Surfactant Mediated Slurry Formulations for Ge CMP Applications

2013 ◽  
Vol 1560 ◽  
Author(s):  
G. Bahar Basim ◽  
Ayse Karagoz ◽  
Long Chen ◽  
Ivan Vakarelski
Keyword(s):  
Material Removal ◽  
Removal Rate ◽  
Sodium Dodecyl ◽  
Ammonium Bromide ◽  
Angle Measurements ◽  
Low Concentrations ◽  
Contact Angle Measurements ◽  
Self Assembled ◽  
Cetyl Trimethyl Ammonium ◽  
Oxidizer Concentration

ABSTRACTIn this study, slurry formulations in the presence of self-assembled surfactant structures were investigated for Ge/SiO2 CMP applications in the absence and presence of oxidizers. Both anionic (sodium dodecyl sulfate-SDS) and cationic (cetyl trimethyl ammonium bromide-C12TAB) micelles were used in the slurry formulations as a function of pH and oxidizer concentration. CMP performances of Ge and SiO2 wafers were evaluated in terms of material removal rates, selectivity and surface quality. The material removal rate responses were also assessed through AFM wear rate tests to obtain a faster response for preliminary analyses. The surfactant adsorption characteristics were studied through surface wettability responses of the Ge and SiO2 wafers through contact angle measurements. It was observed that the self-assembled surfactant structures can help obtain selectivity on the silica/germanium system at low concentrations of the oxidizer in the slurry.

Influence of Different Dispersants on the Dispersion Property of Nano-Aluminium Powders

2011 ◽  
Vol 71-78 ◽  
pp. 122-125 ◽  
Author(s):  
Ling Li Song ◽  
Ren Yuan Zhang ◽  
Ling Bo Mao ◽  
Wen Jie Zhu ◽  
Miao Yan Zheng
Keyword(s):  
Sodium Dodecyl Sulfate ◽  
Ultrasonic Vibration ◽  
Cetyl Trimethyl Ammonium Bromide ◽  
Sodium Dodecyl ◽  
Dispersion Property ◽  
Ammonium Bromide ◽  
Aluminum Powders ◽  
Ultrasonic Time ◽  
Dodecyl Sulfate ◽  
Cetyl Trimethyl Ammonium

The influences of dispersant type, supersonic time and concentration on the dispersion property of the nano-aluminium powders in glycol water were systematically studied by using Sodium dodecyl sulfate (SDS)，cetyl trimethyl ammonium bromide (CTAB) and sodium hexa metah posphate（SHMP）as dispersants. During the first stage of the experiments, influences of dispersant type and ultrasonic time with these dispersants were evaluated. The next stage of the study was focused on SHMP concentration. The influence of SHMP concentration was assessed. The results show that with the increasing of ultrasonic time, the dispersion property of nano-aluminum powders first increases and then decreases, and SHMP is the best one. The excellent dispersing condition on the dispersion property of nano-aluminium is: 5g/L SHMP and 50 min ultrasonic vibration.

Mobility of DR1 Molecules Embedded in Nanostructured PMMA Films

2009 ◽  
Vol 5 ◽  
pp. 135-142
Author(s):  
Jorge A. García-Macedo ◽  
A. Franco ◽  
Guadalupe Valverde-Aguilar ◽  
M.A. Ríos-Enríquez
Keyword(s):  
Second Harmonic ◽  
Sodium Dodecyl ◽  
Orientation Distribution ◽  
Decay Rates ◽  
Ammonium Bromide ◽  
X Ray Diffraction ◽  
Poling Field ◽  
Different Temperatures ◽  
Cetyl Trimethyl Ammonium ◽  
Kinetics Of

The kinetics of the orientation of Disperse Red 1 (DR1) molecules embedded in nanostructured Polymethylmetacrylate (PMMA) films was studied under the effect of an intense constant electric poling field. The changes in the orientation distribution of the DR1 molecules were followed by Second Harmonic Generation (SHG) measurements. The SHG signal was recorded as function of time at three different temperatures. We focused on both, the signal increases under the presence of the poling field and the signal decays without the poling field. The studied PMMA films were nanostructured by the incorporation of ionic surfactants as the Sodium Dodecyl Sulfate (SDS) and the Cetyl Trimethyl Ammonium Bromide (CTAB) during their preparation. The kinds of nanostructures obtained in the films were determined by means of X-ray diffraction (XRD) measurements. Substantial differences in signal intensity and in growth and decay rates between amorphous and nanostructured films were found.

The Study of Surfactant Effect on Soil Water Infiltration

2011 ◽  
Vol 361-363 ◽  
pp. 1946-1949
Author(s):  
Yi Fei Li ◽  
Tian Wei Qian ◽  
Li Juan Huo
Keyword(s):  
Hydraulic Conductivity ◽  
Sodium Dodecyl ◽  
Sodium Dodecyl Benzene Sulfonate ◽  
Saturated Hydraulic Conductivity ◽  
Water Infiltration ◽  
Ammonium Bromide ◽  
Soil Infiltration ◽  
Soil Water Infiltration ◽  
Dodecyl Benzene Sulfonate ◽  
Cetyl Trimethyl Ammonium

In this paper,the effect of surfactant to the infiltration and the change of saturated hydraulic conductivity was studied by GUELPH PERMEAMETER. We investigated effects on soil infiltration by three representative surfactants.The results show that the existing of sodium dodecyl benzene sulfonate (SDBS), cetyl trimethyl ammonium bromide bromide (CTAB) and polyxyethylene fatty alcohol (AEO9) would decrease soil saturated hydraulic conductivity.

Surface-modified halloysite nanotubes as fillers applied in reinforcing the performance of polytetrafluoroethylene

Clay Minerals ◽  
2018 ◽  
Vol 53 (4) ◽  
pp. 643-656 ◽  
Author(s):  
Zhi-Lin Cheng ◽  
Xing-Yu Chang ◽  
Zan Liu ◽  
Dun-Zhong Qin
Keyword(s):  
Electron Microscopy ◽  
Mechanical Properties ◽  
Sodium Dodecyl ◽  
Halloysite Nanotubes ◽  
Angle Measurements ◽  
Transmission Electron ◽  
Contact Angle Measurements ◽  
Ftir Spectrometry ◽  
Surface Modified ◽  
Scanning Electron

ABSTRACTIn order to improve the dispersibility of halloysite nanotubes (HNTs) in polytetrafluoroethylene (PTFE), the modification of HNT surfaces was studied with three types of modifiers (polymethyl methacrylate [PMMA], sodium dodecyl sulfate [SDS] and carboxylic acid). The modified HNTs were characterized by Fourier-transform infrared (FTIR) spectrometry, transmission electron microscopy (TEM), scanning electron microscopy (SEM) and contact angle measurements. The HNTs were used to reinforce the mechanical properties of PTFE. The mechanical results indicated that the tensile strength of the modified HNT-filled PTFE nanocomposites (F-HNT/PTFE) improved to an acceptable degree and Young's modulus increased significantly. The tribological results showed that the wear rate of F-HNT/PTFE decreased by 21–82 and 9–40 times compared to pure PTFE and the pristine F-HNT/PTFE, respectively.

Understanding Selectivity on Germanium/SiO2 Chemical Mechanical Planarization Through Design of Experiments

2015 ◽  
Vol 1790 ◽  
pp. 19-24
Author(s):  
Ayse Karagoz ◽  
James Mal ◽  
G. Bahar Basim
Keyword(s):  
Material Removal Rate ◽  
Material Removal ◽  
Removal Rate ◽  
Surface Active Agent ◽  
Chemical Mechanical Planarization ◽  
Sodium Dodecyl ◽  
Active Agent ◽  
High Mobility ◽  
High Removal Rate ◽  
The Impact

ABSTRACTThe continuous trend of achieving more complex microelectronics with smaller nodes yet larger wafer sizes in microelectronics manufacturing lead to aggressive development requirements for chemical mechanical planarization (CMP) process. Particularly, beyond the 14 nm technology the development needs made it a must to introduce high mobility channel materials such as Ge. CMP is an enabler for integration of these new materials into future devices. In this study, we implemented a design of experiment (DOE) methodology in order to understand the optimized CMP slurry parameters such as optimal concentration of surface active agent (sodium dodecyl sulfate-SDS), concentration of abrasive particles and pH from the viewpoint of high removal rate and selectivity while maintaining a defect free surface finish. The responses examined were particle size distribution (slurry stability), zeta potential, material removal rate (MRR) and the surface defectivity as a function of the selected design variables. The impact of fumed silica particle loadings, oxidizer (H2O2) concentration, SDS surfactant concentration and pH were analyzed on Ge/silica selectivity through material removal rate (MRR) surface roughness and defectivity analyses.

Evaluation of the Role of Surfactant on the Surface Characterisation of Coal

2013 ◽  
Vol 634-638 ◽  
pp. 755-758
Author(s):  
Liang Gong ◽  
Zhi Yuan Yang ◽  
Jiang Long
Keyword(s):  
Sodium Dodecyl ◽  
Surface Hydrophobicity ◽  
Coal Surface ◽  
Surface Characterisation ◽  
Angle Measurements ◽  
Contact Angle Measurements ◽  
Higher Rank ◽  
The Impact ◽  
Coal Type

The surfaces of three China coals varying widely in coal type(Baode,Xiangshan,Jincheng) have been modified by adsorption of three surfactants( Sodium dodecyl sulfate,Polyethoxylated fatty alcohols,Alkyl phenol gather oxygen vinyl ether).The impact about coals of the surfactant has been explored by correlating three chemical characterisation techniques.Changes in coal surface hydrophobicity were assessed using contact angle measurements at the coal/water interface.The largest variation in zeta potential resulting from addition of surfactants was seen for the higher rank coals.The Specific surface area decreased when surfactants were present.

scholarly journals Preparation and characterization of polyethylene glycol/poly(L-lactic acid) blends

2017 ◽  
Vol 89 (1) ◽  
pp. 141-152 ◽  
Author(s):  
Ioanna-Georgia Athanasoulia ◽  
Petroula A. Tarantili
Keyword(s):  
Contact Angle ◽  
Lactic Acid ◽  
Degradation Process ◽  
Water Contact ◽  
Wetting Ability ◽  
Angle Measurements ◽  
Low Concentrations ◽  
Contact Angle Measurements ◽  
Twin Screw ◽  
Poly Ethylene

AbstractThe effect of incorporation of poly(ethylene glycol) (PEG) on thermomechanical and hydrophilicity properties of poly(L-lactic acid) (PLLA) was investigated. PEG/PLLA blends, containing 10, 20, 30 and 40 wt% PEG, were prepared by melt-extrusion in a co-rotating twin-screw extruder. By DSC analysis, it was observed that the Tg of PLLA phase in PEG/PLLA blends decreased accompanied by a significant decrease in Tcc and increase in their melting enthalpy. Therefore, the addition of PEG enhances the crystallization ability of PLLA phase due to its lubricating effect which increased mobility of PLLA chains. From TGA it was observed that low concentrations of PEG (10 & 20 wt%) increase the Tonset of thermal degradation, probably due to improved heat resistance of the crystalline phase. At higher PEG content, the Tonset decreases, as the lubricating effect becomes the controlling mechanism for the initiation of degradation process. Decrease in tensile strength and modulus was recorded especially in PLLA blends with PEG content higher than 20 wt%. The elongation at break decreases reaching a maximum at 20 wt% PEG and then dropped again. To investigate the effect of PEG on the wetting ability of PLLA, water contact angle measurements were performed. The results indicate that the introduction of PEG lowers the contact angle values in PEG/PLLA film surfaces, as compared to pure PLLA, suggesting improved hydrophilic properties.

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