Room temperature fabrication of titanium nitride thin films as plasmonic materials by high-power impulse magnetron sputtering
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2013 ◽
Vol 690-693
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pp. 1702-1706
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2018 ◽
Vol 439
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pp. 022019
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2016 ◽
Vol 34
(6)
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pp. 061504
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Structural Evolution Upon Annealing of Multi-Layer Si/Fe Thin Films Prepared by Magnetron Sputtering
2007 ◽
Vol 561-565
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pp. 1161-1164