Mbe-Growth of InAs and GaSb Epitaxial Layers on GaAs Substrates
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AbstractWe have grown a number of InAs and GaSb bulk layers on GaAs substrates and studied the properties of the semiconductor films as a function of the various growth parameters. Preliminary results from GaSb growth are presented in addition to an extensive study of InAs growth. The films were characterized during growth by RHEED. RHEED-oscillations were observed during both InAs and GaSb growths. Hall effect measurements yielded peak electron mobilities for InAs of 18,900 cm2/Vs at 300 K and 35,000 cm2/Vs at 77 K. For GaSb the as grown layers were found to be p-type with a carrier concentration of 9x1015cm-3 and a hole mobility of 910 cm2 /Vs at 300 K.
2018 ◽
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2012 ◽
Vol 36
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pp. 97-107
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1998 ◽
Vol 37
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2012 ◽
Vol 21
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pp. 1469-1477
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