Adaptive Grinding and Polishing of Silicon Integrated Circuits to Ultra-Thin Remaining Thickness

2015 ◽  
Author(s):  
Robert Chivas ◽  
Scott Silverman ◽  
Michael DiBattista
Keyword(s):  
Integrated Circuits ◽  
Failure Analysis ◽  
End Of Life ◽  
Surface Damage ◽  
Active Device ◽  
Analysis Techniques ◽  
Silicon Integrated Circuits ◽  
One Step ◽  
Silicon Thickness ◽  
Test Package

Abstract Anticipating the end of life for IR-based failure analysis techniques, a method of global backside preparation to ultra-thin remaining silicon thickness (RST) has been developed. Ultra-thin RST enables VIS light techniques such as laser voltage probing. In this work we investigate the lower RST limit due to sub-surface damage from grinding and a one-step polishing method to achieve 3 um RST (+/- 0.8 um) over 121 mm2 die (11 x 11 mm) test package as well as 5 um (+/- ) over 109.2 mm2 (8.0 x 13.7mm) active device.

Electrical Invasiveness of Grinding and Polishing Silicon Integrated Circuits Down to 1 μm Remaining Silicon Thickness

2016 ◽  
Author(s):  
Robert Chivas ◽  
Scott Silverman ◽  
Michael DiBattista ◽  
Ulrike Kindereit
Keyword(s):  
Integrated Circuits ◽  
Failure Analysis ◽  
Electron Hole ◽  
Analysis Techniques ◽  
Silicon Integrated Circuits ◽  
Electron Hole Pair ◽  
Pair Generation ◽  
Silicon Thickness ◽  
Performance Timing ◽  
Grinding And Polishing

Abstract Anticipating the end of life for IR-based failure analysis techniques, a method of global backside preparation to ultra-thin remaining silicon thickness (RST) has been developed. When the remaining silicon is reduced, some redistribution of stress is expected, possibly altering the performance (timing) of integrated circuits in addition to electron-hole pair generation. In this work, a study of the electrical invasiveness due to grinding and polishing silicon integrated circuits to ultra-thin (< 5 um global, ~ 1 um local) remaining thickness is presented.

Ultra-Thinning of Silicon for Backside Fault Isolation

2019 ◽  
Author(s):  
M. J. Campin ◽  
P. Nowakowski ◽  
P. E. Fischione
Keyword(s):  
Integrated Circuits ◽  
Failure Analysis ◽  
State Of The Art ◽  
Fault Isolation ◽  
Infrared Light ◽  
Ion Milling ◽  
Electrical Failure ◽  
Analysis Techniques ◽  
Broad Beam ◽  
Silicon Thickness

Abstract The size of devices on state-of-the-art integrated circuits continues to decrease with each technology node, which drives the need to continually improve the resolution of electrical failure analysis techniques. Solid immersion lenses are commonly used in combination with infrared light to perform analysis from the backside of the device, but typically only have resolutions down to ~200 nm. Improving resolution beyond this requires the use of shorter wavelengths, which in turn requires a silicon thickness in the 2 to 5 µm range. Current ultra-thinning techniques allow consistent thinning to ~10 µm. Thinning beyond this, however, has proven challenging. In this work, we show how broad beam Ar ion milling can be used to locally thin a device’s backside silicon until the remaining silicon thickness is < 5 µm.

New Rapid Failure Analysis Techniques for Multilevel Metallization

MRS Bulletin ◽  
1995 ◽  
Vol 20 (11) ◽  
pp. 74-77
Author(s):  
Edward I. Cole ◽  
Richard E. Anderson
Keyword(s):  
Integrated Circuits ◽  
Product Development ◽  
Failure Analysis ◽  
New Product Development ◽  
New Product ◽  
Electronics Industry ◽  
New Techniques ◽  
Analysis Techniques ◽  
Advantages And Disadvantages ◽  
Failure Site

Open interconnections on integrated circuits (ICs) are a serious and ubiquitous problem throughout the micro-electronics industry. The efforts to understand the mechanisms responsible for producing open interconnections and to develop analytical methods to localize them demonstrate the concern manufacturers have for this problem. Multiple layers of metallization not only increase the probability that an open conductor or via will occur because of the increased number of interconnections and vias but also increase the difficulty in localizing the site of the failure because upper layers may mask the failure site.Rapid failure analysis of open-conductor defects is critical in new product development and reliability assessment of ICs where manufacturing and product development delays can cost millions of dollars a day. In this article, we briefly review some standard failure analysis approaches and then concentrate on new techniques to rapidly locate open-conductor defects that would have been difficult or impossible to identify using earlier methods. Each method is described in terms of the physics of signal generation, application, and advantages and disadvantages when compared to existing methods.

Case Studies of IR Based Rapid PC Motherboard Failure Analysis

2002 ◽  
Author(s):  
Jan Swart ◽  
John Woo ◽  
Randall Zumwalt ◽  
Jeff Birdsley ◽  
Yitages Taffese
Keyword(s):  
Integrated Circuits ◽  
Failure Analysis ◽  
End Of Life ◽  
Case Studies ◽  
Discovery Process ◽  
Ir Thermography ◽  
Ir Camera ◽  
Manufacturing Defects ◽  
Time Consumption ◽  
Functional Components

Abstract This article discusses the techniques useful in the failure discovery process in PC motherboard. It discusses the application of infrared (IR) camera in failure analysis, which overcomes time consumption problems. The article focuses on the experience gained from nine different case studies, where IR thermography system was used to both measure relative temperatures as well as absolute temperatures of components. The failures investigated are overdriven components, finding end-of-life but still functional components, correctly specified components with quality defects, incorrect component placement, internal voltage common collector to ground low resistance integrated circuits failures, PCB defects resulting in power to ground failures, soldering defects resulting in lead opens or solder bridges, and copper trace manufacturing defects or stress-induced cracks.

Functional Failure Analysis by Induced Stimulus

2002 ◽  
Author(s):  
Jim Colvin
Keyword(s):  
Integrated Circuits ◽  
Failure Analysis ◽  
Deep Submicron ◽  
Thermal Gradients ◽  
Small Signal ◽  
Fault Testing ◽  
Analysis Techniques ◽  
Leakage Path ◽  
Design Deficiencies ◽  
External Stimuli

Abstract In the field of failure analysis of integrated circuits, diagnosing functional failures is a requirement. Traditional beam-based analysis techniques use a scanning laser or e-beam to induce a parametric shift which is monitored through changes in current or voltage driven to the device. Deep submicron technologies frustrate these analytical methods due to the nearly immeasurable parametric shifts externally caused by a small signal leakage path internally. These internal failures can be identified functionally by timing, temperature or voltage dependencies but the exact location of the fault is difficult to isolate. RIL (Resistive Interconnect Localization) is a newer technique which can identify via anomalies functionally using induced thermal gradients to the metal but does not address how to uniformly inject the thermal energy required in the silicon to analyze timing design deficiencies and other defects.[1] With SIFT (Stimulus Induced Fault Testing), numerous stimuli will be used to identify speed, fault, and parametric differences in silicon. The heart of this technique revolves around intentionally disturbing devices with external stimuli and comparing the test criteria to reference parts or timing/voltage sensitivities. Synchronous interfacing is possible to any tester without any wiring or program changes.

scholarly journals A Quantitative Method for Measuring Remaining Silicon Thickness during XeF2 FIB Trenching for Backside Circuit Operations

2017 ◽  
Author(s):  
G.P. Salazar ◽  
R.J. Shul ◽  
S.N. Ball ◽  
M.J. Rye ◽  
B.S. Phillips ◽  
...  
Keyword(s):  
Integrated Circuits ◽  
Failure Analysis ◽  
Silicon Substrate ◽  
Quantitative Method ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Quantitative Measure ◽  
Mechanical Methods ◽  
Silicon Thickness

Abstract Backside circuit edit (CE) remains a crucial failure analysis (FA) capability, enabling design modifications on advanced integrated circuits. [1-9] A key requirement of this activity is to approach the active transistor layer of the silicon through the removal of the silicon substrate without exposing or damaging critical transistor features. Several methods have been previously developed to enable or assist with the process with either global or locally targeted techniques for thinning the silicon substrate. These methods employ mechanical methods, laser based techniques (continuous or pulsed), or chemical assisted focused ion beam (FIB) etching to accomplish the thinning. Each of these methods presents different strengths and weaknesses, from their reliability to complexity, but very few techniques provide a precise and accurate quantitative measure of the remaining silicon thickness (RST). Here, we will discuss the use of a FIB with XeF2 for backside Si removal, and the development of an in-situ, accurate measurement of RST.

A Study of Effects of Backside Thinning on Integrated Circuits Using a Precision Diamond Wheel Apparatus

1998 ◽  
Author(s):  
S.P. Roberts ◽  
J.M. Patterson
Keyword(s):  
Integrated Circuits ◽  
Failure Analysis ◽  
Integrated Circuit ◽  
Diamond Wheel ◽  
Packaging Material ◽  
Analysis Techniques ◽  
Recent Advances ◽  
Specialized Equipment

Abstract Recent advances in integrated circuit technologies and in interconnect methodologies to external electronics have made it extremely difficult to conduct failure analysis from the top side of the die (1,2). Therefore analysis techniques are being developed that allow analysis from the backside of the die. The first step in this process involves gaining access to the back of the die through the packaging material. Most backside analysis techniques require that the die then be thinned and polished. This paper describes specialized equipment and procedures to meet those requirements. The equipment is relatively inexpensive compared to other approaches.

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