Growth and Electronic Properties in Hot Wire Deposited Nanocrystalline Si Solar Cells

2007 ◽  
Vol 989 ◽  
Author(s):  
Kamal Muthukrishnan ◽  
Vikram Dalal ◽  
Max Noack
Keyword(s):  
Electronic Properties ◽  
Defect Density ◽  
Grain Structure ◽  
Degree Of Crystallinity ◽  
Hot Wire ◽  
High Hydrogen ◽  
Filament Temperature ◽  
Random Nucleation ◽  
Hydrogen Dilution ◽  
High Filament

AbstractWe report on the growth and properties of nanocrystalline Si:H grown using a remote hot wire deposition system. Unlike previous results, the temperature of the substrate is not significantly affected by the hot filament in our system. The crystallinity of the growing film and the type of grain structure was systematically varied by changing the filament temperature and the degree of hydrogen dilution. It was found that high hydrogen dilution gave rise to random nucleation and <111> grain growth, whereas lower hydrogen dilution led to preferable growth of <220> grains. Similarly, a high filament temperature gave rise to preferential <111> growth compared to lower filament temperature. The electronic properties such as defect density and minority carrier diffusion length were studied as a function of the degree of crystallinity. It was found that the lowest defect density was obtained for a material which had an intermediate range of crystallnity, as determined from the Raman spectrum. Both highly amorphous and highly crystalline materials gave higher defect densities. The diffusion lengths were measured using a quantum efficiency technique, and were found to be the highest for the mid-range crystalline material. The results suggest that having an amorphous tissue surrounding the crystalline grain helps in passivating the grain boundaries.

Low Defect Density Microcrystalline-Si Deposited by the Hot Wire Technique

1998 ◽  
Vol 507 ◽  
Author(s):  
A. H. Mahan ◽  
M. Vanecek ◽  
A. Poruba ◽  
V. Vorlicek ◽  
R. S. Crandall ◽  
...  
Keyword(s):  
Electronic Properties ◽  
Defect Density ◽  
Structural Data ◽  
Hot Wire ◽  
Very High Frequency ◽  
Deposition Parameters ◽  
Optical And Electronic Properties ◽  
High Filament ◽  
Si Films ◽  
Substrate Temperatures

ABSTRACTThe optical and electronic properties of a series of microcrystalline silicon (μ-Si) films, deposited by the hot wire (HW) technique, are reported. Preliminary results suggest, using moderate H2 /SiH4 dilution ratios and substrate temperatures (320°C), high filament temperatures, and no H gas purifier, that the subgap absorption for these films, measured using the constant photocurrent (CPM) method, can be as low as that obtained for films deposited by the very high frequency glow discharge (VHF-GD) technique. The film dark conductivities of the HW samples, ranging as low as 2.0 × 10−8 (ohm cm)−1, lend further credance to these low defect values. At the same time, the optical absorption in the region > 1.6 eV is higher than that previously observed for the VHF-GD deposited samples. The present results, discussed in the context of the film microcrystalline fraction, suggest that there is no unique, good quality, low defect density μ-Si material, and that different deposition techniques can be used to successfully deposit device quality gc-Si. We also present optical and structural data for films deposited at lower substrate temperatures and higher deposition rates, and suggest combinations of deposition parameters to be used that may further improve the electronic properties of these films.

Hot-Wire CVD Poly-Silicon Films for Thin Film Devices

1998 ◽  
Vol 507 ◽  
Author(s):  
J.K. Rath ◽  
F.D. Tichelaar ◽  
H. Meiling ◽  
R.E.I. Schropp
Keyword(s):  
Defect Density ◽  
Initial Growth ◽  
Oriented Growth ◽  
Compact Structure ◽  
High Hydrogen ◽  
New Approach ◽  
Intrinsic Nature ◽  
Bias Stress ◽  
Hydrogen Dilution ◽  
Long Duration

ABSTRACTSolar cell using profiled poly-Si:H by HWCVD as i-layer in the configuration SS/n-µSi:H(PECVD)/i-poly-Si:H(HWCVD)/p-µc-Si:H(PECVD)/ITO showed 3.7% efficiency. A current of 23.6 mA/cm2 was generated in only 1.5 µm thick poly-Si:H i-layer grown at ∼5Å/s. TFTs made with the poly-Si:H films (grown at ≥ 9Å/s) exhibited remarkable stability to long duration of 23 hours of gate bias stress of ∼lMV/cm. A saturation mobility of 1.5 cm2/Vs for the TFT has been achieved. Films made at low hydrogen dilution (Poly2) showed device quality (purely intrinsic nature, ambipolar diffusion length of 568 nm, only (220) oriented growth and low ESR defect density of <1017/cm3with complete absence of signal due to conduction electrons) but with an incubation phase of amorphous initial growth, whereas the films made at high hydrogen dilution (Polyl) had a polycrystalline initial growth, though with higher defect density, incorporated oxygen and randomly oriented grains. Poly2 films are compact and hydrogen bonding is at compact Si-H sites manifested as 2000 cm−1IR vibration and high temperature hydrogen evolution peak. Exchange interaction of spins and spin pairing are observed while increasing defects in such a compact structure. A new approach has been used to integrate these two regimes of growth to make profiled poly-Si:H layers. The new layers show good electronic properties as well as complete elimination of incubation phase.

The Effects of Hydrogen Profiling and of Light-Induced Degradation on the Electronic Properties of Hydrogenated Nanocrystalline Silicon

2005 ◽  
Vol 862 ◽  
Author(s):  
A.F. Halverson ◽  
J.J. Gutierrez ◽  
J.D. Cohen ◽  
Baojie Yan ◽  
Jeffrey Yang ◽  
...  
Keyword(s):  
Electronic Properties ◽  
Minority Carrier ◽  
Defect Density ◽  
Light Exposure ◽  
Nanocrystalline Silicon ◽  
Drive Level ◽  
Dramatic Decrease ◽  
Transient Photocurrent ◽  
Hydrogen Dilution ◽  
Carrier Collection

AbstractThe electronic properties of hydrogenated nanocrystalline silicon (nc-Si:H) were studied using junction capacitance methods. Drive-level capacitance profiling (DLCP) measurements revealed significant differences for nc-Si:H layers deposited under constant hydrogen dilution compared to those deposited using hydrogen profiling, with lower DLCP densities in the latter case. Transient photocapacitance (TPC) measurements revealed the mixed-phase nature of these materials. It disclosed spectra that appeared quite microcrystalline-like at lower temperatures, but more similar to a-Si:H at higher temperatures where the minority carrier collection is higher in the nanocrystalline component of these samples. This then suppresses the TPC signal from this component compared to the a-Si:H component. In contrast, because transient photocurrent signals are enhanced by the additional minority carrier collection, those spectra appear microcrystalline like at all temperatures. We also investigated the effects of light-induced degradation in these devices. This caused a dramatic decrease in hole collection, similar to that caused by reducing the measurement temperature of the samples. However, the light exposure did not appear to increase the deep defect density (dangling bonds).

Microcrystalline Germanium Photodetectors

2001 ◽  
Vol 664 ◽  
Author(s):  
M. Krause ◽  
H. Stiebig ◽  
R. Carius ◽  
H. Wagner
Keyword(s):  
Electronic Properties ◽  
Near Infrared ◽  
Short Circuit ◽  
Chemical Vapor ◽  
Short Circuit Current ◽  
Infrared Light ◽  
High Hydrogen ◽  
Sensor Applications ◽  
Hydrogen Dilution ◽  
Structural And Electronic Properties

ABSTRACTFor sensor applications in the detection of near infrared light we have prepared μc-Ge:H by plasma enhanced chemical vapor deposition (PECVD) with a mixture of germane and hydrogen, investigatedits structural and electronic properties and incorporated it into thin pin diodes. In order to ensure microcrystalline growth we had to use high hydrogen dilution. However, only the material prepared with a ratio of germane to hydrogen of 0.2% shows high crystallinity. The optical absorption is remarkably different from c-Ge and exhibits no indication of a direct gap at 0.8eV. When this material is implemented as part of a 110nm thin absorber, a short circuit current of 20mA/cm2 and a quantum efficiency of 15% at a wavelength of 1.1μm are achieved. Higher germane concentrations in hydrogen lead to poor electronic properties due to an increase of the amorphous phase and the short circuit current of the devices deteriorates. As for crystalline germanium photodiodes cooling of the devices is used to overcome the restrictionoriginating from the high free carrier concentration.

Microstructural Defects of Device Quality Hot-Wire Cvd Poly-Silicon Films

1999 ◽  
Vol 557 ◽  
Author(s):  
J.K. Rath ◽  
F.D. Tichelaar ◽  
R.E.I. Schropp
Keyword(s):  
Volume Fraction ◽  
Nucleation Density ◽  
Hot Wire ◽  
Compact Structure ◽  
High Oxygen Content ◽  
High Hydrogen ◽  
Hydrogen Dilution ◽  
Si Films ◽  
Spherical Voids ◽  
Steel Substrates

AbstractTwo types of poly-Si:H thin films made by Hot Wire CVD have been evaluated with respect to utilisation in solar cells. Poly-Si:H films made at high hydrogen dilution are highly porous and have large interconnected voids. The void density is 25000/μm-3 as determined by XTEM. On the other hand, poly-Si:H layers made at low hydrogen dilution have a compact structure and a much smaller density of voids. In these films, two types of voids exist: globular voids smaller than 15 nm, and elongated voids, often located between columns of large crystals of 150-250 nm wide at the top. The density for the 5 - 15 nm spherical voids is usually -50/μm3, but larger concentrations often occur locally, up to 1000/pm3, i.e., 0.05% volume fraction. High oxygen content in the poly-Si films made at high hydrogen dilution is largely due to post deposition intrusion of water vapour through the interconnected voids. Profiled layers are made by depositing device quality poly-Si:H layers (low hydrogen dilution) on top of a seed layer (high hydrogen dilution) of high nucleation density. Cells incorporating profiled poly-Si:H films as i-layers at a deposition rate of 0.5 nm/s were made on stainless steel substrates in the configuration SS/n-μc-Si:H(PECVD)/i-poly-Si:H(HWCVD)/p-μc-Si:H(PECVD)/ITO. For our n-i-p solar cell with poly-Si i-layer we obtained an efficiency of 4.41% and a FF of 0.607. Due to native surface texture a current density of 19.95 mA/cm2 is generated in only ~1.22 μm thick i-layer without back reflector.

Influence of the H2 Dilution And Filament Temperature on the Properties of P Doped Silicon Carbide Thin Films Produced by Hot-Wire Technique

1998 ◽  
Vol 507 ◽  
Author(s):  
I. Ferreira ◽  
H. Águas ◽  
L. Mendes ◽  
F. Fernandes ◽  
E. Fortunato ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Carbide ◽  
Surface Morphology ◽  
Morphological Data ◽  
Hot Wire ◽  
Carbon Incorporation ◽  
Filament Temperature ◽  
Hydrogen Dilution ◽  
Boron Doped ◽  
Doped Silicon

ABSTRACTThis work deals with the role of hydrogen dilution and filament temperature on the morphology, structure and electrical properties of nanocrystalline boron doped silicon carbide thin films produced by hot-wire technique. The structural and morphological data obtained by XRD, SEM and micro-Raman show that for filament temperatures and hydrogen dilutions above 2100°C and 90%, respectively, the surface morphology of the films is granular with a needle shape, while for lower filament temperatures and hydrogen dilutions the surface morphology gets honeycomb like. The SIMS analysis reveals that films produced with filament temperatures of about 2200°C and hydrogen dilution of 99% present a higher hydrogen and carbon incorporation than the films produced at lower temperatures and hydrogen dilutions. These results agree with the electrical and optical characteristics recorded that show that the films produced exhibit optical gaps in the range from 1.8 to 2 eV and transverse conductivities ranging from 10−1S/cm to 10−3 S/cm, consistent with the degree of films crystallinity and carbon incorporation recorded.

In situ Ellipsometric Studies of the growth of a-Si:H films Prepared by the Hot wire Deposition

1996 ◽  
Vol 420 ◽  
Author(s):  
S. Bauer ◽  
R. O. Dusane ◽  
R. Biehl ◽  
B. Schroder
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Defect Density ◽  
Chemical Vapour ◽  
Hot Wire ◽  
Growth Behaviour ◽  
Film Density ◽  
Filament Temperature ◽  
Reactor Geometry

AbstractIn situ ellipsometric studies have been performed during the nucleation and growth of hydrogenated amorphous silicon (a-Si:H) films prepared by the hot wire chemical vapour deposition (HWCVD) method in order to understand the growth mechanism of these films. For a comparison with films deposited by plasma enhanced chemical vapour deposition (PECVD), the hot wire deposition was carried out under similar conditions and reactor geometry as for the PECVD process. It is observed from the kinetic ellipsometry measurements that low filament temperature (TFil) and low gas pressure favour the growth of more dense films, but at lower deposition rates. Moreover, for a given set of conditions an increase in substrate temperature (Ts) leads to a higher final value of the film density with a different growth behaviour in the initial stage. Thus, the filament temperature in the hot wire method seems to have a similar effect on the film density as the rf power has in the PECVD process, which has been observed earlier. Film density and surface roughness obtained from spectroscopic ellipsometry using a tetrahedron model which takes into account the effect of hydrogen on the dielectric function, is used to get information about the film microstructure. A correlation between this microstructure, the growth behaviour and the electronic properties as the defect density or the ambipolar diffusion length in the films is also reported.

Electronic Properties of Hot-Wire Deposited Nanocrystalline Silicon

1998 ◽  
Vol 507 ◽  
Author(s):  
R. Brüggemann ◽  
A. Hierzenberger ◽  
H.N. Wanka ◽  
M.B. Schubert
Keyword(s):  
Band Gap ◽  
Electronic Properties ◽  
Defect Density ◽  
High Vacuum ◽  
Sudden Change ◽  
Nanocrystalline Silicon ◽  
Dark Conductivity ◽  
Ultra High Vacuum ◽  
Hot Wire ◽  
Tauc Plot

ABSTRACTWe compare the electronic properties of nanocrystalline silicon from hot-wire chemical vapor deposition in a high-vacuum and an ultra-high-vacuum deposition system, employing W and Ta as filament material. From the constant photocurrent method we identify a band gap around 1.15 eV while, in contrast, a Tauc plot from optical transmission data guides to a wide band gap above 1.9 eV. The sudden change-over from nanocrystalline to amorphous structure in a hydrogen dilution series is also find in the dark and photoconductivity measurements. The samples show a metastability effect in the dark conductivity upon annealing in vacuum with an increase in the dark conductivity, with the large dark conductivity decreasing slowly after the annealing cycle when the cryostat is flushed with air. We identify larger values for the mobility-lifetime products, which corresponds to the smaller defect density shoulder in constant photocur- rent spectra, for the ultra-high-vacuum deposited material compared to the high-vacuun counterpart.

Solar-Cell Suitable μc-Si Films Grown by ECR-CVD

2000 ◽  
Vol 609 ◽  
Author(s):  
M. Birkholz ◽  
E. Conrad ◽  
K. Lips ◽  
B. Selle ◽  
I. Sieber ◽  
...  
Keyword(s):  
Electron Cyclotron Resonance ◽  
Film Growth ◽  
Dark Conductivity ◽  
Film Deposition ◽  
Degree Of Crystallinity ◽  
High Hydrogen ◽  
Hydrogen Dilution ◽  
Impurity Contamination ◽  
Si Films ◽  
High Degree

ABSTRACTThe preparation of μc-Si films from SiH4-H2 mixtures by electron-cyclotron resonance (ECR) CVD at deposition temperatures ≤ 400°C on foreign substrates is reported. Deposition conditions were identified for which Si films with a high degree of crystallinity were grown as was confirmed by Raman spectroscopy. A factorial analysis was carried out, for which the influence of deposition temperature, microwave power, hydrogen dilution and total pressure on film growth were investigated. Samples of optimized crystallinity were prepared in a lowpressure and high-hydrogen dilution regime. In-plane grain sizes were measured by TEM and found to be on the order of 10 - 12 nm. Next to the optimization of crystallinity several sources of impurity contamination during film deposition were identified and eliminated. Intrinsic μc-Si layers could be prepared under these conditions that exhibited a dark conductivity σd of 2 × 10-7 S/cm and photosensitivity σph/σd of 150. It is concluded that ECR CVD is capable of producing intrinsic layers with electronic properties as necessary for use in state-of-the-art n-i-p μc-Si solar cells.

The Effect of Hydrogen Dilution on Hot-Wire Thin-Film Transistors

1998 ◽  
Vol 507 ◽  
Author(s):  
J.P. Conde ◽  
H. Silva ◽  
V. Chu
Keyword(s):  
Thin Film ◽  
Active Layer ◽  
Thin Film Transistors ◽  
Silicon Layer ◽  
Active Layer Thickness ◽  
Hot Wire ◽  
Microcrystalline Silicon ◽  
High Hydrogen ◽  
Hydrogen Dilution ◽  
Active Layers

ABSTRACTBottom-gate thin film transistors (TFT) were fabricated with amorphous and microcrystalline silicon active layers deposited by hot-wire (HW) chemical vapor deposition using different levels of hydrogen dilution. As the hydrogen dilution was increased above 80%, the active layer made a transition from amorphous to microcrystalline. This transition resulted in an increase of the TFT off-current and in an increase of the TFT subthreshold slope. The TFT on- current and the TFT mobility remained at levels comparable to those of the a-Si:H HW TFTs. A comparison is made between TFTs with amorphous and microcrystalline silicon active layers prepared both by rf glow discharge and HW. HW TFTs with an active layer consisting of a thin layer deposited with high hydrogen dilution underlying a thicker amorphous silicon layer are also compared to TFTs with an active layer of the same total active layer thickness consisting only of the high hydrogen dilution film.

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