Diamond-Like Films Obtained by Sputtering from a Glassy Carbon Target
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ABSTRACTDiamond-like a-C:H films were obtained by reactive dc-magnetron sputtering from a glassy carbon target in an argon-hydrogen atmosphere. To our knowledge, this is the first time that glassy carbon is used as target material. The a-C:H films are transparent and hard. The a-C:H films can be used as protection and antireflection coatings on a-Si:H photoreceptors. The electrical, optical and structural properties of the a-C:H films are examined.
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2010 ◽
Vol 71
(4)
◽
pp. 669-672
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