Scanning Capacitance Microscopy and Spectroscopy for Root Cause Analysis on Location Specific Individual FinFET Devices

2019 ◽  
Author(s):  
Phil Kaszuba ◽  
Leon Moszkowicz ◽  
Randy Wells
Keyword(s):  
Technology Development ◽  
Three Dimensional ◽  
Analytical Techniques ◽  
Full Detail ◽  
Scanning Capacitance Microscopy ◽  
Root Cause ◽  
Critical Data ◽  
Track Record ◽  
Specific Device ◽  
History Of

Abstract In 1986 the Atomic Force Microscope (AFM) was invented by Gerd Binnig, Christoph Gerber, and Calvin Quate [1]. Since then, numerous analytical techniques have been developed and implemented on the AFM platform, evolving into what is collectively called the Scanning Probe Microscope (SPM). The SPM has since become well established as a mainstream analytical instrument with a continually increasing role in the development of nanoscale semiconductor technologies providing critical data from initial concept to technology development to manufacturing to failure analysis [2]. Scanning Capacitance Microscopy (SCM) has a longstanding, well-established track record for detecting dopant-related mechanisms that adversely affect device performance on planar (Field Effect Transistor) FETs as well as other structures (e.g., diodes, capacitors, resistors). The semiconductor industry’s transition to three dimensional FinFET devices has resulted in many challenges with regard to device analysis. This is especially true when it is necessary to perform detailed dopant analysis on a specific device; the device may be comprised of a single or multiple fins that have been called out specifically through traditional fault localization techniques. Scanning Capacitance Spectroscopy (SCS) is an analytical method, implemented on the SCM platform in which a series of DC bias conditions is applied to the sample and the carrier response is recorded using SCM [3]. SCS has a proven history of highlighting dopant related anomalies in semiconductor devices, which, in some instances, might not otherwise be “visible”. This paper describes successful application of SCM and SCS in showing, in full detail, a dopant-related failure mechanism on an individual, location-specific 14 nm FinFET.

Novel Application of Transmission Electron Microscopy and Scanning Capacitance Microscopy for Defect Root Cause Identification and Yield Enhancement

2003 ◽  
Author(s):  
P. Tangyunyong ◽  
T. A. Hill ◽  
C. Y. Nakakura ◽  
J. M. Soden ◽  
E. I. Cole ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
New Product Development ◽  
Analytical Techniques ◽  
Yield Enhancement ◽  
Product Development Process ◽  
Scanning Capacitance Microscopy ◽  
Root Cause ◽  
Transmission Electron ◽  
Root Cause Identification

Abstract Transmission electron microscopy (TEM) [1] and scanning capacitance microscopy (SCM) [2] have become common failure analysis tools at Sandia for new product development, process validation, and yield enhancement. These two techniques provide information that cannot be obtained with other analytical techniques. The information provided by these two techniques has been instrumental in identifying the root causes of several yield-limiting defects in CMOS IC technologies at Sandia. This paper describes an example of how TEM and SCM have been used to identify the root causes of SOI device failures. The corrective actions taken to reduce defects and improve yield are also described.

Some applications of electron beam microanalysis techniques in VLSI process evaluation

1983 ◽  
Vol 41 ◽  
pp. 160-161
Author(s):  
Simon Thomas
Keyword(s):  
Integrated Circuits ◽  
Process Evaluation ◽  
Large Scale ◽  
Technology Development ◽  
Analytical Techniques ◽  
Successful Implementation ◽  
Analysis Of Failures ◽  
Characterization Of Materials ◽  
Circuits Vlsi

Trends in the technology development of very large scale integrated circuits (VLSI) have been in the direction of higher density of components with smaller dimensions. The scaling down of device dimensions has been not only laterally but also in depth. Such efforts in miniaturization bring with them new developments in materials and processing. Successful implementation of these efforts is, to a large extent, dependent on the proper understanding of the material properties, process technologies and reliability issues, through adequate analytical studies. The analytical instrumentation technology has, fortunately, kept pace with the basic requirements of devices with lateral dimensions in the micron/ submicron range and depths of the order of nonometers. Often, newer analytical techniques have emerged or the more conventional techniques have been adapted to meet the more stringent requirements. As such, a variety of analytical techniques are available today to aid an analyst in the efforts of VLSI process evaluation. Generally such analytical efforts are divided into the characterization of materials, evaluation of processing steps and the analysis of failures.

Sea Urchins and Circuses: The Modernist Natural Histories of Jean Painlevé and Alexander Calder

2018 ◽  
Vol 13 (2) ◽  
pp. 187-211
Author(s):  
Patricia E. Chu
Keyword(s):  
New Media ◽  
Sea Urchins ◽  
Life Sciences ◽  
Three Dimensional ◽  
Machine Age ◽  
Avant Garde ◽  
History Of ◽  
And Performance ◽  
The One ◽  
Natural Historian

The Paris avant-garde milieu from which both Cirque Calder/Calder's Circus and Painlevé’s early films emerged was a cultural intersection of art and the twentieth-century life sciences. In turning to the style of current scientific journals, the Paris surrealists can be understood as engaging the (life) sciences not simply as a provider of normative categories of materiality to be dismissed, but as a companion in apprehending the “reality” of a world beneath the surface just as real as the one visible to the naked eye. I will focus in this essay on two modernist practices in new media in the context of the history of the life sciences: Jean Painlevé’s (1902–1989) science films and Alexander Calder's (1898–1976) work in three-dimensional moving art and performance—the Circus. In analyzing Painlevé’s work, I discuss it as exemplary of a moment when life sciences and avant-garde technical methods and philosophies created each other rather than being classified as separate categories of epistemological work. In moving from Painlevé’s films to Alexander Calder's Circus, Painlevé’s cinematography remains at the forefront; I use his film of one of Calder's performances of the Circus, a collaboration the men had taken two decades to complete. Painlevé’s depiction allows us to see the elements of Calder's work that mark it as akin to Painlevé’s own interest in a modern experimental organicism as central to the so-called machine-age. Calder's work can be understood as similarly developing an avant-garde practice along the line between the bestiary of the natural historian and the bestiary of the modern life scientist.

Users behaviors: The Heritage of Digital World

2014 ◽  
Vol 13 (7) ◽  
pp. 4675-4682
Author(s):  
Atefeh Danesh Moghadam ◽  
Alireza Alagha
Keyword(s):  
Technology Development ◽  
Second Step ◽  
Information Communication ◽  
The Third ◽  
Digital World ◽  
New Concepts ◽  
Emerging Patterns ◽  
History Of ◽  
Fourth Step ◽  
Communication And Technology

In the advent of information era, not only digital world is going to expand its territories, it is going to penetrate into the traditional notions about the meaning of the words and also valorize new concepts. According to Oxford Dictionary, the word heritage is defined: The history, tradition and qualities that a country or society has had for many years and that are considered an important part of its character. In order to present how emerging patterns, as the consequences of technology development, are going to be considered as the new concept of heritage, we follow four steps. In the first step, we present the convergence of Information, Communication and Technology (ICT) and a concise history of its convergence. In the second step, we argue how convergence has culminated in emerging patterns and also has made changes in digital world. In the third step, the importance of users behaviors and its mining is surveyed. Finally, in the fourth step; we illustrate User Generated Contents (UGC) as the most prominent users behaviors in digital world.

Contamination Troubleshooting Approach from Problem to Solution

2019 ◽  
Author(s):  
Victor K. F. Chia ◽  
Hugh E. Gotts ◽  
Fuhe Li ◽  
Mark Camenzind
Keyword(s):  
Case Studies ◽  
Semiconductor Devices ◽  
Analytical Techniques ◽  
General Knowledge ◽  
Contamination Source ◽  
Root Cause ◽  
Sources Of Contamination

Abstract Semiconductor devices are sensitive to contamination that can cause product defects and product rejects. There are many possible types and sources of contamination. Root cause resolution of the contamination source can improve yield. The purpose of contamination troubleshooting is to identify and eliminate major yield limiters. This requires the use of a variety of analytical techniques[1]. Most important, it requires an understanding of the principle of contamination troubleshooting and general knowledge of analytical tests. This paper describes a contamination troubleshooting approach with case studies as examples of its application.

Identification of Root Cause Failure in Silicon on Insulator Body Contacted nFETs Using Scanning Capacitance Microscopy and Scanning Spreading Resistance Microscopy

2006 ◽  
Author(s):  
J.S. McMurray ◽  
C.M. Molella
Keyword(s):  
The Body ◽  
Silicon On Insulator ◽  
Back Side ◽  
Cross Sectional ◽  
Plan View ◽  
Spreading Resistance ◽  
Scanning Capacitance Microscopy ◽  
Root Cause ◽  
Cross Sectional Imaging ◽  
Active Channel

Abstract Root cause for failure of 90 nm body contacted nFETs was identified using scanning capacitance microscopy (SCM) and scanning spreading resistance microscopy (SSRM). The failure mechanism was identified using both cross sectional imaging and imaging of the active silicon - buried oxide (BOX) interface in plan view. This is the first report of back-side plan view SCM and SSRM data for SOI devices. This unique plan view shows the root cause for the failure is an under doped link up region between the body contacts and the active channel of the device.

Computed Tomography and Magnetic Resonance Imaging-aided Diagnosis of Primary Essential Cutis Verticis Gyrata: A Case Report with 5-year Follow-up and Review of the Literature

2019 ◽  
Vol 15 (9) ◽  
pp. 906-910
Author(s):  
Hongzhang Zhu ◽  
Shi-Ting Feng ◽  
Xingqi Zhang ◽  
Zunfu Ke ◽  
Ruixi Zeng ◽  
...  
Keyword(s):  
Magnetic Resonance Imaging ◽  
Magnetic Resonance ◽  
Three Dimensional ◽  
Stable Condition ◽  
Resonance Imaging ◽  
Mri Findings ◽  
Cutis Verticis Gyrata ◽  
Essential Form ◽  
History Of ◽  
Magnetic Resonance Imaging Mri

Background: Cutis Verticis Gyrata (CVG) is a rare skin disease caused by overgrowth of the scalp, presenting as cerebriform folds and wrinkles. CVG can be classified into two forms: primary (essential and non-essential) and secondary. The primary non-essential form is often associated with neurological and ophthalmological abnormalities, while the primary essential form occurs without associated comorbidities. Discussion: We report on a rare case of primary essential CVG with a 4-year history of normal-colored scalp skin mass in the parietal-occipital region without symptom in a 34-year-old male patient, retrospectively summarizing his pathological and Computer Tomography (CT) and magnetic resonance imaging (MRI) findings. The major clinical observations on the CT and MR sectional images include a thickened dermis and excessive growth of the scalp, forming the characteristic scalp folds. With the help of CT and MRI Three-dimensional (3D) reconstruction techniques, the characteristic skin changes could be displayed intuitively, providing more evidence for a diagnosis of CVG. At the 5-year followup, there were no obvious changes in the lesion. Conclusion: Based on our observations, we propose that not all patients with primary essential CVG need surgical intervention, and continuous clinical observation should be an appropriate therapy for those in stable condition.

Perception First?

2017 ◽  
Author(s):  
Heather Logue
Keyword(s):  
Track Record ◽  
History Of

Heather Logue, like Williamson, investigates an analogy—in her case, an analogy between knowledge and perception. This chapter asks if knowledge is unanalysable, might also perception be? After all, the history of attempts to analyse the perceptual relation have been subject to counterexamples in such as way as to broadly mirror the track record of the post-Gettier literature. To the extent that the failure of the post-Gettier project motivates a knowledge-first approach, it is natural to wonder whether an analogous sort of failure to analyse (in a fashion that avoids counterexamples) the perceptual relation motivates a perception-first approach. However, this chapter argues that even if the perceptual relation turns out to be unanalysable, this does not necessarily mean that we should embrace a perception-first approach. Finally, it suggests that there might, nonetheless, be an alternative motivation for a perception-first approach.

scholarly journals Sirenomelia: two case reports

2021 ◽  
Vol 15 (1) ◽  
Author(s):  
Asiyeh Shojaee ◽  
Firooze Ronnasian ◽  
Mahdiyeh Behnam ◽  
Mansoor Salehi
Keyword(s):  
Case Reports ◽  
Three Dimensional ◽  
First Trimester ◽  
Mendelian Inheritance ◽  
Lower Limbs ◽  
Congenital Deformity ◽  
White Family ◽  
Her Family ◽  
Caudal Regression ◽  
History Of

AbstractBackgroundSirenomelia, also called mermaid syndrome, is a rare lethal multi-system congenital deformity with an incidence of one in 60,000–70,000 pregnancies. Sirenomelia is mainly characterized by the fusion of lower limbs and is widely associated with severe urogenital and gastrointestinal malformations. The presence of a single umbilical artery derived from the vitelline artery is the main anatomical feature distinguishing sirenomelia from caudal regression syndrome. First-trimester diagnosis of this disorder and induced abortion may be the safest medical option. In this report, two cases of sirenomelia that occurred in an white family will be discussed.Case presentationWe report two white cases of sirenomelia occurring in a 31-year-old multigravid pregnant woman. In the first pregnancy (18 weeks of gestation) abortion was performed, but in the third pregnancy (32 weeks) the stillborn baby was delivered by spontaneous vaginal birth. In the second and fourth pregnancies, however, she gave birth to normal babies. Three-dimensional ultrasound imaging showed fusion of the lower limbs. Neither she nor any member of her family had a history of diabetes. In terms of other risk factors, she had no history of exposure to teratogenic agents during her pregnancy. Also, her marriage was non-consanguineous.ConclusionThis report suggests the existence of a genetic background in this mother with a Mendelian inheritance pattern of 50% second-generation incidence in her offspring.

Sign in / Sign up

Export Citation Format

Share Document