Si-based MEMS Resonant Sensor: A Review from Microfabrication Perspective

Small Power ◽

Resonant Sensors ◽

Digital Electronics ◽

Mems Resonator ◽

Silicon Based

With the technological advancement in micro-electro-mechanical systems (MEMS), microfabrication processes along with digital electronics together have opened novel avenues to the development of small-scale smart sensingdevices capable of improved sensitivity with a lower cost of fabrication and relatively small power consumption. This article aims to provide the overview of the recent work carried out on the fabrication methodologies adoptedto develop silicon based resonant sensors. A detailed discussion has been carried out to understand critical steps involved in the fabrication of the silicon-based MEMS resonator. Some challenges starting from the materialsselection to the ?final phase of obtaining a compact MEMS resonator device for its fabrication have also been explored critically.

Graphene-Based Resonant Sensors for Detection of Ultra-Fine Nanoparticles: Molecular Dynamics and Nonlocal Elasticity Investigations

NANO ◽

10.1142/s1793292015500241 ◽

2015 ◽

Vol 10 (02) ◽

pp. 1550024 ◽

Cited By ~ 19

Author(s):

S. Kamal Jalali ◽

M. Hassan Naei ◽

Nicola Maria Pugno

Keyword(s):

Molecular Dynamics ◽

Nonlocal Elasticity ◽

Md Simulations ◽

Small Scale ◽

Frequency Shifts ◽

Resonant Sensors ◽

Embedded Atom ◽

Metal Metal ◽

Spring System ◽

Mass Spring

Application of single layered graphene sheets (SLGSs) as resonant sensors in detection of ultra-fine nanoparticles (NPs) is investigated via molecular dynamics (MD) and nonlocal elasticity approaches. To take into consideration the effect of geometric nonlinearity, nonlocality and atomic interactions between SLGSs and NPs, a nonlinear nonlocal plate model carrying an attached mass-spring system is introduced and a combination of pseudo-spectral (PS) and integral quadrature (IQ) methods is proposed to numerically determine the frequency shifts caused by the attached metal NPs. In MD simulations, interactions between carbon–carbon, metal–metal and metal–carbon atoms are described by adaptive intermolecular reactive empirical bond order (AIREBO) potential, embedded atom method (EAM), and Lennard–Jones (L–J) potential, respectively. Nonlocal small-scale parameter is calibrated by matching frequency shifts obtained by nonlocal and MD simulation approaches with same vibration amplitude. The influence of nonlinearity, nonlocality and distribution of attached NPs on frequency shifts and sensitivity of the SLGS sensors are discussed in detail.

Mechanical Reliability of Silicon Microstructures

Journal of Micromechanics and Microengineering ◽

10.1088/1361-6439/ac3cd6 ◽

2021 ◽

Author(s):

Toshiyuki Tsuchiya

Keyword(s):

High Performance ◽

Measurement Data ◽

Design Guidelines ◽

Fatigue Properties ◽

Mechanical Reliability ◽

Effective Parameters ◽

Device Reliability ◽

Silicon Microstructures ◽

Silicon Based

Abstract In this article, an overview of the mechanical reliability of silicon microstructures for micro-electro-mechanical systems (MEMS) is given to clarify what we now know and what we still have to know about silicon as a high-performance mechanical material on the microscale. Focusing on the strength and fatigue properties of silicon, attempts to understand the reliability of silicon and to predict the device reliability of silicon-based microstructures are introduced. The effective parameters on the strength and the mechanism of fatigue failure are discussed with examples of measurement data to show the design guidelines for highly reliable silicon microstructures and devices.

Energetic Films Realized by Encapsulating Copper Azide in Silicon-Based Carbon Nanotube Arrays with Higher Electrostatic Safety

Micromachines ◽

10.3390/mi11060575 ◽

2020 ◽

Vol 11 (6) ◽

pp. 575 ◽

Author(s):

Xuwen Liu ◽

Yan Hu ◽

Hai Wei ◽

Bingwen Chen ◽

Yinghua Ye ◽

...

Keyword(s):

Electron Microscopy ◽

Porous Alumina ◽

Chemical Vapor ◽

Exothermic Peak ◽

Alumina Film ◽

Scanning Calorimetry ◽

Transmission Electron ◽

Anodic Oxidation Method ◽

Silicon Based

Since copper azide (Cu(N3)2) has high electrostatic sensitivity and is difficult to be practically applied, silicon-based Cu(N3)2@carbon nanotubes (CNTs) composite energetic films with higher electrostatic safety were fabricated, which can be compatible with micro-electro mechanical systems (MEMS). First, a silicon-based porous alumina film was prepared by a modified two-step anodic oxidation method. Next, CNTs were grown in pores of the silicon-based porous alumina film by chemical vapor deposition. Then, copper nanoparticles were deposited in CNTs by electrochemical deposition and oxidized to Cu(N3)2 by gaseous hydrogen azide. The morphology and composition of the prepared silicon-based Cu(N3)2@CNTs energetic films were characterized by field emission scanning electron microscopy (FESEM), transmission electron microscopy (TEM) and X-ray diffraction (XRD), respectively. The electrostatic sensitivity of the composite energetic film was tested by the Bruceton method. The thermal decomposition kinetics of the composite energetic films were studied by differential scanning calorimetry (DSC). The results show that the exothermic peak of the silicon-based Cu(N3)2@CNTs composite energetic film is at the temperature of 210.95 °C, its electrostatic sensitivity is significantly less than that of Cu(N3)2 and its 50% ignition energy is about 4.0 mJ. The energetic film shows good electric explosion characteristics and is successfully ignited by laser.

A New Photovoltaic Blocks Mutualization System For Micro-Grids Using An Arduino Board And Labview

International Journal of Power Electronics and Drive Systems (IJPEDS) ◽

10.11591/ijpeds.v9.i1.pp98-104 ◽

2018 ◽

Vol 9 (1) ◽

pp. 98 ◽

Author(s):

Abdelkader Mezouari ◽

Rachid Elgouri ◽

Mohammed Alareqi ◽

Khalid Mateur ◽

Hamad Dahou ◽

...

Keyword(s):

Power Supply ◽

Renewable Energy Sources ◽

Electrical Energy ◽

Power Grids ◽

Small Scale ◽

Small Power ◽

Photovoltaic Panels ◽

Switching Matrix ◽

Labview Program ◽

Micro Grids

The photovoltaic systems are often employed into micro-grids; Micro-grids are small power grids designed to provide a reliable and better power supply to a small number of consumers using renewable energy sources. This paper deals with DC micro-grids and present a new system of monitoring and sharing electricity between homes equipped with photovoltaic panels (PV) in the goal to reduce the electrical energy waste. The system is based on dynamic sharing of photovoltaic blocks through homes in stand-alone areas, using an arduino board for controlling the switching matrix. The LABVIEW program is used to further process and display collected data from the system in the PC screen. A small-scale prototype has been developed in a laboratory to proof the concept. This prototype demonstrates the feasibility and functionality of the system.

Noise assessment of the small-scale wind farm

E3S Web of Conferences ◽

10.1051/e3sconf/201911202011 ◽

2019 ◽

Vol 112 ◽

pp. 02011

Author(s):

Cristian-Gabriel Alionte ◽

Daniel-Constantin Comeaga

Keyword(s):

Power Systems ◽

Large Scale ◽

Wind Farm ◽

Wind Farms ◽

Small Scale ◽

Large Power ◽

Small Power ◽

Noise Assessment ◽

The Impact

The importance of renewable energy and especially of eolian systems is growing. For this reason, we propose the investigation of an important pollutant - the noise, which has become so important that European Commission and European Parliament introduced Directive 2002/49/CE relating to the assessment and management of environmental noise. So far, priority has been given to very large-scale systems connected to national energy systems, wind farms whose highly variable output power could be regulated by large power systems. Nowadays, with the development of small storage capacities, it is feasible to install small power wind turbines in cities of up to 10,000 inhabitants too. As a case study, we propose a simulation for a rural locality where individual wind units could be used. This specific case study is interesting because it provides a new perspective of the impact of noise on the quality of life when the use of this type of system is implemented on a large scale. This option, of distributed and small power wind turbine, can be implemented in the future as an alternative or an adding to the common systems.

Monitoring of Temperature Distribution within a Silicon-Based Micro Reformer Using Array Micro Sensors

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.364-366.816 ◽

2007 ◽

Vol 364-366 ◽

pp. 816-821

Author(s):

Chi Yuan Lee ◽

Shuo Jen Lee ◽

Ching Liang Dai ◽

Chin Hua Wu ◽

Guan Wei Wu

Keyword(s):

Fuel Cell ◽

Methanol Conversion ◽

Temperature Sensors ◽

Improve Performance ◽

New Approach ◽

Production Of Hydrogen ◽

Silicon Based ◽

And Control ◽

Channel Type

With advances in micro fuel cell development, the production of hydrogen for micro reformer has become increasingly important. However, some problems regarding the micro reformer are yet to be resolved. These include reducing the size, reducing the quantity of CO and combining the fuel cell, among others. Accordingly, in this investigation, array micro temperature sensors and heaters were combined within a silicon-based micro reformer to measure and control the temperature and thus improve performance and minimize the concentration of CO. In this work, micro-electro-mechanical-systems (MEMS) of the micro channel type were fabricated on a silicon substrate to enhance the methanol conversion ratio. Array micro temperature sensors and heaters were made of platinum and placed inside the micro reformer. Although the micro temperature sensor and heater have already been used to measure and control temperature in numerous fields, they have not been employed in micro reformer and commercial products. Therefore, this study presents a new approach for combining array micro temperature sensors and heaters within a silicon-based micro reformer to minimize the size and improve performance.

The key attributes of processing parameters on semi-solid metal casting: An Overview

E3S Web of Conferences ◽

10.1051/e3sconf/202130901089 ◽

2021 ◽

Vol 309 ◽

pp. 01089

Author(s):

Devendra Pratap Singh ◽

Vijay Kumar Dwivedi ◽

Mayank Agarwal

Keyword(s):

Global Economy ◽

Lower Cost ◽

Processing Parameters ◽

Current Status ◽

Reinforcement Particle ◽

Technological Advancement ◽

Matrix Composites ◽

Current Perspective ◽

Semi Solid ◽

Day By Day

Commercialization of the developed technology is a prime factor for any nation and sector to retain its existence in this global economy. Day by day the technological advancement touching new high in various sectors like the automobile and aircraft industries but high design efficiency is achieved only when it is complemented by appropriate material. In the list newer addition is MMCs (Metal Matrix Composites) which are favorable because of their lower cost achieved by cheaper reinforcement, easy processing, and capabilities of mass production. In recent days, the importance of semi-solid casting has been well accepted among various processing routes for aluminum alloys despite many challenges in terms of process parameters like porosity, agglomeration, non-uniform reinforcement particle distribution, low wettability, and engulfment, and this is a main consideration for the present work. Semi-solid casting is considered to be one of the most important and effective manufacturing processes of aluminum alloy for viable mechanical and metallurgical properties in the current perspective of product requirement and competitiveness. A glimpse of the current status is presented, which shows the potential of the process which can be utilized by the industries for several benefits. In a nutshell, it can be found that process has the capability of alteration by the use of different scraps and also have flexibility according to the processing parameters like stirring, pouring temperature, type of reinforcements, etc.

Prospects for co-firing of clean coal and creosote-treated waste wood at small-scale power stations

Thermal Science ◽

10.2298/tsci0603109z ◽

2006 ◽

Vol 10 (3) ◽

pp. 109-118 ◽

Author(s):

Janis Zandersons ◽

Aivars Zhurinsh ◽

Edward Someus

Keyword(s):

Power Plants ◽

Effective Length ◽

Small Scale ◽

Clean Coal ◽

Waste Wood ◽

So2 Emission ◽

Small Power ◽

Power Stations ◽

Points Of View ◽

The Heat Balance

If a small-scale clean coal fueled power plant is co-fueled with 5% of creosote-treated used-up sleeper wood, the decontamination by carbonisation at 500 ?C in an indirectly heated rotary kiln with the diameter 1.7 m and effective length 10 m can be realized. It should be included in the "3R Clean Coal Carbonisation Plant" system, which processes coal. It will improve the heat balance of the system, since the carbonisation of wood will deliver a lot of high caloricity pyroligneous vapour to the joint furnace of the "3R Clean Coal Carbonisation Plant". Pine wood sleeper sapwood contains 0.25% of sulphur, but the average pine sleeper wood (sapwood and heartwood) 0.05% of sulphur. Most of the sulphur is lost with the pyroligneous vapour and burned in the furnace. Since the "3R Clean Coal Carbonisation Plant" is equipped with a flue gases cleaning system, the SO2 emission level will not exceed 5 mg/m3. The charcoal of the sapwood portion of sleepers and that of the average sleeper wood will contain 0.22% and 0.035% of sulphur, respectively. The increase of the carbonisation temperature does not substantially decrease the sulphur content in charcoal, although it is sufficiently low, and the charcoal can be co-fired with clean coal. The considered process is suitable for small power plants, if the biomass input in the common energy balance is 5 to 10%. If the mean distance of sleepers transportation for Central and Eastern Europe is estimated not to exceed 200 km, the co-combustion of clean coal and carbonized sleepers would be an acceptable option from the environmental and economic points of view.

MEMS resonator mass loading noise model: The case of bimodal adsorbing surface and finite adsorbate amount

Facta universitatis - series Electronics and Energetics ◽

10.2298/fuee2103367j ◽

2021 ◽

Vol 34 (3) ◽

pp. 367-380

Author(s):

Ivana Jokic ◽

Olga Jaksic ◽

Milos Frantlovic ◽

Zoran Jaksic ◽

Koushik Guha

Keyword(s):

Microelectromechanical Systems ◽

Noise Model ◽

Stable Operation ◽

Mass Loading ◽

Mems Devices ◽

Design Development ◽

Resonant Sensors ◽

Mems Resonator ◽

Novel Approach ◽

Adsorption Desorption

Modeling of adsorption and desorption in microelectromechanical systems (MEMS) generally is crucial for their optimization and control, whether it is necessary to decrease the adsorption-desorption influence (thus ensuring stable operation of ultra-precise micro and nanoresonators) or to increase it (and enhancing in this manner the sensitivity of chemical and biological resonant sensors). In this work we derive and use analytical mathematical expressions to model stochastic fluctuations of the mass adsorbed on the MEMS resonator (mass loading noise). We consider the case where the resonator surface incorporates two different types of binding sites and where non-negligible depletion of the adsorbate occurs in a closed resonator chamber. We arrive at a novel expression for the power spectral density of mass loading noise in resonators and prove the necessity of its application in cases when resonators are exposed to low adsorbate concentrations. We use the novel approach presented here to calculate the resonator performance. In this way we ensure optimization of these MEMS devices and consequentially abatement of adsorption-desorption noise-caused degradation of their operation, both in the case of micro/nanoresonators and resonant sensors. This work is intended for a general use in the design, development and optimization of different MEMS systems based on mechanical resonators, ranging from the RF components to chemical and biological sensors.

Fully-Differential TPoS Resonators Based on Dual Interdigital Electrodes for Feedthrough Suppression

Micromachines ◽

10.3390/mi11020119 ◽

2020 ◽

Vol 11 (2) ◽

pp. 119 ◽

Author(s):

Yi Zhang ◽

Jing-Fu Bao ◽

Xin-Yi Li ◽

Xin Zhou ◽

Zhao-Hui Wu ◽

...

Keyword(s):

Fundamental Principle ◽

Electrical Measurements ◽

Element Analysis ◽

Fully Differential ◽

Mems Resonator ◽

Interdigital Electrodes ◽

Negative Effect ◽

Phase Signal ◽

On Chip

As one of the core components of MEMS (i.e., micro-electro-mechanical systems), thin-film piezoelectric-on-silicon (TPoS) resonators experienced a blooming development in the past decades due to unique features such as a remarkable capability of integration for attractive applications of system-on-chip integrated timing references. However, the parasitic capacitive feedthrough poses a great challenge to electrical detection of resonance in a microscale silicon-based mechanical resonator. Herein, a fully-differential configuration of a TPoS MEMS resonator based on a novel structural design of dual interdigital electrodes is proposed to eliminate the negative effect of feedthrough. The fundamental principle of feedthrough suppression was comprehensively investigated by using FEA (i.e., finite-element analysis) modeling and electrical measurements of fabricated devices. It was shown that with the help of fully-differential configuration, the key parameter of SBR (i.e., signal-to-background ratio) was significantly enhanced by greatly suppressing the in-phase signal. The S-parameter measurement results further verified the effectiveness of this novel feedthrough suppression strategy, and the insertion loss and SBR of proposed TPoS resonators were improved to 4.27 dB and 42.47 dB, respectively.