scholarly journals Control the deposition uniformity using ring cathode by DC discharge technique

2019 ◽  
Vol 15 (32) ◽  
pp. 57-67
Author(s):  
Kadhim A. Aadim
Keyword(s):  
Film Thickness ◽  
Direct Current ◽  
Discharge Plasma ◽  
Thickness Distribution ◽  
Experimental Results ◽  
Dc Discharge ◽  
Deposition Uniformity ◽  
Simulation Results

Simulation of direct current (DC) discharge plasma usingCOMSOL Multiphysics software were used to study the uniformityof deposition on anode from DC discharge sputtering using ring anddisc cathodes, then applied it experimentally to make comparisonbetween film thickness distribution with simulation results. Bothsimulation and experimental results shows that the deposition usingcopper ring cathode is more uniformity than disc cathode

scholarly journals Numerical and experimental study on air thrust foil bearing performance with improved structural model based on real-time taper inlet height

2020 ◽  
Author(s):  
Fangcheng Xu ◽  
Liukai Hou ◽  
Bin Wu ◽  
Zeda Dong ◽  
Yongliang Wang
Keyword(s):  
Film Thickness ◽  
Real Time ◽  
Test Data ◽  
Gas Turbines ◽  
Structural Model ◽  
Load Capacity ◽  
Thickness Distribution ◽  
New Model ◽  
Bearing Load ◽  
Simulation Results

Abstract Air thrust foil bearings are key bearings of micro turbo-machinery (such as micro gas turbines, turbo blowers, and air compressors). The bearing load capacity is affected by many factors, and the taper inlet height of bearing structure is closely related to the load capacity. In many previous literature the taper inlet height, as a constant value, was used to calculate film thickness distribution. However, the reality is that the foil will be squeezed by the pressure generated between runner disk and top foil, which makes taper inlet height change during iteration. Therefore, the actual bearing taper inlet height should be chosen properly instead of the constant taper inlet height when iterating. In this paper, an improved computational model of film thickness for adjusting the taper inlet height in real-time is proposed. The relationship between the maximum bearing load capacity and taper inlet height at different rotor speeds of two models is obtained through numerical simulation. It is found that the optimal taper inlet height of the new model is larger than that of the old model. Three types of bearings with different taper inlet height (20μm, 70μm, 114μm) had been tested and the maximum load capacity at different rotor speeds had been obtained. Finally, test data and the simulation results of the two models are compared. It is found that the simulation results of the two models are quite different when the taper inlet height is near the optimal taper inlet height, and the new model is more agree well with the test data.

scholarly journals The Increase in Thickness Uniformity of Films Obtained by Magnetron Sputtering with Rotating Substrate

2016 ◽  
Vol 3 (3) ◽  
pp. 100-104 ◽  
Author(s):  
D. Golosov ◽  
S. Melnikov ◽  
S. Zavadski ◽  
V. Kolos ◽  
J. Okojie
Keyword(s):  
Experimental Data ◽  
Thin Films ◽  
Magnetron Sputtering ◽  
Film Thickness ◽  
Thickness Distribution ◽  
Model Error ◽  
Film Deposition ◽  
Substrate Rotation ◽  
Titanium Thin Films ◽  
Simulation Results

The titanium thin films obtained by magnetron sputtering with the rotating substrate at different distances between the substrate and magnetron centers were studied with regard to the uniformity of the film thickness distribution. On the basis of the experimental data obtained, the model for the magnetron film deposition during substrate rotation was developed. The analysis of the simulation results shows that the model error is not greater than 10%.

scholarly journals Two-dimensional simulation of an Ar/H2 direct-current discharge plasma

AIP Advances ◽  
2021 ◽  
Vol 11 (5) ◽  
pp. 055209
Author(s):  
Yong Che ◽  
Qing Zang ◽  
Xiaofeng Han ◽  
Shumei Xiao ◽  
Kai Huang ◽  
...  
Keyword(s):  
Direct Current ◽  
Discharge Plasma ◽  
Two Dimensional ◽  
Current Discharge ◽  
Direct Current Discharge ◽  
Dimensional Simulation

Simulation of carding condensing process

2021 ◽  
pp. 004051752098812
Author(s):  
Xixi Qian ◽  
Yuanying Shen ◽  
Qiaoli Cao ◽  
Jun Ruan ◽  
Chongwen Yu
Keyword(s):  
Experimental Results ◽  
Simulation Results ◽  
Carding Machine ◽  
The Web

A simulation describing the fiber movement during the condensation was conducted, and the effect of the condensation in the carding machine was studied. The simulation results showed that the condensation has the blending and the evening effect on the condensed sliver, which can be explained by the fiber rearrangement. Moreover, the increasing web width and the decreasing condensing length can result in a more uniform sliver. Further, the evening effect of the web width on the web was verified by experiments. The simulation results were in general agreement with the experimental results.

scholarly journals Controlling Film Thickness Distribution by Magnetron Sputtering with Rotation and Revolution

Coatings ◽  
2021 ◽  
Vol 11 (5) ◽  
pp. 599
Author(s):  
Handan Huang ◽  
Li Jiang ◽  
Yiyun Yao ◽  
Zhong Zhang ◽  
Zhanshan Wang ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Film Thickness ◽  
Multilayer Film ◽  
Thickness Distribution ◽  
Parabolic Cylinder ◽  
Particle Model ◽  
Planetary Motion ◽  
X Rays ◽  
X Ray ◽  
Sputtering System

The laterally graded multilayer collimator is a vital part of a high-precision diffractometer. It is applied as condensing reflectors to convert divergent X-rays from laboratory X-ray sources into a parallel beam. The thickness of the multilayer film varies with the angle of incidence to guarantee every position on the mirror satisfies the Bragg reflection. In principle, the accuracy of the parameters of the sputtering conditions is essential for achieving a reliable result. In this paper, we proposed a precise method for the fabrication of the laterally graded multilayer based on a planetary motion magnetron sputtering system for film thickness control. This method uses the fast and slow particle model to obtain the particle transport process, and then combines it with the planetary motion magnetron sputtering system to establish the film thickness distribution model. Moreover, the parameters of the sputtering conditions in the model are derived from experimental inversion to improve accuracy. The revolution and rotation of the substrate holder during the final deposition process are achieved by the speed curve calculated according to the model. Measurement results from the X-ray reflection test (XRR) show that the thickness error of the laterally graded multilayer film, coated on a parabolic cylinder Si substrate, is less than 1%, demonstrating the effectiveness of the optimized method for obtaining accurate film thickness distribution.

NUMERICAL INVESTIGATION OF FILM DISTRIBUTION IN HORIZONTAL-TUBE FALLING FILM EVAPORATOR

2011 ◽  
Vol 19 (03) ◽  
pp. 177-183 ◽  
Author(s):  
JIN-BO CHEN ◽  
QING-GANG QIU
Keyword(s):  
Numerical Simulation ◽  
Fluid Flow ◽  
Film Thickness ◽  
Liquid Film ◽  
Numerical Investigation ◽  
Horizontal Tube ◽  
Flow Density ◽  
Falling Film ◽  
Film Distribution ◽  
Simulation Results

The technique of horizontal-tube falling film has been used in the cooling and heating industries such as refrigeration systems, heating systems and ocean thermal energy conversion systems. The comprehensive performance of evaporator is directly affected by the film distribution characteristics outside tubes. In this paper, numerical investigation was performed to predict the film characteristics outside the tubes in horizontal-tube falling film evaporator. The effects of liquid flow rate, tube diameter and the circular degree of tube on the film thickness were presented. The numerical simulation results were compared with that of the empirical equations for calculating the falling film thickness, and agreements between them were reasonable. Numerical simulation results show that, at the fixed fluid flow density, the liquid film is thicker on the upper and lower tube and the thinnest liquid film appears at angle of about 120°. The results also indicate that, when the fluid flow density decreases to a certain value, the local dryout spot on the surface of the tube would occur. In addition, the film thickness decreases with the increases of the tube diameter at the fixed fluid flow density.

The Effect of Different Turbulence Models on the Emitter Discharge by Using Computational Fluid Dynamics

2013 ◽  
Vol 662 ◽  
pp. 586-590
Author(s):  
Gang Lu ◽  
Qing Song Yan ◽  
Bai Ping Lu ◽  
Shuai Xu ◽  
Kang Li
Keyword(s):  
Fluid Dynamics ◽  
Computational Fluid Dynamics ◽  
Flow Field ◽  
Turbulence Models ◽  
Experimental Results ◽  
Turbulent Model ◽  
Simulation Results ◽  
Rsm Model ◽  
Dynamics Method ◽  
Emitter Discharge

Four types of Super Typhoon drip emitter with trapezoidal channel were selected out for the investigation of the flow field of the channel, and the CFD (Computational Fluid Dynamics) method was applied to simulate the micro-field inside the channel. The simulation results showed that the emitter discharge of different turbulent model is 4%-14% bigger than that of the experimental results, the average discharge deviation of κ-ω and RSM model is 5, 4.5 respectively, but the solving efficiency of the κ-ω model is obviously higher than that of the RSM model.

Design of Magnetic Levitated Thrust Bearing Experiment Table

2011 ◽  
Vol 199-200 ◽  
pp. 597-602
Author(s):  
Shou Fa Liu ◽  
Zhang Jie Shi ◽  
Chun Feng Li
Keyword(s):  
Thrust Bearing ◽  
Deformation Measurement ◽  
Experimental Results ◽  
Electromagnetic Parameters ◽  
Ansys Simulation ◽  
Overall Design ◽  
Experimental Parameters ◽  
Structural Dimensions ◽  
Simulation Results

In this paper, the overall design of magnetic levitated thrust bearing experiment table was completed, of which the main experimental parameters those are electromagnetic parameters and structural dimensions were determined, in addition, the joint debugging and deformation measurement are performed. Analysis results showed that theoretical value, ANSYS simulation results and experimental results were similar, which said that it is feasible to perform stiffness check of the thrust collar on the experiment table.

An Accurate Solution of the Gas Lubricated, Flat Sector Thrust Bearing

1977 ◽  
Vol 99 (1) ◽  
pp. 82-88 ◽  
Author(s):  
I. Etsion ◽  
D. P. Fleming
Keyword(s):  
Film Thickness ◽  
Thrust Bearing ◽  
Load Capacity ◽  
Thickness Distribution ◽  
Maximum Load ◽  
Accurate Solution ◽  
Operating Conditions ◽  
Thrust Bearings ◽  
Practical Design ◽  
Minimum Film Thickness

A flat sector shaped pad geometry for gas lubricated thrust bearings is analyzed considering both pitch and roll angles of the pad and the true film thickness distribution. Maximum load capacity is achieved when the pad is tilted so as to create a uniform minimum film thickness along the pad trailing edge. Performance characteristics for various geometries and operating conditions of gas thrust bearings are presented in the form of design curves. A comparison is made with the rectangular slider approximation. It is found that this approximation is unsafe for practical design, since it always overestimates load capacity.

Sign in / Sign up

Export Citation Format

Share Document