◽

Vol 17 (26) ◽

pp. 16705-16708 ◽

Author(s):

Wenzhe Niu ◽

Hongbin Xu ◽

Yanmin Guo ◽

Yaguang Li ◽

Zhizhen Ye ◽

...

Keyword(s):

Electrical Properties ◽

First Principles ◽

Zno Thin Films ◽

First Principles Calculations ◽

Type Conductivity ◽

Doped Zno ◽

P Type ◽

The S dopants in S–N co-doped ZnO contribute to easier doping and p-type conductivity, as concluded by experiment and calculations.

Download Full-text

Giant enhancement of the n-type conductivity in single phase p-type ZnO:N thin films by intentionally created defect clusters and pairs

Solid State Communications ◽

10.1016/j.ssc.2015.05.011 ◽

2015 ◽

Vol 218 ◽

pp. 20-24 ◽

Author(s):

Subodh K. Gautam ◽

R.G. Singh ◽

V.V. Siva Kumar ◽

Fouran Singh

Keyword(s):

Single Phase ◽

Type Conductivity ◽

Defect Clusters ◽

Download Full-text

Atomic Layer and Unit-Cell Layer Growth of (Ca,Sr)CuO2 and Bi2Sr2Can-1CunO2n+4 Thin Films by Laser Molecular Bean Epitaxy

MRS Proceedings ◽

10.1557/proc-222-309 ◽

1991 ◽

Vol 222 ◽

Author(s):

Masaki Kanai ◽

Tomoji Kawai ◽

Takuya Matsumoto ◽

Shichio Kawai

Keyword(s):

Diffraction Pattern ◽

Atomic Layer ◽

High Energy ◽

Layer Growth ◽

Unit Cell ◽

Layer By Layer ◽

Diffraction Intensity

ABSTRACTThin films of (Ca,Sr)CuO2 and Bi2Sr2Can-1CunO2n+4 are formed by laser molecular beam epitaxy with in-situ reflection high energy electron diffraction observation. The diffraction pattern shows that these materials are formed with layer-by-layer growth. The change of the diffraction intensity as well as the analysis of the total diffraction pattern makes It possible to control the grown of the atomic layer or the unit-cell layer.

Download Full-text