scholarly journals Photoresist Removal Using H Radicals Generated by Iridium Hot-Wire Catalyst

2017 ◽  
Vol 2017 ◽  
pp. 1-5 ◽  
Author(s):  
Masashi Yamamoto ◽  
Shiro Nagaoka ◽  
Hironobu Umemoto ◽  
Keisuke Ohdaira ◽  
Takashi Nishiyama ◽  
...  
Keyword(s):  
Thin Film ◽  
Surface Temperature ◽  
Removal Rate ◽  
Polymer Surface ◽  
Hot Wire ◽  
Iridium Catalyst ◽  
Thin Film Interference ◽  
Oxygen Addition ◽  
Decomposition Behavior ◽  
The Relationship

We examined an environmentally friendly photoresist removal method using H radicals produced by decomposing hydrogen on a hot iridium catalyst. We examined the relationship between photoresist removal rate and its surface temperature using thin film interference and the removal properties using H radicals produced by the Ir catalyst. Decomposition behavior at polymer surface by radicals may be analyzed in further detail from the aspect of kinetics. Additionally, we investigated the oxygen addition effects on the removal rate. The photoresist removal rate increased with the oxygen additive amount and then decreased more gradually than in the case of using W filament. The increasing behavior was similar but there was a large difference between W and Ir catalyst in the decreasing behavior.

Physical and Optical Properties of The Films Ð’i2Te3-Bi2Se3

2015 ◽  
Vol 11 (2) ◽  
pp. 3017-3022
Author(s):  
Gurban Akhmedov
Keyword(s):  
Thin Film ◽  
Optical Properties ◽  
Surface Temperature ◽  
Thermal Evaporation ◽  
Low Voltage ◽  
Internal Surface ◽  
Differential Resistance ◽  
Work Cycle

Results of researches show, that film p-n the structures received by a method of discrete thermal evaporation in a uniform work cycle, are suitable for use in low-voltage devices.  As a result of work are received p-n heterojunctions in thin-film execution, described by high values of differential resistance. Show that, thermo endurance - T0 maybe using as characteristic of thermo endurance of optic materials. If heating flow, destruction temperature and internal surface temperature is measured during test, it is possible to determine value T0 and other necessity characteristics. As a result of the taking test was lead to comparison evaluation of considered materials. Working range of heating flow and up level heating embark have been determined.

scholarly journals Modeling the Temperature Field in the Ground with an Installed Slinky-Coil Heat Exchanger

Energies ◽  
2021 ◽  
Vol 14 (13) ◽  
pp. 4010
Author(s):  
Monika Gwadera ◽  
Krzysztof Kupiec
Keyword(s):  
Temperature Field ◽  
Heat Exchanger ◽  
Surface Temperature ◽  
Ground Surface ◽  
Heat Sources ◽  
Ground Surface Temperature ◽  
Coil Heat Exchanger ◽  
The Relationship ◽  
Temperature Responses ◽  
Coil Heat

In order to find the temperature field in the ground with a heat exchanger, it is necessary to determine temperature responses of the ground caused by heat sources and the influence of the environment. To determine the latter, a new model of heat transfer in the ground under natural conditions was developed. The heat flux of the evaporation of moisture from the ground was described by the relationship taking into account the annual amount of rainfall. The analytical solution for the equations of this model is presented. Under the conditions for which the calculations were performed, the following data were obtained: the average ground surface temperature Tsm = 10.67 °C, the ground surface temperature amplitude As = 13.88 K, and the phase angle Ps = 0.202 rad. This method makes it possible to easily determine the undisturbed ground temperature at any depth and at any time. This solution was used to find the temperature field in the ground with an installed slinky-coil heat exchanger that consisted of 63 coils. The results of calculations according to the presented model were compared with the results of measurements from the literature. The 3D model for the ground with an installed heat exchanger enables the analysis of the influence of miscellaneous parameters of the process of extracting or supplying heat from/to the ground on its temperature field.

scholarly journals Coupled Thermomechanical Response Measurement of Deformation of Nickel-Based Superalloys Using Full-Field Digital Image Correlation and Infrared Thermography

Materials ◽  
2021 ◽  
Vol 14 (9) ◽  
pp. 2163
Author(s):  
Krzysztof Żaba ◽  
Tomasz Trzepieciński ◽  
Sandra Puchlerska ◽  
Piotr Noga ◽  
Maciej Balcerzak
Keyword(s):  
Surface Temperature ◽  
Strain Rate ◽  
Rolling Direction ◽  
Image Correlation ◽  
Uniaxial Tensile ◽  
Uniaxial Tensile Test ◽  
Response Measurement ◽  
Sheet Rolling ◽  
Inconel Alloys ◽  
The Relationship

The paper is devoted to highlighting the potential application of the quantitative imaging technique through results associated with work hardening, strain rate and heat generated during elastic and plastic deformation. The aim of the research presented in this article is to determine the relationship between deformation in the uniaxial tensile test of samples made of 1-mm-thick nickel-based superalloys and their change in temperature during deformation. The relationship between yield stress and the Taylor–Quinney coefficient and their change with the strain rate were determined. The research material was 1-mm-thick sheets of three grades of Inconel alloys: 625 HX and 718. The Aramis (GOM GmbH, a company of the ZEISS Group) measurement system and high-sensitivity infrared thermal imaging camera were used for the tests. The uniaxial tensile tests were carried out at three different strain rates. A clear tendency to increase the sample temperature with an increase in the strain rate was observed. This conclusion applies to all materials and directions of sample cutting investigated with respect to the sheet-rolling direction. An almost linear correlation was found between the percent strain and the value of the maximum surface temperature of the specimens. The method used is helpful in assessing the extent of homogeneity of the strain and the material effort during its deformation based on the measurement of the surface temperature.

Hot-Wire Deposited Amorphous Silicon Thin-Film Transistors

1996 ◽  
Vol 424 ◽  
Author(s):  
R. E. I. Schropp ◽  
K. F. Feenstra ◽  
C. H. M. Van Der Werf ◽  
J. Holleman ◽  
H. Meiling
Keyword(s):  
Thin Film ◽  
Amorphous Silicon ◽  
Thin Film Transistors ◽  
Gate Dielectric ◽  
Chemical Vapor ◽  
Current Crowding ◽  
Hot Wire ◽  
Saturation Regime ◽  
Silicon Thin Film ◽  
Order Of Magnitude

AbstractWe present the first thin film transistors (TFTs) incorporating a low hydrogen content (5 - 9 at.-%) amorphous silicon (a-Si:H) layer deposited by the Hot-Wire Chemical Vapor Deposition (HWCVD) technique. This demonstrates the possibility of utilizing this material in devices. The deposition rate by Hot-Wire CVD is an order of magnitude higher than by Plasma Enhanced CVD. The switching ratio for TFTs based on HWCVD a-Si:H is better than 5 orders of magnitude. The field-effect mobility as determined from the saturation regime of the transfer characteristics is still quite poor. The interface with the gate dielectric needs further optimization. Current crowding effects, however, could be completely eliminated by a H2 plasma treatment of the HW-deposited intrinsic layer. In contrast to the PECVD reference device, the HWCVD device appears to be almost unsensitive to bias voltage stressing. This shows that HW-deposited material might be an approach to much more stable devices.

Investigation of the Water Guided Laser Micro-Jet Machining of Aero Engine Components

2017 ◽  
Author(s):  
Zhigang Wang
Keyword(s):  
Energy Density ◽  
Material Removal ◽  
Removal Rate ◽  
Cutting Speed ◽  
Potential Method ◽  
Laser Machining ◽  
Aero Engine ◽  
Engine Components ◽  
The Relationship ◽  
Dual Laser

The water guided laser micro-jet (LMJ) is a new potential method to machine aero engine parts with much less heat affected area and faster cutting speed than dry laser machining. The focus of this paper is to investigate the energy density and material removal for a dual-laser LMJ system. Then, the effects of dominated parameters on the energy density of LMJ are analyzed. Finally, a mathematical model is developed to describe the relationship between dominant laser parameters with the energy density of LMJ and material removal rate followed by machining case studies of aero engine components.

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