Theoretical Calculation for the Young's Modulus of Poly-Si and a-Si Films
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ABSTRACTA newly theoretical calculation for the Young's modulus Ey of poly-Si and a-Si thin films based on the combination of grain and grain boundary effects as well as the dependance of crystalline orientations is presented. The calculated results are in agreement with the experimental results in a wide range of grain size and hydrogen concentrations published in the literatures. The reason for aberration among experimental data of poly-Si and a-Si films caused by different hydrogen concentrations, texture and grain size has been discussed. The results offer a better understanding of. the effects of film structures on elastic properties of poly-Si and a-Si films.
2021 ◽
Vol 1157
(1)
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pp. 012031
1992 ◽
Vol 75
(10)
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pp. 2915-2917
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2016 ◽
Vol 18
(31)
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pp. 21508-21517
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1994 ◽
Vol 60
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pp. 1108-1113