Size effect on the mechanical properties of microfabricated polysilicon thin films

2001 ◽  
Vol 16 (8) ◽  
pp. 2223-2228 ◽  
Author(s):  
J. N. Ding ◽  
Y. G. Meng ◽  
S. Z. Wen
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Size Effect ◽  
Surface Area ◽  
Fracture Strength ◽  
Size Effects ◽  
Microelectromechanical Systems ◽  
Governing Parameter ◽  
Average Value ◽  
Microtensile Test

A new microtensile test device using a magnetic-solenoid force actuator was developed to evaluate the mechanical properties of microfabricated polysilicon thin films that were 100–660 mm long, 20–200 μm wide, and 2.4-μm thick. It was found that the measured average value of Young's modulus, 164 GPa ± 1.2 GPa, falls within the theoretical bounds. The average fracture strength is 1.36 GPa with a standard deviation of 0.14 GPa, and the Weibull modulus is 10.4–11.7. Statistical analysis of the specimen size effects on the tensile strength predicated the size effects on the length, the surface area, and the volume of the specimens. The fracture strength increases with an increase of the ratio of surface area to volume. In such cases, the size effect can be corrected to the ratio of the surface area to volume as the governing parameter. The test data accounts for the uncertainties in mechanical properties and may be used to enhance the reliability and design of polysilicon microelectromechanical systems devices.

Mechanical Properties of Ultrananocrystalline Diamond Thin Films for MEMS Applications

2002 ◽  
Vol 741 ◽  
Author(s):  
H.D. Espinosa ◽  
B. Peng ◽  
K.-H. Kim ◽  
B.C. Prorok ◽  
N. Moldovan ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Elastic Moduli ◽  
Microelectromechanical Systems ◽  
Nanosized Particles ◽  
Good Reproducibility ◽  
Fracture Properties ◽  
Ultrananocrystalline Diamond ◽  
Mems Fabrication ◽  
Membrane Deflection

ABSTRACTMicrocantilever deflection and the membrane deflection experiment (MDE) were used to examine the elastic and fracture properties of ultrananocrystalline diamond (UNCD) thin films in relation to their application to microelectromechanical systems (MEMS). Freestanding microcantilevers and membranes were fabricated using standard MEMS fabrication techniques adapted to our UNCD film technology. Elastic moduli measured by both methods described above are in agreement, with the values being in the range 930 and 970 GPa with both techniques showing good reproducibility. The MDE test showed fracture strength to vary from 3.95 to 5.03 GPa when seeding was performed with ultrasonic agitation of nanosized particles.

Nanoscale size effects on the mechanical properties of platinum thin films and cross-sectional grain morphology

2015 ◽  
Vol 26 (1) ◽  
pp. 015007 ◽  
Author(s):  
K Abbas ◽  
S Alaie ◽  
M Ghasemi Baboly ◽  
M M M Elahi ◽  
D H Anjum ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Size Effects ◽  
Grain Morphology ◽  
Cross Sectional

Nanoindentation Measurements on Low-k Porous Silica Thin Films Spin Coated on Silicon Substrates

2003 ◽  
Vol 125 (4) ◽  
pp. 361-367 ◽  
Author(s):  
Xiaoqin Huang ◽  
Assimina A. Pelegri
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Mechanical Properties ◽  
Young’S Modulus ◽  
Microelectromechanical Systems ◽  
Young's Modulus ◽  
Porous Silica ◽  
Silicon Substrates ◽  
Silica Thin Films ◽  
Low K

MEMS (MicroElectroMechanical Systems) are composed of thin films and composite nanomaterials. Although the mechanical properties of their constituent materials play an important role in controlling their quality, reliability, and lifetime, they are often found to be different from their bulk counterparts. In this paper, low-k porous silica thin films spin coated on silicon substrates are studied. The roughness of spin-on coated porous silica films is analyzed with in-situ imaging and their mechanical properties are determined using nanoindentation. A Berkovich type nanoindenter, of a 142.3 deg total included angle, is used and continuous measurements of force and displacements are acquired. It is shown, that the measured results of hardness and Young’s modulus of these films depend on penetration depth. Furthermore, the film’s mechanical properties are influenced by the properties of the substrate, and the reproduction of the force versus displacement curves depends on the quality of the thin film. The hardness of the studied low-k spin coated silica thin film is measured as 0.35∼0.41 GPa and the Young’s modulus is determined as 2.74∼2.94 GPa.

scholarly journals Classical Size Effects in Sb Doped SnTe Thin Films

2017 ◽  
Vol 18 (1) ◽  
pp. 75-77
Author(s):  
Ya.P. Saliy
Keyword(s):  
Thin Films ◽  
Size Effect ◽  
Physical Properties ◽  
Free Path ◽  
Size Effects ◽  
Carrier Mobility ◽  
Thermal Evaporation ◽  
P Type ◽  
Strongly Degenerate ◽  
Classical Size

The possibility of obtaining strongly degenerate (> 4×1020 сm-3) SnTe thin films (d = 200 - 2000 nm) with p-type conductivity by thermal evaporation in vacuum of SnTe crystals doped with Sb, with subsequent condensation onto as (0001) mica and sytal substrates, was established. The thickness dependences of electro-physical properties of thin films were obtained. In this region of thickness there was growth of the carrier mobility with thickness, which is attributable to manifestation of classical size effect and interpreted in the framework of Fuchs-Sondheimer theory. These measurements show little correlation between the length of free path of charge cattiers and the lateral diameter of surface objects.

First Principles Study of Size Effect in BaTiO3 Ultrathin Films

2005 ◽  
Vol 881 ◽  
Author(s):  
Bo-Kuai Lai ◽  
Igor Kornev ◽  
Laurent Bellaiche ◽  
Greg Salamo
Keyword(s):  
Thin Films ◽  
Phase Transition ◽  
Size Effect ◽  
Ultrathin Films ◽  
First Principles ◽  
Size Effects ◽  
Surface Film ◽  
Misfit Strain ◽  
Ferroelectric Thin Films ◽  
Electrical Boundary Conditions

AbstractProperties and phase transition behaviors of ferroelectric thin films that are different from that of their bulk form is usually referred to as size effect. A first-principles-based scheme is used to investigate the effects of four important factors contributing to the size effects in epitaxial (001) BaTiO3 ultrathin films: misfit strain, existence of surface, film thickness, and electrical boundary conditions.

Size effects on the mechanical properties of nanocrystalline NbMoTaW refractory high entropy alloy thin films

2017 ◽  
Vol 95 ◽  
pp. 264-277 ◽  
Author(s):  
X.B. Feng ◽  
J.Y. Zhang ◽  
Y.Q. Wang ◽  
Z.Q. Hou ◽  
K. Wu ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Size Effects ◽  
High Entropy Alloy ◽  
High Entropy

An Investigation of Film Thickness Effect on Mechanical Properties of Au Films Using Nanoindentation Techniques

2005 ◽  
Vol 875 ◽  
Author(s):  
Yifang Cao ◽  
Zong Zong ◽  
Wole Soboyejo
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Electron Beam ◽  
Film Thickness ◽  
Size Effects ◽  
Experimental Studies ◽  
Thickness Effect ◽  
Length Scale ◽  
Indentation Size ◽  
Au Thin Films

AbstractThis paper presents the results of nanoindentation experimental studies of Au thin films with different thicknesses. The effects of film thickness and microstructure on the hardnesses of electron-beam deposited Au films were studied in terms of Hall-Petch relationship. The effects of different thicknesses on indentation size effects (ISE) are explained within the framework of mechanism-based strain gradient (MSG) theory using the concept of microstructural length scale.

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