Large-area Deposition of Amorphous Silicon Alloys Using a Roll-to-roll Operation
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AbstractLarge-area deposition of thin-film amorphous silicon alloy triple-junction solar cells on lightweight and flexible stainless steel substrate is described. The proprietary roll-to-roll operation enables continuous depositions of sophisticated multi-layer structures. The deposition methods include sputtering and plasma-enhanced chemical vapor depositions. Spectrumsplitting triple-junction solar cell design, manufacturing processes, and product applications are presented.
2014 ◽
Vol 85
(4)
◽
pp. 046101
◽
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