scholarly journals Distributed MEMS Sensors using Plasmonic Antenna Array Embedded Sagnac Interferometer

2021 ◽  
Author(s):  
Anita Garhwal ◽  
Arumona Edward Arumona ◽  
Phichai Youplao ◽  
Kanad Ray ◽  
Preecha Yupapin
Keyword(s):  
Polarized Light ◽  
Electron Cloud ◽  
Sagnac Interferometer ◽  
Micro Electro Mechanical Systems ◽  
Source Power ◽  
Distributed Sensors ◽  
Novel Device ◽  
Resonator Structure ◽  
Mems Resonator ◽  
Input Source

Abstract A micro Sagnac interferometer is proposed for electron cloud distributed sensors formed by an integrated (micro-electro-mechanical systems) MEMS resonator structure. The Sagnac interferometer consists of four microring probes integrated into a Sagnac loop. Each of the microring probes is embedded with the silver bars to form the plasmonic wave oscillation. The polarized light of 1.50µm wavelength is input into the interferometer, which is polarized randomly into upstream and downstream directions. The polarization outputs can be controlled by the space-time input at the Sagnac port. Electrons are trapped and oscillated by the whispering gallery modes (WGMs), where the plasmonic antennas are established and applied for wireless fidelity (WiFi) and light fidelity (LiFi) sensing probes, respectively. Four antenna gains are 2.59dB, 0.93dB, 1.75dB, and 1.16dB, respectively. In manipulation, the sensing probe electron densities are changed by input source power variation. When the electron cloud is excited by the microscopic medium, where the change in electron density is obtained and reflected to the required parameters. Such a system is a novel device that can be applied for brain-device interfering with the dual-mode sensing probes. The obtained WGM sensors are 1.35µm-2, 0.90µm-2, 0.97µm-2 and, 0.81µm-2, respectively. The WGMs behave as a four-point probe for the electron cloud distributed sensors, where the electron cloud sensitivities of 2.31prads-1mm3 (electrons)-1, 2.27prads-1mm3 (electrons)-1, 2.22prads-1mm3(electrons)-1, 2.38prads-1mm3(electrons)-1 are obtained, respectively.

scholarly journals Microring Distributed Sensors Using Electron Cloud Generated by Four-point Probe Sagnac Interferometer

2021 ◽  
Author(s):  
Anita Garhwal ◽  
Arumona Edward Arumona ◽  
Kanad Ray ◽  
Phichai Youplao ◽  
Ghanshyam Singh ◽  
...  
Keyword(s):  
Polarized Light ◽  
Input Power ◽  
Space Time ◽  
Electron Cloud ◽  
Sagnac Interferometer ◽  
Source Power ◽  
Distributed Sensors ◽  
Time Modulation ◽  
Modulation Control ◽  
Time Projection

A micro Sagnac interferometer integration is proposed for electron cloud distributed sensors. The Sagnac interferometer consists of four microring probes integrated into a Sagnac loop. Each of the microring probes is embedded with the silver bars to form the plasmonic wave oscillation. At the center microrings, electrons are trapped and oscillated by the whispering gallery modes (WGMs), where the plasmonic antennas are established and applied for wireless fidelity (WiFi) and light fidelity (LiFi) transmissions for distributed sensors. The antenna gains are 2.59dB, 0.93dB, 1.75dB, and 1.16dB respectively for the four antennas formed at the center microrings. The polarized light of 1.50µm wavelength is fed into the interferometer input, which is polarized randomly into upstream and downstream directions. The polarization components can be obtained by the space-time modulation control. By controlling the electron cloud spin orientation, the space-time projection can be applied, and the ultra-high measurement resolution can be obtained in terms of fast switching time (change in phase). In manipulation, the applied stimuli are substituted by the change in input source power. The light input power variation causes a change in electron cloud density. Similarly, when the electron cloud is excited by the microscopic medium, which can be employed as the microscopic sensors. The WGM sensors have sensitivities of 1.35µm-2, 0.90µm-2, 0.97µm-2 and, 0.81µm-2, respectively. The WGMs behave as a four-point probe for the electron cloud distributed sensors, where the electron cloud sensitivities of 2.31 prads-1mm3 (electrons)-1, 2.27prads-1mm3 (electrons)-1, 2.22 prads-1mm3(electrons)-1, 2.38prads-1mm3(electrons)-1 are respectively obtained.

scholarly journals Evaluation of Residual Stress of C Oriented AlN/Si (111) and Its Impact on Mushroom Shaped Piezoelectric Resonator 

2021 ◽  
Author(s):  
AKHILESH PANDEY ◽  
Shankar Dutta ◽  
Nidhi Gupta ◽  
Davinder Kaur ◽  
R. Raman
Keyword(s):  
Residual Stress ◽  
Residual Stresses ◽  
Mode Shapes ◽  
Quality Factors ◽  
Resonator Structure ◽  
Resonator Design ◽  
Mems Resonator ◽  
Mems Resonators ◽  
Quality Factor Q ◽  
Preferred Oriented

Abstract Aluminum nitride-based MEMS resonators are one of the interesting recent research topics for its tremendous potential in a wide variety of applications. This paper focuses on the detrimental effect of residual stress on the AlN based MEMS resonator design for acoustic applications. The residual stress in the sputtered c axis (<001>) preferred oriented AlN layers on Si (111) substrates are studied as a function of layer thickness. The films exhibited compressive residual stresses at different thickness values: -1050 MPa (700 nm), -500 MPa (900 nm), and -230 MPa (1200 nm). A mushroom-shaped AlN based piezoelectric MEMS resonator structure has been designed for the different AlN layer thicknesses. The effect of the residual stresses on the mode shapes, resonant frequencies, and quality factor (Q) of the resonator structures are studied. The resonant frequency of the structures are altered from 235 kHz, 280 kHz, and 344 kHz to 65 kHz, 75 kHz and 371 kHz due to the residual stress of -1050 MPa (thickness: 700 nm), -500 MPa (thickness: 900 nm) and -230 MPa (thickness: 1200 nm) respectively. At no residual stress, the quality factors of the resonator structures are 248, 227, 241 corresponding to the 700 nm, 900 nm, and 1200 nm thick AlN layers respectively. The presence of the residual stress reduced the Q values from 248 (thickness: 700 nm), 227 (thickness: 900 nm), 241 (thickness: 1200 nm) to 28, 53, and 261 respectively.

scholarly journals Fully-Differential TPoS Resonators Based on Dual Interdigital Electrodes for Feedthrough Suppression

Micromachines ◽  
2020 ◽  
Vol 11 (2) ◽  
pp. 119 ◽  
Author(s):  
Yi Zhang ◽  
Jing-Fu Bao ◽  
Xin-Yi Li ◽  
Xin Zhou ◽  
Zhao-Hui Wu ◽  
...  
Keyword(s):  
Fundamental Principle ◽  
Electrical Measurements ◽  
Element Analysis ◽  
Micro Electro Mechanical Systems ◽  
Fully Differential ◽  
Mems Resonator ◽  
Interdigital Electrodes ◽  
Negative Effect ◽  
Phase Signal ◽  
On Chip

As one of the core components of MEMS (i.e., micro-electro-mechanical systems), thin-film piezoelectric-on-silicon (TPoS) resonators experienced a blooming development in the past decades due to unique features such as a remarkable capability of integration for attractive applications of system-on-chip integrated timing references. However, the parasitic capacitive feedthrough poses a great challenge to electrical detection of resonance in a microscale silicon-based mechanical resonator. Herein, a fully-differential configuration of a TPoS MEMS resonator based on a novel structural design of dual interdigital electrodes is proposed to eliminate the negative effect of feedthrough. The fundamental principle of feedthrough suppression was comprehensively investigated by using FEA (i.e., finite-element analysis) modeling and electrical measurements of fabricated devices. It was shown that with the help of fully-differential configuration, the key parameter of SBR (i.e., signal-to-background ratio) was significantly enhanced by greatly suppressing the in-phase signal. The S-parameter measurement results further verified the effectiveness of this novel feedthrough suppression strategy, and the insertion loss and SBR of proposed TPoS resonators were improved to 4.27 dB and 42.47 dB, respectively.

Design and evaluation of a micro resonator structure as a biosensor for droplet analysis with a standard fabrication method

Sensor Review ◽  
2022 ◽  
Vol ahead-of-print (ahead-of-print) ◽  
Author(s):  
Amin Eidi ◽  
Mousa Shamsi ◽  
Habib Badri Ghavifekr
Keyword(s):  
Electromechanical Coupling ◽  
Damping Factor ◽  
Aqueous Environment ◽  
Fabrication Method ◽  
Mechanical Resonator ◽  
Micro Electro Mechanical Systems ◽  
Content Type ◽  
Resonator Structure ◽  
Mems Technology ◽  
Target Molecules

Purpose In this work, the sensing and actuating elements are designed with interdigitated capacitors away from the sensitive element on which the droplet is placed. This pattern helps to prevent interference of electrical elements with the droplet. Choosing shear resonance mode at this proposed structure minimizes the damping effect of droplet touch by the resonator structure. The glass-based standard fabrication method of the proposed biosensor is presented exactly. Design/methodology/approach Mechanical resonator sensors are extremely limited because of the high damping factor and the high electrical conductivity in the aqueous environment. In this work, a molecule detector biosensor is proposed for droplet analysis, which is possible to fabricate using micro-electro-mechanical systems (MEMS) technology. By electromechanical coupling of resonators as a mechanical resonator structure, a standing mechanical wave is formed at this structure by electrostatic actuating elements. Findings In this paper, a mechanical resonator structure as a biosensor is proposed for micro-droplet analysis that can be fabricated by MEMS technology. It is designed at a lower cost fabrication method using electrostatic technology and interdigitated capacitors. The response of the biosensor displacement frequency at the resonance frequency of the desired mode is reasonable for measuring the capacitive changes of its output. The mass sensitivity of the proposed biosensor is in the range of 1 ng, and it has a large sensitive area for capturing target molecules. Originality/value To evaluate the quality of the proposed design, the stimulated analysis is conducted by COMSOL and results are presented.

Dual MEMS Resonator Structure for Temperature Sensor Applications

2017 ◽  
Vol 64 (8) ◽  
pp. 3368-3376 ◽  
Author(s):  
Humberto Campanella ◽  
Margarita Narducci ◽  
Srinivas Merugu ◽  
Navab Singh
Keyword(s):  
Temperature Sensor ◽  
Sensor Applications ◽  
Resonator Structure ◽  
Mems Resonator

scholarly journals Polarization-Dependent Optical Properties and Optoelectronic Devices of 2D Materials

Research ◽  
2020 ◽  
Vol 2020 ◽  
pp. 1-35
Author(s):  
Ziwei Li ◽  
Boyi Xu ◽  
Delang Liang ◽  
Anlian Pan
Keyword(s):  
Light Emission ◽  
2D Materials ◽  
Scientific Discovery ◽  
Optoelectronic Devices ◽  
Polarized Light ◽  
Optoelectronic Device ◽  
Raman Shift ◽  
Novel Device ◽  
Device Applications ◽  
New Material

The development of optoelectronic devices requires breakthroughs in new material systems and novel device mechanisms, and the demand recently changes from the detection of signal intensity and responsivity to the exploration of sensitivity of polarized state information. Two-dimensional (2D) materials are a rich family exhibiting diverse physical and electronic properties for polarization device applications, including anisotropic materials, valleytronic materials, and other hybrid heterostructures. In this review, we first review the polarized-light-dependent physical mechanism in 2D materials, then present detailed descriptions in optical and optoelectronic properties, involving Raman shift, optical absorption, and light emission and functional optoelectronic devices. Finally, a comment is made on future developments and challenges. The plethora of 2D materials and their heterostructures offers the promise of polarization-dependent scientific discovery and optoelectronic device application.

scholarly journals Si-based MEMS Resonant Sensor: A Review from Microfabrication Perspective

2021 ◽  
Author(s):  
Ankur Gupta
Keyword(s):  
Lower Cost ◽  
Small Scale ◽  
Technological Advancement ◽  
Final Phase ◽  
Micro Electro Mechanical Systems ◽  
Small Power ◽  
Resonant Sensors ◽  
Digital Electronics ◽  
Mems Resonator ◽  
Silicon Based

With the technological advancement in micro-electro-mechanical systems (MEMS), microfabrication processes along with digital electronics together have opened novel avenues to the development of small-scale smart sensingdevices capable of improved sensitivity with a lower cost of fabrication and relatively small power consumption. This article aims to provide the overview of the recent work carried out on the fabrication methodologies adoptedto develop silicon based resonant sensors. A detailed discussion has been carried out to understand critical steps involved in the fabrication of the silicon-based MEMS resonator. Some challenges starting from the materialsselection to the ?final phase of obtaining a compact MEMS resonator device for its fabrication have also been explored critically.

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