Response Surface for CMOS Self-Aligned Titanium Silicide Process

1994 ◽  
Vol 342 ◽  
Author(s):  
A. K. Nanda ◽  
S. Meester ◽  
C. W. Wilkins
Keyword(s):  
Response Surface ◽  
Titanium Silicide ◽  
Silicon Substrates ◽  
Silicide Formation ◽  
Rapid Thermal Anneal ◽  
Contour Plots ◽  
Operating Window ◽  
Anneal Temperature ◽  
Central Composite ◽  
Anneal Time

ABSTRACTSputtered deposited titanium films on silicon substrates were used to study the effects of first rapid thermal anneal temperature, duration of anneal time and thickness of the titanium films for TiSi2 formation. A central composite, coupled with a cross design was used to analyze response surface. Empirical models were developed and contour plots were generated to describe the outcome of the first anneal. A window of operation to control the process of titanium silicide formation was recommended. Response surface analysis of data revealed an operating window of ±10° C for RTA1 for stable TiSi2 formation. Within this window of operation, the within wafer uniformity was found to be at its minimum. Anneal time was found to have minimum effect on the variability although sheet resistance decreases monotonically with increasing anneal time. Thickness of titanium films were found to be very critical in determining final TiSi2 thickness as determined by RBS and/or XRF techniques.

scholarly journals Optimization to Hydrothermal Liquefaction of Low Lipid Content Microalgae Spirulina sp. Using Response Surface Methodology

2018 ◽  
Vol 2018 ◽  
pp. 1-9 ◽  
Author(s):  
Xuan Wei ◽  
Dengfei Jie
Keyword(s):  
Response Surface Methodology ◽  
Response Surface ◽  
Lipid Content ◽  
Oil Production ◽  
Hydrothermal Liquefaction ◽  
Holding Time ◽  
Optimum Conditions ◽  
Bio Oil ◽  
Contour Plots ◽  
Central Composite

The production and nature of the biocrude obtained from Spirulina sp. by hydrothermal liquefaction (HTL) technology is focused in this investigation. Our aim is to evaluate the interaction of different factors on the bio-oil production through HTL using microalgae that contains relatively low lipid content and high protein. Optimization of three key parameters—concentration (mass of algae per mass of solvent), reaction temperature, and holding time—was carried out by response surface methodology (RSM). In this work, we used central composite design to conduct the experiment process. Graphical response surface and contour plots were used to locate the optimum point. The final results showed that the optimum concentration, temperature, and holding time were 10.5%, 357°C, and 37 min, respectively. Under the optimum conditions established, yield of the biocrude (41.6 ± 2.2%) was experimentally obtained using the fresh microalgae. This study showed the potential of bio-oil production of Spirulina sp. by HTL technology, but it still needs more improvement of the biocrude for utilization.

scholarly journals Optimizing the Processing Factor and Formulation of Oat-Based Cookie Dough for Enhancement in Stickiness and Moisture Content Using Response Surface Methodology and Superimposition

Processes ◽  
2020 ◽  
Vol 8 (7) ◽  
pp. 797
Author(s):  
Mohd Salahuddin Mohd Basri ◽  
Nurain Mohd Jais ◽  
Alifdalino Sulaiman ◽  
Mohd Zuhair Mohd Nor ◽  
Nor Nadiah Abdul Karim Shah ◽  
...  
Keyword(s):  
Response Surface Methodology ◽  
Moisture Content ◽  
Response Surface ◽  
Processing Factor ◽  
Resting Time ◽  
Two Factors ◽  
Confectionery Products ◽  
Contour Plots ◽  
Predicted Model ◽  
Central Composite

Despite the utilization of dusting flour and oil to reduce dough stickiness during the production process in food industry, they do not effectively help in eliminating the problem. Stickiness remains the bane of the production of bakery and confectionery products, including cookies. In addition, the high moisture content of cookie dough is unduly important to obtain a high breaking and compression strengths (cookies with high breaking tolerance). This study was conducted in light of insufficient research hitherto undertaken on the utilization of response surface methodology and superimposition to enhance the stickiness and moisture content of quick oat-based cookie dough. The study aims at optimizating, validating and superimposing the best combination of factors, to produce the lowest stickiness and highest moisture content in cookie dough. In addition, the effect of flour content and resting time on the stickiness and moisture content of cookie dough was also investigated, and microstructure analysis conducted. The central composite design (CCD) technique was employed and 39 runs were generated by CCD based on two factors with five levels, which comprised flour content (50, 55, 60, 65, and 70%), resting time (10, 20, 30, 40, and 50 min) and three replications. Results from ANOVA showed that all factors were statistically significant at p < 0.05. Flour content between 56% and 62%, and resting time within 27 and 50 min, resulted in dough with high stickiness. High-region moisture content was observed for flour content between 60% and 70%, and within 10 and 15 min of resting time. The optimized values for flour content (V1) = 67% and resting time (V2) = 10 min. The predicted model (regression coefficient model) was found to be accurate in predicting the optimum value of factors. The experimental validation showed the average relative deviation for stickiness and moisture content was 8.54% and 1.44%, respectively. The superimposition of the contour plots was successfully developed to identify the optimum region for the lowest stickiness and highest moisture content which were at 67–70% flour content and 10–15 min resting time.

The Improvement of Yield in Formaldehyde Process

2016 ◽  
Vol 719 ◽  
pp. 79-83
Author(s):  
Anupong Intawong ◽  
Somkamol Manchun ◽  
Jeerapat Ngaoprasertwong
Keyword(s):  
Response Surface ◽  
Inlet Temperature ◽  
Optimum Conditions ◽  
Quadratic Regression ◽  
Variable Yield ◽  
Air Inlet ◽  
Optimization Of Process Parameters ◽  
Contour Plots ◽  
Formaldehyde Production ◽  
Central Composite

Various factors influence the efficacy of formaldehyde production. In this study, response surface methodology was applied for optimization of process parameters on the response variable (yield of formaldehyde production: Y) by a central composite design (CCD). Factors studied are the reaction temperature (X1 = 640-660 °C), mole ratio of methanol to oxygen (X2 = 2.34-2.38), mole ratio of steam to methanol (X3 = 0.90-1.10), reaction time (X4 = 22-26 millisecond; ms), and air inlet temperature (X5 = 25-30°C). As a result of CCD evaluation, the predicted quadratic regression model for response variables was significant (p < 0.05). Further 0.9745 R2 values indicated satisfactory fit of the model. In addition, the 3-D response surface and the contour plots derived the obtained model were applied to determine the optimal conditions. The optimum conditions were as follows: X1 = 660 °C, X2 =2.38, X3 = 1.10, X4 = 23.90 ms and X5= 30 °C. Corresponding to these conditions, the experimental response value (yields of formaldehyde production) agreed closely with the predicted yields of 88.61%.

Detection of Titanium Silicide Formation and Phase Transformation by Picosecond Ultrasonics

1992 ◽  
Vol 260 ◽  
Author(s):  
H. -N. Lin ◽  
R. J. Stoner ◽  
H. J. Maris ◽  
J. M. E. Harper ◽  
C. Cabral ◽  
...  
Keyword(s):  
Phase Transformation ◽  
Titanium Silicide ◽  
Silicon Substrates ◽  
Silicide Formation ◽  
Longitudinal Sound Velocity ◽  
Ultrasonic Echo ◽  
Before And After ◽  
Non Destructive ◽  
Ti Films ◽  
Picosecond Ultrasonics

ABSTRACTPicosecond ultrasonics is employed to study the titanium silicide formation sequence for evaporated Ti films on silicon substrates annealed at temperatures between 300 and 800 °C. The measurements show significant differences in the ultrasonic echo pattern before and after the structural phases C49 and C54 are formed, thus indicating that picosecond ultrasonics is a sensitive non-destructive probe of silicide formation. The longitudinal sound velocity has been found to be (8.3 ± 0.2) × 105 cm/sec for C49 TiSi2, and about 5% lower for the C54 phase.

Enzyme-assisted Extraction for Optimized Recovery of Phenolic Bioactives from Peganum hermala Leaves Using Response Surface Methodology

2018 ◽  
Vol 17 (4) ◽  
pp. 349-354
Author(s):  
Qadir Rahman ◽  
Anwar Farooq ◽  
Amjad Gilani Mazhar ◽  
Nadeem Yaqoob Muhammad ◽  
Ahmad Mukhtar
Keyword(s):  
Response Surface Methodology ◽  
Response Surface ◽  
Enzyme Concentration ◽  
Coumaric Acid ◽  
Assisted Extraction ◽  
Pre Treatment ◽  
Optimized Conditions ◽  
Enzyme Complexes ◽  
Hydrolysis Of ◽  
Central Composite

This study investigates the effect of enzyme formulations (Zympex-014, Kemzyme dry-plus and Natuzyme) on recovery of phenolics from Peganum hermala (harmal) leaves, under optimized conditions using response surface methodology. As compared to the other enzyme complexes, the yield (34 g/100g) obtained through Zympex-014-assisted extraction was higher under optimized conditions such as time (75 min), temperature (70°C), pH (6.5) and enzyme concentration (5 g/100 g) using central composite design (CCD). Effectiveness of Zympex-014 towards hydrolysis of P. hermala leaves cell wall was examined by analyzing the control and enzyme-treated leave residues using scanning electron microscope (SEM). GC/MS characterization authenticated the presence of quercetin (1.44), gallic acid (0.23), caffeic acid (0.04), cinnamic acid (0.05), m-coumaric acid (0.23) and p-coumaric acid (0.37 μg/g) as the potent phenolics in Zympex-014 based extract. It can be concluded from the findings of the current work that pre-treatment of P. hermala leaves with Zympex-014 significantly enhanced the recovery of phenolics that supports its potential uses in the nutra-pharamaceutical industry.

Response Surface Methodology towards Optimization of Calotropis Procera Essential oil Extraction by using Supercritical CO2.

2019 ◽  
Vol 09 ◽  
Author(s):  
Hossein Zaeri ◽  
Bahareh Kamyab Moghadas ◽  
Bijan Honarvar ◽  
Ali Shokuhi Rad
Keyword(s):  
Response Surface Methodology ◽  
Essential Oil ◽  
Response Surface ◽  
Extraction Time ◽  
Calotropis Procera ◽  
Retrieval Rate ◽  
The Family ◽  
Effects Of Temperature ◽  
Carbon Dioxide Co2 ◽  
Central Composite

: In this research, the extraction of essential oil from Calotropis Procera with the family name of Asclepiadaceae, by supercritical carbon dioxide (CO2) solvent has been investigated in detail, and the yield and chemical profile of the extracts achieved by this method were compared with those resulted by the conventional Hydro distillation method. To optimize the process parameters of CO2 supercritical extraction (SCE) of the Calotropis Procera, the Response Surface Methodology (RSM) with central composite design (CCD) was employed. The effects of temperature, pressure, and extraction time on the oil yield are considered for investigation. Results showed that the data were sufficiently fitted into the second-order polynomial model. The extraction conditions, including pressure, temperature, and extraction time, were studied between 150-200 bar, 40-50 ºC, and 50-100 min, respectively. The optimal conditions are achieved as the temperature of 47.19ºC, the pressure of 172.2 bar, and time of 86 minutes with the retrieval rate of 31.39%.

scholarly journals Optimizing of Microalgae Scenedesmus sp. Biomass Production in Wet Market Wastewater Using Response Surface Methodology

2021 ◽  
Vol 13 (4) ◽  
pp. 2216
Author(s):  
Najeeha Mohd Apandi ◽  
Mimi Suliza Muhamad ◽  
Radin Maya Saphira Radin Mohamed ◽  
Norshuhaila Mohamed Sunar ◽  
Adel Al-Gheethi ◽  
...  
Keyword(s):  
Response Surface Methodology ◽  
Response Surface ◽  
Biomass Yield ◽  
Biomass Productivity ◽  
Maximum Growth ◽  
Maximum Growth Rate ◽  
Aeration Rate ◽  
Composition Analysis ◽  
Wet Market ◽  
Central Composite

The present study aimed to optimize the production of Scenedesmus sp. biomass during the phycoremediation process. The biomass productivity was optimized using face centred central composite design (FCCCD) in response surface methodology (RSM) as a function of two independent variables that included wet market wastewater concentrations (A) with a range of 10% to 75% and aeration rate (B) with a range of 0.02 to 4.0 L/min. The results revealed that the highest biomass productivity (73 mg/L/d) and maximum growth rate (1.19 day−1) was achieved with the 64.26% of (A) and 3.08 L/min of (B). The GC-MS composition analysis of the biomass yield extract revealed that the major compounds are hexadecane (25%), glaucine (16.2%), and phytol (8.33%). The presence of these compounds suggests that WMW has the potential to be used as a production medium for Scenedesmus sp. Biomass, which has several applications in the pharmaceutical and chemical industry.

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