Multilayer Transparent Conducting Oxide Thin Film Produced by Linear Combinatorial Synthesis

ABSTRACTMultilayer transparent conducting oxide (TCO) structures consisting of alternating layers of tin oxide (SnO2) and cadmium oxide (CdO) pairs was studied. A low-pressure metalorganic chemical vapor deposition with a linear combinatorial approach was used to fabricate the libraries. Three libraries were studied with the pair thickness range covered from 500 nm to 4 nm. For pairs thicker than 150 nm, the material properties of the multilayer simply show a combination of CdO and SnO2 characteristics. When pair thinner than 70 nm, the interface effect started emerging. As pairs became thinner than 20 nm, the new compound phase was formed.