3D FIB and AFM mapping of Nanoindentation Zones

2000 ◽  
Vol 649 ◽  
Author(s):  
T.J. Steer ◽  
G. Möbus ◽  
O. Kraft ◽  
T. Wagner ◽  
B.J. Inkson
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Mapping Method ◽  
Three Dimensions ◽  
Mapping Technique ◽  
Film Material ◽  
Cross Sectional ◽  
Data Set ◽  
3D Data ◽  
Computer Based

ABSTRACTA novel technique has been developed to examine site-specific, subsurface microstructures in three dimensions. A 3D data set is collected by successive cross-sectional slicing using a gallium focused ion beam (FIB) and imaging using ion-induced secondary electrons, enabling a 3D microstructure map to be generated using computer-based reconstruction techniques. In the first instance, this 3D FIB mapping technique has been applied to copper-based epitaxial metal multilayer coatings which have been deformed by nanoindentation. It is possible to produce 3D profiles of the deformed subsurface interfaces. These individual interface maps allow analysis of the deformation in terms of both the thickness of individual layers and that of the entire film. Material flow, which is seen as pile-up and residual indent zones around the indent, can thus be precisely characterised. The site at which the sectioning is to be carried out can be chosen with high spatial resolution; consequently, nanoscale mechanical properties can be linked directly with an area's microstructure.In an attempt to examine the errors involved in this 3D mapping method the 3D FIB map of the surface of a residual indent has been compared to an atomic force microscopy (AFM) scan of the same region. The sources and significance of the errors are discussed with reference to ways in which they might be reduced.

3D Mapping of Subsurface Cracks in Alumina Using FIB

2000 ◽  
Vol 649 ◽  
Author(s):  
B.J. Inkson ◽  
H.Z. Wu ◽  
T. Steer ◽  
G. Möbus
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Mapping Method ◽  
New Method ◽  
3D Mapping ◽  
Data Set ◽  
Subsurface Cracks ◽  
3D Data ◽  
Indentation Site

ABSTRACTA new method has been developed to map cracks in 3D using focused ion beam (FIB) microscopy. Using the FIB, many parallel 2D slices are cut in the specimen. Imaging each 2D slice down several directions enables the 3D co-ordinates of features in the slice to be determined. Computer alignment and reconstruction of the 2D slices generates a 3D data set of the analysed zone. The 3D mapping method has been applied to the analysis of the cracks around an indentation site in a Al2O3-5vol.%SiC nanocomposite. This reveals the 3D location and morphology of radial and deep lateral cracks at the indent periphery, surface localised crack clusters, and a crack deficient zone close to the indent centre.

scholarly journals Analysis of polycrystalline microstructure of AlMgSc alloy observed by 3D EBSD

2020 ◽  
Author(s):  
Jaromír Kopeček ◽  
Jakub Staněk ◽  
Stanislav Habr ◽  
Filip Seitl ◽  
Lukas Petrich ◽  
...  
Keyword(s):  
Spatial Distribution ◽  
Grain Boundaries ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Three Dimensional ◽  
Morphological Characteristics ◽  
Polycrystalline Materials ◽  
Electron Backscattered Diffraction ◽  
Data Set ◽  
3D Data

The aim of this paper is to evaluate an ambitious imaging experiment and to contribute to the methodology of statistical inference of the three-dimensional microstructure of polycrystalline materials. The microstructure of the considered Al-3Mg-0.2Sc alloy was investigated by three-dimensional electron backscattered diffraction (3D-EBSD), i.e., tomographic imaging with xenon plasma focused ion beam (Xe-FIB) alongside EBSD. The samples were subjected to severe plastic deformations by equal channel angular dressing (ECAP) and annealed subsequently prior to the mapping. First we compared the misorientation level needed for  a reliable segmentation of grains distinguishing between conventional evaluation of two-dimensional cuts and the 3D data set. Then, using methods of descriptive spatial statistics, various morphological characteristics of a large number of grains were analyzed, as well as the crystallographic texture and the spatial distribution of grain boundaries. According to the results stated so far in the literature, an even microstructure was expected, nevertheless local inhomogeneities in grains and grain boundaries with regard to their size, texture and spatial distribution were observed and justified.

Automated Diagonal Slice and View Solution for 3D Device Structure Analysis

2018 ◽  
Author(s):  
Sang Hoon Lee ◽  
Jeff Blackwood ◽  
Stacey Stone ◽  
Michael Schmidt ◽  
Mark Williamson ◽  
...  
Keyword(s):  
Cross Section ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Image Data ◽  
Planar Surface ◽  
Device Structure ◽  
Cross Sectional ◽  
Device Structures ◽  
The Cross ◽  
Planar Analysis

Abstract The cross-sectional and planar analysis of current generation 3D device structures can be analyzed using a single Focused Ion Beam (FIB) mill. This is achieved using a diagonal milling technique that exposes a multilayer planar surface as well as the cross-section. this provides image data allowing for an efficient method to monitor the fabrication process and find device design errors. This process saves tremendous sample-to-data time, decreasing it from days to hours while still providing precise defect and structure data.

TEM Sample Preparation Tricks for Advanced DRAMs

2015 ◽  
Author(s):  
Ching Shan Sung ◽  
Hsiu Ting Lee ◽  
Jian Shing Luo
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Sample Preparation ◽  
Integrated Circuit ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Tem Analysis ◽  
Cross Sectional ◽  
Transmission Electron ◽  
Characterization Of Materials

Abstract Transmission electron microscopy (TEM) plays an important role in the structural analysis and characterization of materials for process evaluation and failure analysis in the integrated circuit (IC) industry as device shrinkage continues. It is well known that a high quality TEM sample is one of the keys which enables to facilitate successful TEM analysis. This paper demonstrates a few examples to show the tricks on positioning, protection deposition, sample dicing, and focused ion beam milling of the TEM sample preparation for advanced DRAMs. The micro-structures of the devices and samples architectures were observed by using cross sectional transmission electron microscopy, scanning electron microscopy, and optical microscopy. Following these tricks can help readers to prepare TEM samples with higher quality and efficiency.

Site-Specific Low Angle Plasma FIB Milling for Cross-Sectional Electrical Characterization

2019 ◽  
Author(s):  
Chuan Zhang ◽  
Jane Y. Li ◽  
John Aguada ◽  
Howard Marks
Keyword(s):  
Cross Section ◽  
Focused Ion Beam ◽  
Electrical Characteristic ◽  
Preparation Method ◽  
Ion Beam ◽  
Grazing Angle ◽  
Electrical Characterization ◽  
Sample Preparation Method ◽  
Cross Sectional ◽  
Site Specific

Abstract This paper introduces a novel sample preparation method using plasma focused ion-beam (pFIB) milling at low grazing angle. Efficient and high precision preparation of site-specific cross-sectional samples with minimal alternation of device parameters can be achieved with this method. It offers the capability of acquiring a range of electrical characteristic signals from specific sites on the cross-section of devices, including imaging of junctions, Fins in the FinFETs and electrical probing of interconnect metal traces.

Comparison of Focused Ion Beam and Conventional Techniques on Tem Specimen Preparation of Metal-Ceramic Interfaces

1998 ◽  
Vol 4 (S2) ◽  
pp. 860-861 ◽  
Author(s):  
A. Ramirez de Arellano López ◽  
W.-A. Chiou ◽  
K. T. Faber
Keyword(s):  
Focused Ion Beam ◽  
Ceramic Coating ◽  
Steel Substrate ◽  
Ion Beam ◽  
Specimen Preparation ◽  
Inhomogeneous Materials ◽  
Cross Sectional ◽  
Fine Grain ◽  
Basic Industry ◽  
Coated Surface

The results of TEM analyses of materials are critically dependent on the quality of the sample prepared. Although numerous techniques have been developed in the last two decades, differential thinning of inhomogeneous materials remains a serious problem. Recently, focused ion beam (FIB) technique has been introduced for cross-sectional sample preparation for TEM and SEM.A novel system for depositing a fine-grain (∼ 200 nm) ceramic coating on a metal surface via a patent pending Small-Particle Plasma Spray (SPPS) technique has been developed at the Basic Industry Research Laboratory of Northwestern University. To understand the properties of the coated surface, the ceramic/metal interface and the microstructure of the ceramic coating must be investigated. This paper presents a comparison of the microstructure of an A12O3 coating on a mild steel substrate prepared using conventional and FEB techniques.

Cross-sectional microanalysis for tracking the effect of solvent on the morphological evaluation of PLA/AgNWs bionanocomposties

2021 ◽  
pp. 096739112110230
Author(s):  
Meltem Sezen ◽  
Busra Tugba Camic
Keyword(s):  
Focused Ion Beam ◽  
Silver Nanowires ◽  
Low Cost ◽  
Ion Beam ◽  
Lower Surface ◽  
Polymer Matrices ◽  
Elemental Distribution ◽  
Medical Sciences ◽  
Surface Area Ratio ◽  
Cross Sectional

The emphasis of biocompatible polymer applications in medical sciences and biotechnology has remarkably increased. Developing new low-cost, low-toxicity and lightweight composite forms of biopolymers has become even more attractive since the addition of new species into polymer matrices assist to improve biomedical activities of such materials to a higher extend. Developments in nanoscience and nanotechnology recently contribute to controlled fabrication and ultraprecise diagnosis of such materials. This study concerns the observation of solution processing effects in the fabrication of porous PLA/AGNWs bionanocomposite coatings using electron and ion processing based serial cross-sectioning and high-resolution imaging. The nanostructuring and characterization were both performed in a focused ion-beam-scanning electron microscope (FIB-SEM) platform. HR-SEM imaging was conducted on-site to track solvent based morphological property alterations of PLA and PLA/AgNWs structures. Simultaneous SEM-EDS analyses revealed the elemental distribution and the chemical composition along the cross-sectioned regions of the samples. Accordingly, it was observed that, in case of acetone dissolved materials, both pristine PLA and PLA/AgNWs samples sustained their foamy structure. When chloroform was used as the solvent, the porosity of the polymer matrices was less and the resulting structure was found to be denser than samples dissolved in acetone with a lower surface area ratio inside the material. This can be attributed to the rapid volatilization of acetone compared to chloroform, and hence the formation of interconnected pore network. For both nanocomposite biopolymers dissolved in acetone and chloroform, silver nanowires were homogeneously distributed throughout PLA matrices.

Extending AFM Phase Image of Nanocomposite Structures to 3D using FIB

2012 ◽  
Vol 1421 ◽  
Author(s):  
Russell J. Bailey ◽  
Remco Geurts ◽  
Debbie J. Stokes ◽  
Frank de Jong ◽  
Asa H. Barber
Keyword(s):  
Phase Contrast ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Polymer Nanocomposite ◽  
Three Dimensions ◽  
Phase Image ◽  
Force Microscopy ◽  
Atomic Force ◽  
Mechanical Information ◽  
Nanocomposite Structures

ABSTRACTThe mechanical behavior of nanocomposites is critically dependent on their structural composition. In this paper we use Focused Ion Beam (FIB) microscopy to prepare surfaces from a layered polymer nanocomposite for investigation using phase contrast atomic force microscopy (AFM). Phase contrast AFM provides mechanical information on the surface examined and, by combining with the sequential cross-sectioning of FIB, can extend the phase contract AFM into three dimensions.

Imaging and reconstruction of the cytoarchitecture of axonal fibres: enabling biomedical engineering studies involving brain microstructure

2021 ◽  
Author(s):  
Andrea Bernardini ◽  
Marco Trovatelli ◽  
Michal Klosowski ◽  
Matteo Pederzani ◽  
Davide Zani ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Cell Organelles ◽  
Convection Enhanced Delivery ◽  
Cross Sectional ◽  
Drug Molecules ◽  
Fiber Tracts ◽  
Brain Microstructure ◽  
3D Volume ◽  
The Brain

Abstract There is an increased need and focus to understand how local brain microstructure affects the transport of drug molecules directly administered to the brain tissue, for example in convection-enhanced delivery procedures. This study reports the first systematic attempt to characterize the cytoarchitecture of commissural, long association and projection fibers, namely: the corpus callosum, the fornix and the corona radiata. Ovine samples from three different subjects were stained with osmium tetroxide (to enhance contrast from cell organelles and the fibers), embedded in resin and then imaged using scanning electron microscope combined with focused ion beam milling to generate 3D volume reconstructions of the tissue at subcellular spatial resolution. Particular focus has been given to the characteristic cytological feature of the white matter: the axons and their alignment in the tissue. Via 2D images a homogeneous myelination has been estimated via detection of ~40% content of lipids in all the different fiber tracts. Additionally, for each tract, a 3D reconstruction of relatively large volumes (15μm x 15μm x 15μm – including a significant number of axons) has been performed. Namely, outer axonal ellipticity, outer axonal cross-sectional area and their relative perimeter have been measured. The study of well-resolved microstructural features provides useful insight into the fibrous organization of the tissue, whose micromechanical behaviour is that of a composite material presenting elliptical tortuous tubular fibers embedded in the extra-cellular matrix. Drug flow can be captured through microstructurally-based models, leading to a workflow to enable physically-accurate simulations of drug delivery to the targeted tissue.

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