scholarly journals Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration

Micromachines ◽  
2019 ◽  
Vol 10 (5) ◽  
pp. 315 ◽  
Author(s):  
Chicheng Ma ◽  
Limin Cao ◽  
Lei Li ◽  
Mingyu Shao ◽  
Dong Jing ◽  
...  

Microelectromechanical switch has become an essential component in a wide variety of applications, ranging from biomechanics and aerospace engineering to consumer electronics. Electrostatically actuated microbeams and microplates are chief parts of many MEMS instruments. In this study, the nonlinear characteristics of coupled longitudinal–transversal vibration are analyzed, while an electrostatically actuated microbeam is designed considering that the frequency ratio is two to one between the first longitudinal vibration and transversal vibration. The nonlinear governing equations are truncated into a set of coupled ordinary differential equations by the Galerkin method. Then the equations are solved using the multiple-scales method and the nonlinear dynamics of the internal resonance is investigated. The influence of bias voltage, longitudinal excitation and frequency detuning parameters are mainly analyzed. Results show that using the pseudo-arclength continuation method, the nonlinear amplitude–response curves can be plotted continuously. The saturation and jump phenomena are greatly affected by the bias voltage and the detuning frequency. Beyond the critical excitation amplitude, the response energy will transfer from the longitudinal motion to the transversal motion, even the excitation is employed on the longitudinal direction. The large-amplitude jump of the low-order vibration mode can be used to detect the variation of the conditions or parameters, which shows great potential in improving precision of MEMS switches.

2019 ◽  
Vol 26 (7-8) ◽  
pp. 459-474
Author(s):  
Saeed Mahmoudkhani ◽  
Hodjat Soleymani Meymand

The performance of the cantilever beam autoparametric vibration absorber with a lumped mass attached at an arbitrary point on the beam span is investigated. The absorber would have a distinct feature that in addition to the two-to-one internal resonance, the one-to-three and one-to-five internal resonances would also occur between flexural modes of the beam by tuning the mass and position of the lumped mass. Special attention is paid on studying the effect of these resonances on increasing the effectiveness and extending the range of excitation amplitudes at which the autoparametric vibration absorber remains effective. The problem is formulated based on the third-order nonlinear Euler–Bernoulli beam theory, where the assumed-mode method is used for deriving the discretized equations of motion. The numerical continuation method is then applied to obtain the frequency response curves and detect the bifurcation points. The harmonic balance method is also employed for detecting the type of internal resonances between flexural modes by inspecting the frequency response curves corresponding to different harmonics of the response. Parametric studies on the performance of the absorber are conducted by varying the position and mass of the lumped mass, while the frequency ratio of the primary system to the first mode of the beam is kept equal to two. Results indicated that the one-to-five internal resonance is especially responsible for the considerable enhancement of the performance.


Author(s):  
Ruqia Ikram ◽  
Asif Israr

This study presents the vibration characteristics of plate with part-through crack at random angles and locations in fluid. An experimental setup was designed and a series of tests were performed for plates submerged in fluid having cracks at selected angles and locations. However, it was not possible to study these characteristics for all possible crack angles and crack locations throughout the plate dimensions at any fluid level. Therefore, an analytical study is also carried out for plate having horizontal cracks submerged in fluid by adding the influence of crack angle and crack location. The effect of crack angle is incorporated into plate equation by adding bending and twisting moments, and in-plane forces that are applied due to antisymmetric loading, while the influence of crack location is also added in terms of compliance coefficients. Galerkin’s method is applied to get time dependent modal coordinate system. The method of multiple scales is used to find the frequency response and peak amplitude of submerged cracked plate. The analytical model is validated from literature for the horizontally cracked plate submerged in fluid as according to the best of the authors’ knowledge, literature lacks in results for plate with crack at random angle and location in the presence of fluid following validation with experimental results. The combined effect of crack angle, crack location and fluid on the natural frequencies and peak amplitude are investigated in detail. Phenomenon of bending hardening or softening is also observed for different boundary conditions using nonlinear frequency response curves.


Author(s):  
Hassen M. Ouakad ◽  
Mohammad I. Younis ◽  
Fadi M. Alsaleem ◽  
Ronald Miles ◽  
Weili Cui

In this paper, we investigate theoretically and experimentally the static and dynamic behaviors of electrostatically actuated clamped-clamped micromachined arches when excited by a DC load superimposed to an AC harmonic load. A Galerkin based reduced-order model is used to discretize the distributed-parameter model of the considered shallow arch. The natural frequencies of the arch are calculated for various values of DC voltages and initial rises of the arch. The forced vibration response of the arch to a combined DC and AC harmonic load is determined when excited near its fundamental natural frequency. For small DC and AC loads, a perturbation technique (the method of multiple scales) is also used. For large DC and AC, the reduced-order model equations are integrated numerically with time to get the arch dynamic response. The results show various nonlinear scenarios of transitions to snap-through and dynamic pull-in. The effect of rise is shown to have significant effect on the dynamical behavior of the MEMS arch. Experimental work is conducted to test polysilicon curved microbeam when excited by DC and AC loads. Experimental results on primary resonance and dynamic pull-in are shown and compared with the theoretical results.


2017 ◽  
Vol 72 (1) ◽  
pp. 59-69 ◽  
Author(s):  
M.M. Fatih Karahan ◽  
Mehmet Pakdemirli

AbstractStrongly nonlinear cubic-quintic Duffing oscillatoris considered. Approximate solutions are derived using the multiple scales Lindstedt Poincare method (MSLP), a relatively new method developed for strongly nonlinear oscillators. The free undamped oscillator is considered first. Approximate analytical solutions of the MSLP are contrasted with the classical multiple scales (MS) method and numerical simulations. It is found that contrary to the classical MS method, the MSLP can provide acceptable solutions for the case of strong nonlinearities. Next, the forced and damped case is treated. Frequency response curves of both the MS and MSLP methods are obtained and contrasted with the numerical solutions. The MSLP method and numerical simulations are in good agreement while there are discrepancies between the MS and numerical solutions.


Author(s):  
Saad Ilyas ◽  
Feras K. Alfosail ◽  
Mohammad I. Younis

We investigate modeling the dynamics of an electrostatically actuated resonator using the perturbation method of multiple time scales (MTS). First, we discuss two approaches to treat the nonlinear parallel-plate electrostatic force in the equation of motion and their impact on the application of MTS: expanding the force in Taylor series and multiplying both sides of the equation with the denominator of the forcing term. Considering a spring–mass–damper system excited electrostatically near primary resonance, it is concluded that, with consistent truncation of higher-order terms, both techniques yield same modulation equations. Then, we consider the problem of an electrostatically actuated resonator under simultaneous superharmonic and primary resonance excitation and derive a comprehensive analytical solution using MTS. The results of the analytical solution are compared against the numerical results obtained by long-time integration of the equation of motion. It is demonstrated that along with the direct excitation components at the excitation frequency and twice of that, higher-order parametric terms should also be included. Finally, the contributions of primary and superharmonic resonance toward the overall response of the resonator are examined.


2020 ◽  
Vol 2020 ◽  
pp. 1-19
Author(s):  
Yongsheng Ren ◽  
Donghui Yao

Forced vibration of the cutting system with a three-dimensional composite cutter bar is investigated. The composite cutter bar is simplified as a rotating cantilever shaft which is subjected to a cutting force including regenerative delay effects and harmonic exciting items. The nonlinear curvature and inertia of the cutter bar are taken into account based on inextensible assumption. The effects of the moment of inertia, gyroscopic effect, and internal and external damping are also considered, but shear deformation is neglected. Equation of motion is derived based on Hamiltonʼs extended principle and discretized by the Galerkin method. The analytical solutions of the steady-state response of the cutting system are constructed by using the method of multiple scales. The response of the cutting system is studied for primary and superharmonic resonances. The effects of length-to-diameter ratio, damping ratio, cutting force coefficients, ply angle, rotating speed, and internal and external damping are investigated. The results show that nonlinear curvature and inertia imposed a significant effect on the dynamic behavior of the cutting process. The equivalent nonlinearity of the cutting system shows hard spring characteristics. Multiple solutions and jumping phenomenon of typical Duffing system are found in forced response curves.


Author(s):  
Dumitru I. Caruntu ◽  
Martin A. Botello ◽  
Christian A. Reyes ◽  
Julio S. Beatriz

This paper investigates the voltage–amplitude response of superharmonic resonance of second order (order two) of alternating current (AC) electrostatically actuated microelectromechanical system (MEMS) cantilever resonators. The resonators consist of a cantilever parallel to a ground plate and under voltage that produces hard excitations. AC frequency is near one-fourth of the natural frequency of the cantilever. The electrostatic force includes fringe effect. Two kinds of models, namely reduced-order models (ROMs), and boundary value problem (BVP) model, are developed. Methods used to solve these models are (1) method of multiple scales (MMS) for ROM using one mode of vibration, (2) continuation and bifurcation analysis for ROMs with several modes of vibration, (3) numerical integration for ROM with several modes of vibration, and (4) numerical integration for BVP model. The voltage–amplitude response shows a softening effect and three saddle-node bifurcation points. The first two bifurcation points occur at low voltage and amplitudes of 0.2 and 0.56 of the gap. The third bifurcation point occurs at higher voltage, called pull-in voltage, and amplitude of 0.44 of the gap. Pull-in occurs, (1) for voltage larger than the pull-in voltage regardless of the initial amplitude and (2) for voltage values lower than the pull-in voltage and large initial amplitudes. Pull-in does not occur at relatively small voltages and small initial amplitudes. First two bifurcation points vanish as damping increases. All bifurcation points are shifted to lower voltages as fringe increases. Pull-in voltage is not affected by the damping or detuning frequency.


2018 ◽  
Vol 153 ◽  
pp. 06009 ◽  
Author(s):  
Jian Lv ◽  
Mingming Xing

Considering the influence of variable equivalent stiffness on system response, the equivalent stiffness is defined as a step function, and a mathematical model of nonlinear longitudinal vibration of sucker rod string (SRS) is built. The dynamic response under displacement and load force excitation is solved by fourth-order Runge-Kutta method with zero initial condition. The results show the steady-state responses under the displacement and load force excitation of different function forms are different. The response curves of both displacement and velocity under the displacement and load force excitation of cosine function form have larger fluctuation than it under the displacement and load force excitation of sine function form. Therefore, the characteristic analysis of SRS plays an important role in understanding the influence of the excitation form and sensitive parameters on steady response.


Author(s):  
Mohammad A. Bukhari ◽  
Oumar R. Barry

This paper presents the nonlinear vibration of a simply supported Euler-Bernoulli beam with a mass-spring system subjected to a primary resonance excitation. The nonlinearity is due to the mid-plane stretching and cubic spring stiffness. The equations of motion and the boundary conditions are derived using Hamiltons principle. The nonlinear system of equations are solved using the method of multiple scales. Explicit expressions are obtained for the mode shapes, natural frequencies, nonlinear frequencies, and frequency response curves. The validity of the results is demonstrated via comparison with results in the literature. Exact natural frequencies are obtained for different locations, rotational inertias, and masses.


Author(s):  
Julio Beatriz ◽  
Dumitru I. Caruntu

Abstract In this paper, the Method of Multiple Scales, and the Reduced Order Model method of two modes of vibration are used to investigate the amplitude-frequency response of parametric resonance of electrostatically actuated circular plates under hard excitations. Results show that the Method of Multiple Scales is accurate for low voltages. However, it starts to separate from the Reduced Order Model results as the voltage values are larger. The Method of Multiple Scales is good for low amplitudes and weak non-linearities. Furthermore the Reduced Order Model running with AUTO 07p is validated and calibrated using the 2 Term ROM time responses.


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