Sputter Etching Effect on Magnetic Properties in TaOx/TbFeCo/Ag Layered Films
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ABSTRACTSputter etching effect on magnetic properties was investigated in TaOx/TbFeCo/Ag layered films. With sputter etching, smooth interfaces of about lnm roughness were obtained. In films with smooth interfaces, magnetization was stabilized and magnetization reversal was sharpened at around the Curie temperature. As a result, recorded marks were stabilized, and the media became sensitive to the magnetic field for writing. 49dB was obtained as C/N even at 0.45μm mark length, which is sufficient for digital recording.
2019 ◽
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pp. 1950113
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2015 ◽
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pp. 419-422
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2016 ◽
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