Fluorine Doping of Pyrogenic Silica
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ABSTRACTThe incorporation of atomic fluorine into flame synthesized silica boules has been investigated. Soot boules were doped with fluorine using three different methods: (A) in a low temperature process, using XeF2 as the fluorinating agent prior to consolidation, (B) utilizing SiF4 or SF6 in the reagent gas mix during the combustion synthesis and soot deposition step and (C) in situ treatment with SF6 during the dehydration/ consolidation step at elevated temperatures. All three methods produced uniformly down-doped glass after consolidation, although the maximum fluorine incorporation and level of down-doping for each method followed A <B <C. Fluorine incorporation mechanisms are proposed for each method.
2013 ◽
Vol 652-654
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pp. 871-876
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2014 ◽
Vol 778-780
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pp. 358-361
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1975 ◽
Vol 33
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pp. 58-59
1988 ◽
Vol 46
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pp. 626-627
1993 ◽
Vol 51
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pp. 842-843
1989 ◽
Vol 47
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pp. 652-653
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Vol 48
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pp. 530-531
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