Reproducibility of Nano- and Micro-Scale Multi-Point Probe Sheet Resistance Measurements

2002 ◽  
Vol 738 ◽  
Author(s):  
Christian L. Petersen ◽  
Daniel Worledge ◽  
Peter R. E. Petersen

ABSTRACTWe have investigated the reproducibility of micro- and nano-scale measurements of sheet resistance performed with micro-fabricated multi-point probes. The probes consisted of Au coated SiO2 cantilevers extending from a Si base. The measurements were done with a four-point probe technique on thin Au films, the probe electrode spacing ranging from 18 μm to 1.5 μm. We find that the standard deviation of repeated sheet resistance measurements ranges from 0.2% at 18 μm spacing to 2.6% at 1.5 μm spacing. It is inversely proportional to the probe electrode spacing. This behaviour is expected if the resolution of the measurements is governed by the positional errors of the probe electrode tips. The corresponding standard deviation of the probe tip positions (in both lateral directions) is calculated to be approximately 20 nm. We argue that these positional errors depend on the probe cantilever amplitude at the time of contacting the surface. The amplitude is inversely proportional to the square root of the cantilever spring constant, indicating that stiff cantilevers give the best reproducibility. We estimate the limiting reproducibility of multi-point probes with nano-scale electrode spacing.

2010 ◽  
Vol 431-432 ◽  
pp. 523-526
Author(s):  
Han Lian Liu ◽  
Chuan Zhen Huang ◽  
Shou Rong Xiao ◽  
Hui Wang ◽  
Ming Hong

Under the liquid-phase hot-pressing technique, the multi-scale titanium diboride matrix nanocomposite ceramic tool materials were fabricated by adding both micro-scale and nano-scale TiN particles into TiB2 with Ni and Mo as sintering aids. The effect of content of nano-scale TiN and sintering temperature on the microstructure and mechanical properties was studied. The result showed that flexural strength and fracture toughness of the composites increased first, and then decreased with an increase of the content of nano-scale TiN, while the Vickers hardness decreased with an increase of the content of nano-scale TiN. The optimal mechanical properties were flexural strength 742 MPa, fracture toughness 6.5 MPa•m1/2 and Vickers hardness 17GPa respectively. The intergranular and transgranular fracture mode were observed in the composites. The metal phase can cause ductility toughening and crack bridging, while crack deflection and transgranular fracture mode could be brought by micro-scale TiN and nano-scale TiN respectively.


2019 ◽  
Vol 956 ◽  
pp. 332-341 ◽  
Author(s):  
Jia Fu

The performance prediction of C-S-H gel is critical to the theoretical research of cement-based materials. In the light of recent computational material technology, modeling from nano-scale to micro-scale to predict mechanical properties of structure has become research hotspots. This paper aims to find the inter-linkages between the monolithic "glouble" C-S-H at nano-scale and the low/high density C-S-H at the micro-scale by step to step method, and to find a reliable experimental verification method. Above all, the basic structure of tobermorite and the "glouble" C-S-H model at nano-scale are discussed. At this scale, a "glouble" C-S-H structure of about 5.5 nm3 was established based on the 11Å tobermorite crystal, and the elastic modulus ​​of the isotropic "glouble" is obtained by simulation. Besides, by considering the effect of porosity on the low/high density of the gel morphology, the C-S-H phase at micro-scale can be reversely characterized by the "glouble". By setting different porosities and using Self-Consistent and Mori-Tanaka schemes, elastic moduli of the low density and high density C-S-H ​​from that of "glouble" are predicted, which are used to compare with the experimental values of the outer and inner C-S-H. Moreover, the nanoindentation simulation is carried out, where the simulated P-h curve is in good agreement with the accurate experimental curve in nanoindentation experiment by the regional indentation technique(RET), thus the rationality of the "glouble" structure modeled is verified and the feasibility of Jennings model is proved. Finally, the studies from the obtained ideal "glouble" model to the C-S-H phase performance has realized the mechanical properties prediction of the C-S-H structure from nano-scale to micro-scale, which has great theoretical significance for the C-S-H structural strengthening research.


2013 ◽  
Vol 381 ◽  
pp. 17-22 ◽  
Author(s):  
Y. Taki ◽  
K. Shinozaki ◽  
T. Honma ◽  
T. Komatsu ◽  
L. Aleksandrov ◽  
...  

2002 ◽  
Vol 739 ◽  
Author(s):  
H. McNally ◽  
S. W. Lee ◽  
D. Guo ◽  
M. Pingle ◽  
D. Bergstrom ◽  
...  

ABSTRACTBio-inspired assembly, through the use of bio-molecules such as DNA and proteins, will play a critical role in the advancement of novel sensing techniques and for the realization of heterogeneous integration of materials. For many of these applications, such as antibody-based biosensor and the study of controlled cell growth, DNA and protein patterning techniques are crucial. We will present an update of our work on protein patterning techniques using microelectronic fabrication, DNA hybridization and biotin-streptavidin pairing. To show its application in biological inspired self-assembly, this technique was used successfully in the self-assembly of 20 nm streptavidin conjugated gold particles. In addition, the integration of nano-and micro-scale heterogeneous materials is very important for novel material synthesis and electro-optic applications. We will present an update on our work to assemble silicon electronic devices using DNA/charged molecules and electric fields. Devices are fabricated, released, charged with molecules, and subsequently manipulated in electric fields. The techniques described can be used to integrate the hybrid devices such as nano- or micro-scale resistors, PN diodes, and MOSFETs on silicon or other substrates such as glass, plastic, etc.


Author(s):  
Viral K. Patel ◽  
Jamal Seyed-Yagoobi

Micro-scale two-phase flow heat transport involves specialized devices that are used to remove large amounts of heat from small surface areas. They operate by circulating a working fluid through a heated space which causes phase change from liquid to vapor. During this process, a significant amount of heat is transported away from the heat source. Micro-scale heat transport devices are compact in size and the heat transfer coefficient can be orders of magnitude higher than in macro-scale for similar operating conditions. Thus, it is of interest to develop such devices for cooling of next-generation electronics and other applications with extremely large heat fluxes. The heat transport device presented in this paper is driven by electrohydrodynamic (EHD) conduction pumping. In EHD conduction pumping, when an electric field is applied to a dielectric liquid, flow is induced. The pump is installed in a two-phase flow loop and has a circular 1 mm diameter cross section with electrode spacing on the order of 120 μm. It acts to circulate the fluid in the loop and has a simple yet robust, non-mechanical design. Results from two-phase flow experiments show that it is easily controlled and such electrically driven pumps can effectively be used in heat transport systems.


2018 ◽  
Vol 36 (6_suppl) ◽  
pp. 563-563
Author(s):  
Kevin George King ◽  
Sumeet Bhanvadia ◽  
Saum Ghodoussipour ◽  
Darryl Hwang ◽  
Bino Varghese ◽  
...  

563 Background: In metastatic nonseminomatous testicular germ cell tumor (NSGCT), post-chemotherapy retroperitoneal lymph node dissection (PC-RPLND) is indicated for residual masses > 1 cm because of these 45% will be fibrosis/necrosis, 45% will be teratoma and 15% will be viable malignancy. There is no imaging test that reliably distinguishes lymph nodes (LNs) with tumor (teratoma or malignancy) from LNs with fibrosis/necrosis. We evaluated whether quantitative CT texture analysis (TA) could make this differentiation. Methods: Pre- and post-chemotherapy CTs (all same phase and slice thickness) were reviewed in 22 NSGCT patients with RP LNs > 1 cm post chemotherapy. After manual segmentation of RP LNs on a 3D workstation, 187 TA metrics were derived, using 2D/3D gray-level co-occurrence matrix (GLCM), 2D/3D gray-level difference matrix (GLDM), and spectral analysis. Metrics were derived 2 ways: from post-chemotherapy CTs alone, and also as a difference between pre- and post-chemotherapy CTs, resulting in 374 metrics. PC-RPLND pathology was correlated with CT data at 88 LN stations in these 22 patients. Results: 15 imaging metrics showed a significant difference (p ≤ 0.05) between LN stations with only fibrosis/necrosis and those with teratoma or viable tumor. Seven were derived from the difference between pre- and post-chemotherapy CTs: 4 using a 2D GLCM (coronal standard deviation, coronal square root of variance, coronal mean, and coronal sum of average), and 3 using a 2D GLDM (axial variance, axial square root of variance, and coronal variance). The other 8 were derived from post-chemotherapy CTs alone: 7 using a 2D GLCM (sagittal square root of variance, sagittal standard deviation, coronal square root of variance, coronal mean, coronal standard deviation, coronal sum of average, and coronal entropy) and 1 using a 2D GLDM (sagittal sum entropy). Conclusions: CT TA shows promise in differentiating necrosis from teratoma or viable tumor in RP LNs in post-chemotherapy NSGCT. A larger study is needed to further test this method, towards a long-term goal of potentially allowing some patients to avoid PC-RPLND.


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