Carrier Redistribution Analysis of Gate-Biased SiC Power-MOSFET Using Super-Higher-Order Scanning Nonlinear Dielectric Microscopy
Keyword(s):
Abstract Gate-bias dependent depletion layer distribution and carrier distributions in cross-section of SiC power MOSFET were measured by newly developed measurement system based on super-higher-order scanning nonlinear dielectric microscope. The results visualized gate-source voltage dependent redistribution of depletion layer and carrier.
2016 ◽
Vol 63
(8)
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pp. 3165-3170
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2013 ◽
Vol 4
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pp. 974-987
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Keyword(s):
1985 ◽
Vol 249
(5)
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pp. C435-C446
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2001 ◽
Vol 40
(Part 1, No. 5B)
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pp. 3544-3548
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