Research on Microhole Processing Technology Based on the Femtosecond-Laser Spiral Trepanning Method

Microholes have crucial applications in aerospace, the automotive industry, and other industries. In this study, the microhole processing technology based on the femtosecond-laser spiral trepanning method was investigated. By adjusting the spiral scanning path, laser power distribution, and defocusing amount to control laser energy distribution, an inverted cone hole, straight hole, and normal cone hole were obtained finally. The morphology and element of the microhole were investigated by scanning electron microscopy (SEM) equipped with energy-dispersive X-ray spectroscopy (EDX). The experimental results of the femtosecond-laser spiral trepanning method could achieve fewer impurities. Finally, the formation mechanisms of different microholes are explained in detail. The method is simpler and more efficient than the traditional microhole processing technology. The femtosecond-laser spiral trepanning method with controllable hole roundness, accuracy, and taper has important practical significance in microhole processing.

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PZT Film and Si Substrate Two-Layer System Patterning Morphology by Femtosecond Pulsed Laser

First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B ◽

10.1115/mnc2007-21186 ◽

2007 ◽

Author(s):

Shizhou Xiao ◽

Rui Guo ◽

Guanghua Cheng ◽

Yalei Wu ◽

Wenhao Huang ◽

...

Keyword(s):

Femtosecond Laser ◽

Laser Energy ◽

Threshold Model ◽

Pulsed Laser ◽

Direct Writing ◽

Si Substrate ◽

Layer System ◽

Substrate Heating ◽

Pzt Film ◽

Femtosecond Pulsed Laser

In this paper, a novel PZT film patterning method by femtosecond laser is proposed. The method is different from traditional dry-etching and wet-etching technology. Femtosecond laser microfabrication technology has several advantages such as high resolution, no mask direct-writing and seldom-heating, etc. A two-layer (PZT thin film and substrate) heating and ablating threshold model is built and the relationship of PZT/Si two-layer system micro ablation morphology depending on laser pulse energy is constructed. From the model and experiment data, we obtain the suitable energy region to pattern PZT film freely without damage Si substrate. A 3μm resolution of PZT pattern is achieved in our experiment. In order to verify the fabrication available of this technology, several micro functional devices are successfully patterned by optimized femtosecond pulsed laser energy and their function are detected. The results prove that the PZT patterning quality is good.

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Research on Hole Depth in Femtosecond Laser Deep Micropore Processing Technology Based on Filament Effect

Optik ◽

10.1016/j.ijleo.2021.168307 ◽

2021 ◽

pp. 168307

Author(s):

Bin Liu ◽

Yingjie Yan ◽

Kai Liao ◽

Wenjun Wang ◽

Xuesong Mei

Keyword(s):

Femtosecond Laser ◽

Processing Technology ◽

Hole Depth

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Effect of Femtosecond Laser Energy Level on Corneal Stromal Cell Death and Inflammation

Journal of Refractive Surgery ◽

10.3928/1081597x-20090917-08 ◽

2009 ◽

Vol 25 (10) ◽

pp. 869-874 ◽

Cited By ~ 39

Author(s):

Fabricio Witzel de Medeiros ◽

Harmeet Kaur ◽

Vandana Agrawal ◽

Shyam S. Chaurasia ◽

Jefferey Hammel ◽

...

Keyword(s):

Cell Death ◽

Energy Level ◽

Femtosecond Laser ◽

Stromal Cell ◽

Laser Energy

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Effect of Laser Energy Accumulation on Surface Periodic Structures Induced by Femtosecond Laser

Chinese Journal of Lasers ◽

10.3788/cjl20103701.0068 ◽

2010 ◽

Vol 37 (1) ◽

pp. 68-73

Author(s):

李智华 Li Zhihua ◽

范敬钦 Fan Jingqin ◽

李普年 Li Punian ◽

房然然 Fang Ranran ◽

张端明 Zhang Duanming

Keyword(s):

Femtosecond Laser ◽

Periodic Structures ◽

Laser Energy ◽

Energy Accumulation

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Femtosecond Laser Fabrication of Engineered Functional Surfaces based on Biodegradable Polymer and Biopolymer/Ceramic Composite Thin Films

Polymers ◽

10.3390/polym11020378 ◽

2019 ◽

Vol 11 (2) ◽

pp. 378 ◽

Cited By ~ 4

Author(s):

Albena Daskalova ◽

Irina Bliznakova ◽

Liliya Angelova ◽

Anton Trifonov ◽

Heidi Declercq ◽

...

Keyword(s):

Thin Films ◽

Surface Roughness ◽

Femtosecond Laser ◽

Surface Functionalization ◽

Biodegradable Polymer ◽

Photoelectron Spectroscopy ◽

Laser Energy ◽

Surface Characteristics ◽

Laser Pulses ◽

Xrd Analysis

Surface functionalization introduced by precisely-defined surface structures depended on the surface texture and quality. Laser treatment is an advanced, non-contact technique for improving the biomaterials surface characteristics. In this study, femtosecond laser modification was applied to fabricate diverse structures on biodegradable polymer thin films and their ceramic blends. The influences of key laser processing parameters like laser energy and a number of applied laser pulses (N) over laser-treated surfaces were investigated. The modification of surface roughness was determined by atomic force microscopy (AFM). The surface roughness (Rrms) increased from approximately 0.5 to nearly 3 µm. The roughness changed with increasing laser energy and a number of applied laser pulses (N). The induced morphologies with different laser parameters were compared via Scanning electron microscopy (SEM) and confocal microscopy analysis. The chemical composition of exposed surfaces was examined by FTIR, X-ray photoelectron spectroscopy (XPS), and XRD analysis. This work illustrates the capacity of the laser microstructuring method for surface functionalization with possible applications in improvement of cellular attachment and orientation. Cells exhibited an extended shape along laser-modified surface zones compared to non-structured areas and demonstrated parallel alignment to the created structures. We examined laser-material interaction, microstructural outgrowth, and surface-treatment effect. By comparing the experimental results, it can be summarized that considerable processing quality can be obtained with femtosecond laser structuring.

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Surface Modification Induced by Femtosecond Laser Pulses in Lithium Niobate

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.142.134 ◽

2011 ◽

Vol 142 ◽

pp. 134-137

Author(s):

Hong Yun Chen ◽

Zhen Zhu Wan ◽

Yan Ling Han

Keyword(s):

Surface Modification ◽

Lithium Niobate ◽

Femtosecond Laser ◽

Laser Energy ◽

Laser Pulses ◽

Sample Surface ◽

Femtosecond Laser Pulses ◽

Two Dimensional ◽

Damage Depth ◽

Transparent Materials

The interaction between femtoseocnd laser and transparent materials has been studied intensively in recent years. When the femtosecond laser was focused onto the surface of the transparent materials, if the laser fluence applied to the sample exceeds the material’s fluence threshold, ablation occurs. In this paper, we study the surface ablation of lithium niobate by femtosecond laser. We produced a two-dimensional array of voids in the sample surface by varying the number of shots and laser energy, and analyze of the damage depth with the relation to the pulse energy and the number of the pulse. It has important reference on the microfabrication in such materials by femtosecond laser.

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Simulation of femtosecond laser absorption by metallic targets and their thermal evolution

Laser and Particle Beams ◽

10.1017/s0263034617000404 ◽

2017 ◽

Vol 35 (3) ◽

pp. 415-428 ◽

Cited By ~ 5

Author(s):

A. Suslova ◽

A. Hassanein

Keyword(s):

Femtosecond Laser ◽

Laser Intensity ◽

Laser Energy ◽

Absorption Efficiency ◽

Optical Parameters ◽

Temperature Dependent ◽

Simulation Code ◽

Laser Absorption ◽

Plasma State ◽

Wide Range

AbstractThe interaction of femtosecond laser with initially cold solid metallic targets (Al, Au, Cu, Mo, Ni) was investigated in a wide range of laser intensity with focus on the laser energy absorption efficiency. Our developed simulation code (FEMTO-2D) is based on two-temperature model in two-dimensional configuration, where the temperature-dependent optical and thermodynamic properties of the target material were considered. The role of the collisional processes in the ultrashort pulse laser–matter interaction has been carefully analyzed throughout the process of material transition from the cold solid state into the dense plasma state during the pulse. We have compared the simulation predictions of the laser pulse absorption with temperature-dependent reflectivity and optical penetration depth to the case of constant optical parameters. By considering the effect of the temporal and spatial (radial) distribution of the laser intensity on the light absorption efficiency, we obtained a good agreement between the simulated results and available experimental data. The appropriate model for temperature-dependent optical parameters defining the laser absorption efficiency will allow more accurate simulation of the target thermal response in the applications where it is critical, such as prediction of the material damage threshold, laser ablation threshold, and the ablation profile.

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Laser energy dependence on femtosecond laser-induced nucleation of protein

Applied Physics A ◽

10.1007/s00339-008-4790-x ◽

2008 ◽

Vol 93 (4) ◽

pp. 911-915 ◽

Cited By ~ 19

Author(s):

Hiroshi Y. Yoshikawa ◽

Ryota Murai ◽

Syou Maki ◽

Tomoya Kitatani ◽

Shigeru Sugiyama ◽

...

Keyword(s):

Femtosecond Laser ◽

Energy Dependence ◽

Laser Energy

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Fast Fabrication of Conductive Copper Structure on Glass Material Using Laser-Induced Chemical Liquid Phase Deposition

Applied Sciences ◽

10.3390/app11188695 ◽

2021 ◽

Vol 11 (18) ◽

pp. 8695

Author(s):

Han-Guel Kim ◽

Min-Soo Park

Keyword(s):

Liquid Phase ◽

Laser Energy ◽

Chemical Reduction ◽

High Energy ◽

Reduction Reaction ◽

Liquid Phase Deposition ◽

Stable Chemical ◽

High Laser ◽

Scanning Path ◽

Good Productivity

Glass is a very stable material at room temperature and has good resistance to gas, bacteria, and organisms. Due to the development of the electronic industry, the industrial demand for creating a conductive pattern on glass is increasing rapidly. To create conductive circuit patterns on the glass surface, non-contact methods based on high energy sources or chemical methods are generally used. However, these methods have disadvantages such as low conductivity, high cost, and size limitations. Processes such as LCLD (laser-induced chemical liquid phase deposition) have been widely studied to solve this problem. However, it has a fatal disadvantage of being slow. Therefore, in this study, various process changes were attempted to improve productivity and conductivity. In particular, sufficient thermal energy was supplied with high laser power for a stable chemical reduction, and the scanning path was changed in various shapes to minimize the ablation that occurs at this time. Through this, it was possible to disperse the overlapped laser energy of high power to widen the activation area of the reduction reaction. With this proposed LCLD process, it is possible to achieve good productivity and fabricate conductive circuit patterns faster than in previous studies.

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