Nanoscale Elastic Imaging of Aluminum/Low-k Dielectric Interconnect Structures

2000 ◽  
Vol 612 ◽  
Author(s):  
G. S. Shekhawat ◽  
O.V. Kolosov ◽  
G.A.D. Briggs ◽  
E. O. Shaffer ◽  
S. Martin ◽  
...  

AbstractA new characterization tool based on ultrasonic force microscopy (UFM) has been developed to image the nanometer scale mechanical properties of aluminum/low-k polymer damascence integrated circuit (IC) test structures. Aluminum and polymer regions are differentiated on the basis of elastic modulus with a spatial resolution ≤ 10 nm. This technique reveals a reactive-ion etch (RIE)-induced hardening of the low-k polymer that is manifested in the final IC test structure by a region of increased hardness at the aluminum/polymer interface. The ability to characterize nanometer scale mechanical properties of materials used for IC back-end-of-line (BEOL) manufacture offers new opportunities for metrological reliability evaluation of low-k integration processes.

Author(s):  
Nicholas Randall ◽  
Rahul Premachandran Nair

Abstract With the growing complexity of integrated circuits (IC) comes the issue of quality control during the manufacturing process. In order to avoid late realization of design flaws which could be very expensive, the characterization of the mechanical properties of the IC components needs to be carried out in a more efficient and standardized manner. The effects of changes in the manufacturing process and materials used on the functioning and reliability of the final device also need to be addressed. Initial work on accurately determining several key mechanical properties of bonding pads, solder bumps and coatings using a combination of different methods and equipment has been summarized.


2013 ◽  
Vol 58 (1) ◽  
pp. 5-8 ◽  
Author(s):  
J. Borowiecka-Jamrozek

The paper presents mechanical properties of materials used as matrices in diamond impregnated tools. Several powder metallurgy materials were manufactured by the hot press process from various combinations of cobalt (Co SMS, Co Extrafine, Co 400mesh), carbonyl iron (Fe CN) and tungsten (WP30) powders. After consolidation the specimens were tested for density, hardness and tensile properties. The fracture surfaces and materials’ microstructure were observed using the Jeol JSM- 5400 scanning electron microscope and the Leica DM4000 light microscope. The main objective of the work was to determine the effects of the mean particle size of cobalt as well as additions of iron and tungsten on properties of the as-consolidated material.


2020 ◽  
Vol 20 (2) ◽  
pp. 190-194
Author(s):  
Josef Sedlak ◽  
Josef Chladil ◽  
Martin Cerny ◽  
Ales Polzer ◽  
Matus Varhanik ◽  
...  

Mechanik ◽  
2019 ◽  
Vol 92 (4) ◽  
pp. 285-287 ◽  
Author(s):  
Marcin Snopczyński ◽  
Jarosław Kotliński ◽  
Ireneusz Musiałek

With the development of 3D printing technology, there is a development in the use of new printing materials. In practice, it often happens that the constructor does not have full data about the material that he wants to use. The article presents the results of tests of tensile strength of samples printed using the FDM method. 3D printing using the FDM method is widespread, however, the properties of the materials used in this method are still not fully understood. The aim of the research was to obtain information on strength parameters that form the basis for further analyzes.


2020 ◽  
Vol 128 ◽  
pp. 81-88 ◽  
Author(s):  
Paweł Kowalik ◽  
Mariusz Fabijański

The purpose of this study is to present the requirements, methodology, and results of research on the impact of biodegradable oil on plastic components used in the construction of a railway turnout. Briefly discussed are what railroad turnouts are, how they work, and what problems occur with substances used for their lubrication. They have an impact on the mechanical properties and durability of products made of polymeric materials. These types of materials absorb various kinds of chemicals, to a greater or lesser degree, and this affects their properties. For the tests, we used a universal lubrication oil with biodegradable properties, which is its most significant advantage. However, it may not cause deterioration of the turnout operation and change the properties of materials used for its construction. These types of oils require more frequent applications on cooperating components. We used the two most popular polymer materials. The first is high-density polyethylene (HDPE), used to make all kinds of rail spacers, dowels for fixing rails, sleeves, etc. The second, polyurethane (PUR) is most commonly used for rail pads of various shapes. The methodology and results of testing the impact of a lubricant (biodegradable oil) on the change of mechanical properties such as strength and hardness are presented. The tests were carried out at various temperatures; the time of exposure to oil was seven days; the results were referred to samples conditioned under standard conditions. The tests carried out on the impact of the biodegradable lubricant on polymeric materials (HDPE and PUR) showed little effect on the change of strength parameters of these materials. Celem niniejszego opracowania jest przedstawienie wymagań, metodyki oraz wyników badań oddziałania biodegradowalnego oleju na elementy z tworzyw sztucznych stosownych w budo-wie rozjazdu kolejowego. Krótko omówiono czym są rozjazdy kolejowe i jak działają oraz jakie występują problemy z substancjami używanymi do ich smarowania, które nie pozostają bez wpływu na właściwości mechaniczne i trwałość wyrobów z materiałów polimerowych. Materiały tego typu wchłaniają różnego rodzaju substancje chemiczne w większym lub mniejszym stopniu, a to ma wpływ na ich właściwości. Do badań został wykorzystany uniwersalny olej do smarowania o biodegradowalnych właściwościach, co jest jego największą zaletą. Jednak nie może on powodować pogorszenia pracy rozjazdu oraz zmieniać właściwości materiałów użytych do jego budowy. Tego typu oleje wymagają częstszego aplikowania na elementy współpracujące ze sobą. W pracy wykorzystano dwa najbardziej popularne materiały polimerowe. Pierw-szy to polietylen o dużej gęstości (HDPE), z którego wykonuje się wszelkiego rodzaju przekładki podszynowe, dyble do mocowania szyn, tuleje, itp. Drugi to poliuretan (PUR) stosowany najczęściej na przekładki podszynowe o różnym kształcie. Zaprezentowano metodykę i wyniki ba-dań oddziaływania środka smarnego (biodegradowalnego oleju) na zmianę właściwości mechanicznych takich jak wytrzymałość oraz twardość. Badania zostały przeprowadzone w różnych temperaturach, a czas ekspozycji na olej wynosił 7 dób, wyniki odniesiono do próbek klimatyzowanych w standardowych warunkach. Przeprowadzone badania oddziaływania biodegradowalnego środka smarnego na tworzywa polimerowe (HDPE i PUR), wykazały niewielki wpływ na zmianę parametrów wytrzymałościowych tych materiałów.


1991 ◽  
Vol 239 ◽  
Author(s):  
Stephen D. Senturia

ABSTRACTMicrosensors are measurement devices fabricated using planar integrated circuit technology together with enhancements generically called “micromachining”. It is well known that the thin-film materials used in microelectronics can have properties which differ from their bulk counterparts. In addition, thin-film materials exhibit residual stress, which is known to be strongly process dependent. The sensor designer must understand how the detailed process used to fabricate a particular device impacts the specific mechanical properties, hence, the expected mechanical device performance. This paper illustrates the problem of process-dependent material properties using examples of residual stress of several materials, and then presents an object-oriented material-property database which is being developed as part of a CAD system for microelectromechan-ical systems (MEMCAD).


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